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    • 1. 发明授权
    • Devices for ionizing residual gases in vacuum systems
    • 真空系统中残留气体的离子化装置
    • US3796917A
    • 1974-03-12
    • US3796917D
    • 1972-08-21
    • NAT ELECTROSTATICS CORP
    • HILLER D
    • H01J41/06H01J41/16H01J19/70H01J41/00
    • H01J41/16H01J41/06
    • The disclosed ionizers are of the orbitron type utilizing a high voltage anode in the form of a wire or rod extending axially within an outer generally cylindrical electrode which may be in the form of a cylindrical conductive screen connected to the negative terminal of the power supply. One or more of the ionizers are mounted within a vacuum space containing residual gas molecules to be ionized. The resulting ions may be propelled by electrostatic field forces to the cylindrical screen and also to the walls of the vacuum chamber where the ions may be absorbed or gettered by freshly deposited titanium or some other gettering material. By this mechanism of ion getter pumping, gas molecules are effectively removed from the vacuum space so as to improve the vacuum. In accordance with the present invention, electrons are injected into the space between the axial anode and the outer cylindrical electrode by an electron-emitting electrode which is typically in the form of a generally circular loop or ring encircling the axial anode and spaced inwardly from the cylindrical outer electrode in the radial electric field beween the inner and outer electrodes. The electron-emitting electrode is preferably energized with a direct current which causes heating of the electron-emitting electrode so that electrons are emitted thermionically therefrom. The current also produces an axial magnetic field in the space between the electron-emitting electrode and the anode. The combination of the radial electric field and the axial magnetic field causes a high percentage of the emitted electrons to go into orbits around the anode so that the electrons have extremely long mean-free paths before finally being attracted to the anode. In this way, the orbiting electrons produce a high degree of ionization of the residual gas molecules in the vacuum space. The axial magnetic field may be enhanced by an electromagnet or a permanent magnet disposed near the circular electron-emitting electrode and preferably aligned axially therewith. The electromagnet may take the form of a loop having one or more turns disposed near the electron-emitting electrode or a coil having a multiplicity of turns and preferably having a core of magnetic material. The permanent magnet may be generally cylindrical in shape and disposed axially. The ionizer may also be used to provide an ion gage in which the ion current to the cylindrical electrode is measured.
    • 6. 发明授权
    • Method for determining at least one physical parameter using a sensor unit
    • US09995839B2
    • 2018-06-12
    • US15311937
    • 2015-05-22
    • Gerd Reime
    • Gerd Reime
    • G01R27/28G01V3/10G01R27/26G01R27/00G01N27/02G01N27/62H01J41/02H01J41/00G01N27/64
    • G01V3/10G01N27/028G01N27/62G01N27/64G01R27/00G01R27/26G01R27/2611G01R27/267H01J41/00H01J41/02
    • In a method for determining at least one physical parameter, a sensor unit which is activated by at least one periodic excitation (1.4) is provided, wherein the sensor unit has at least one detection region in which changes of the parameter in the surroundings of the sensor unit lead to output signal (1.7) from the sensor unit. The sensor unit is wired such that if there are no changes of the parameter in the detection region the output signal (1.7) is a zero signal or virtually a zero signal at the output of the sensor unit, whereas if there are changes of the parameter in the detection region the output signal (1.7) is a signal that is not zero and has a specific amplitude and phase. In a closed control loop, the non-zero signal in the receive path is adjusted to zero using a control signal to achieve an adjusted state even in the presence of changes of the parameter in the detection region. The control signal is evaluated in order to determine the physical parameter. The output signal (1.7) from the sensor unit is reduced substantially to the fundamental wave of the excitation (1.4) and the output signal (1.7) is controlled to zero in the entire phase space by means of at least one pulse width modulation. A temperature-stable, fully digital measuring system is provided as a result of the fact that the at least one pulse width modulation itself generates a correction signal with a variable pulse width and possibly a variable phase which is then added to the output signal (1.7) from the sensor unit and the output signal is thereby controlled to zero in the entire phase space, wherein the pulse width of the correction signal and/or the phase of the correction signal is/are determined by the deviations of the output signal (1.7) from zero.
    • 7. 发明授权
    • High field asymmetric waveform ion mobility spectrometer FAIMS
    • 高场非对称波形离子迁移谱仪FAIMS
    • US07378651B2
    • 2008-05-27
    • US10529307
    • 2003-09-05
    • Roger Guevremont
    • Roger Guevremont
    • B01D59/44H01J41/00
    • G01N27/624
    • Disclosed is an apparatus for separating ions including a plurality of first electrode portions, each first electrode portion of the plurality of first electrode portions having a first length and an outer surface that is at least partially curved in a direction transverse to the first length. The apparatus also includes a plurality of second electrode portions arranged in an alternating sequence with the plurality of first electrode portions, each second electrode portion of the plurality of second electrode portions having a second length and an outer surface that is curved in a direction transverse to the second length, a space between the outer surface of a first electrode portion and the outer surface of an adjacent second electrode portion defining a portion of an analytical gap for separating ions. At least an electrical controller is provided for electrically coupling to at least one of the plurality of first electrode portions and the plurality of second electrode portions, for applying an asymmetric waveform voltage between the at least one of the plurality of first electrode portions and the plurality of second electrode portions and for applying a direct current voltage between the at least one of the plurality of first electrode portions and the plurality of second electrode portions so as to establish an electric field within the portion of the analytical gap. During use, ions propagating along a direction that is transverse to both the first length and the second length are separated in the portion of the analytical gap between the outer surface of the first electrode portion and the outer surface of the adjacent second electrode portion.
    • 公开了一种用于分离包括多个第一电极部分的离子的装置,多个第一电极部分中的每个第一电极部分具有第一长度,并且外表面在横向于第一长度的方向上至少部分地弯曲。 该装置还包括与多个第一电极部分交替地排列的多个第二电极部分,多个第二电极部分的每个第二电极部分具有第二长度,并且外表面在横向于 第二长度,第一电极部分的外表面与限定用于分离离子的分析间隙的一部分的相邻的第二电极部分的外表面之间的空间。 至少提供电控制器以电耦合到多个第一电极部分和多个第二电极部分中的至少一个,用于在多个第一电极部分和多个第一电极部分中的至少一个之间施加非对称波形电压 并且用于在所述多个第一电极部分中的所述至少一个与所述多个第二电极部分之间施加直流电压,以便在所述分析间隙的所述部分内建立电场。 在使用过程中,沿着横向于第一长度和第二长度的方向传播的离子在第一电极部分的外表面和相邻的第二电极部分的外表面之间的分析间隙的部分中分离。