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1. 发明申请

US20160131548A1 LONG LIFETIME COLD CATHODE IONIZATION VACUUM GAUGE DESIGN 有权
标题翻译：长寿命冷阴极离子真空计量设计
公开(公告)号：US20160131548A1
公开(公告)日：2016-05-12
申请号：US14536102
申请日：2014-11-07
申请人： MKS Instruments, Inc.
发明人： Gerardo A. Brucker , Scott C. Heinbuch
IPC分类号： G01L21/34
CPC分类号： G01L21/34 , G01L21/30 , G01L21/32 , H01J27/00 , H01J27/02 , H01J37/04 , H01J37/08 , H01J41/00 , H01J41/02 , H01J41/06
摘要： A Long Lifetime Cold Cathode Ionization Vacuum Gauge Design with an extended anode electrode having an axially directed tip, a cathode electrode, and a baffle structure. The axially directed tip of the anode electrode can have a rounded exterior with a diameter at least 10% greater than the diameter of the anode electrode.
摘要翻译：长寿命冷阴极电离真空计设计具有带有轴向引导尖端的延伸阳极电极，阴极电极和挡板结构。阳极电极的轴向定向的尖端可以具有圆形的外部，其直径比阳极电极的直径大至少10％。

2. 发明授权

US09995839B2 Method for determining at least one physical parameter using a sensor unit 有权
公开(公告)号：US09995839B2
公开(公告)日：2018-06-12
申请号：US15311937
申请日：2015-05-22
申请人： Gerd Reime
发明人： Gerd Reime
IPC分类号： G01R27/28 , G01V3/10 , G01R27/26 , G01R27/00 , G01N27/02 , G01N27/62 , H01J41/02 , H01J41/00 , G01N27/64
CPC分类号： G01V3/10 , G01N27/028 , G01N27/62 , G01N27/64 , G01R27/00 , G01R27/26 , G01R27/2611 , G01R27/267 , H01J41/00 , H01J41/02
摘要： In a method for determining at least one physical parameter, a sensor unit which is activated by at least one periodic excitation (1.4) is provided, wherein the sensor unit has at least one detection region in which changes of the parameter in the surroundings of the sensor unit lead to output signal (1.7) from the sensor unit. The sensor unit is wired such that if there are no changes of the parameter in the detection region the output signal (1.7) is a zero signal or virtually a zero signal at the output of the sensor unit, whereas if there are changes of the parameter in the detection region the output signal (1.7) is a signal that is not zero and has a specific amplitude and phase. In a closed control loop, the non-zero signal in the receive path is adjusted to zero using a control signal to achieve an adjusted state even in the presence of changes of the parameter in the detection region. The control signal is evaluated in order to determine the physical parameter. The output signal (1.7) from the sensor unit is reduced substantially to the fundamental wave of the excitation (1.4) and the output signal (1.7) is controlled to zero in the entire phase space by means of at least one pulse width modulation. A temperature-stable, fully digital measuring system is provided as a result of the fact that the at least one pulse width modulation itself generates a correction signal with a variable pulse width and possibly a variable phase which is then added to the output signal (1.7) from the sensor unit and the output signal is thereby controlled to zero in the entire phase space, wherein the pulse width of the correction signal and/or the phase of the correction signal is/are determined by the deviations of the output signal (1.7) from zero.

3. 发明授权

US08342813B2 Combined pumping system comprising a getter pump and an ion pump 有权
标题翻译：组合泵送系统，包括吸气泵和离子泵
公开(公告)号：US08342813B2
公开(公告)日：2013-01-01
申请号：US12920797
申请日：2009-03-26
申请人： Michael Laurence Ferris , Andrea Conte
发明人： Michael Laurence Ferris , Andrea Conte
IPC分类号： F04B37/02 , F04F99/00
CPC分类号： H01J41/00
摘要： A combined pumping system comprises a getter pump and an ion pump. The getter and ion pumps are mounted on a same flange and are arranged on the same side of the flange at two different points thereof. The flange can be mounted to a vacuum chamber, such that the combined pumping system evacuates the vacuum chamber.
摘要翻译：组合泵系统包括吸气泵和离子泵。吸气剂和离子泵安装在相同的法兰上，并且在两个不同的位置上布置在法兰的同一侧。凸缘可以安装到真空室，使得组合的泵送系统排空真空室。

4. 发明申请

US20160240479A1 SYSTEM AND METHOD FOR IDENTIFYING OPERATING TEMPERATURES AND MODIFYING OF INTEGRATED CIRCUITS 有权
标题翻译：识别操作温度的系统和方法以及整合电路的修改
公开(公告)号：US20160240479A1
公开(公告)日：2016-08-18
申请号：US14624907
申请日：2015-02-18
申请人： GLOBALFOUNDRIES INC.
发明人： Jeanne P. Bickford , Nazmul Habib , Baozhen Li , Tad J. Wilder
IPC分类号： H01L23/525 , G01K7/16 , H01L23/532 , G01N25/00
CPC分类号： G01K7/16 , G01L21/30 , G01N17/00 , G01N27/62 , G01N27/64 , G01R31/00 , H01J41/00 , H01J41/02 , H01L23/34
摘要： Aspects of the present disclosure include a computer-implemented method for identifying an operating temperature of an integrated circuit (IC), the method including using a computing device for: applying a test voltage to a test circuit embedded within the IC, the test circuit including a phase shift memory (PSM) element therein, wherein the PSM element crystallizes at a crystallization temperature from an amorphous phase having a first electrical resistance into a crystalline phase having a second electrical resistance, the second electrical resistance being less than the first electrical resistance; and identifying the IC as having operated above the crystallization temperature in response to a resistance of the test circuit at the test voltage being outside of the target operating range.
摘要翻译：本公开的方面包括用于识别集成电路（IC）的工作温度的计算机实现的方法，所述方法包括使用计算设备：将测试电压施加到嵌入在所述IC内的测试电路，所述测试电路包括在其中的相移存储器（PSM）元件，其中所述PSM元件在结晶温度下从具有第一电阻的非晶相结晶成具有第二电阻的晶相，所述第二电阻小于所述第一电阻; 以及响应于所述测试电压在所述测试电压处于目标工作范围之外的电阻而将所述IC识别为高于所述结晶温度的IC。

5. 发明申请

US20110014063A1 COMBINED PUMPING SYSTEM COMPRISING A GETTER PUMP AND AN ION PUMP 有权
标题翻译：组合泵系统，包括一个泵和一个泵
公开(公告)号：US20110014063A1
公开(公告)日：2011-01-20
申请号：US12920797
申请日：2009-03-26
申请人： Michael Laurence Ferris , Andrea Conte
发明人： Michael Laurence Ferris , Andrea Conte
IPC分类号： F04B37/02
CPC分类号： H01J41/00
摘要： A combined pumping system (10) comprises a getter pump (12) and an ion pump (13). The getter and ion pumps (12, 13) are mounted on a same flange (11) and are arranged on the same side of said flange (11) at two different points thereof.
摘要翻译：组合泵送系统（10）包括吸气泵（12）和离子泵（13）。吸气剂和离子泵（12,13）安装在相同的凸缘（11）上，并且在其两个不同的位置处布置在所述凸缘（11）的同一侧上。

6. 发明授权

US3174325A Porous adsorber bodies for use in desorption spectrography 失效
标题翻译：用于解吸光谱的多孔吸附体
公开(公告)号：US3174325A
公开(公告)日：1965-03-23
申请号：US24350562
申请日：1962-12-10
申请人： CA NAT RESEARCH COUNCIL
发明人： AVELING REDHEAD PAUL
IPC分类号： G01N25/14 , G01N30/00 , H01J41/00 , H01J49/16
CPC分类号： G01N30/00 , G01N25/14 , G01N2030/008 , H01J41/00 , H01J49/16

7. 发明授权

US4296356A Ionization vacuum gauge circuit 失效
标题翻译：电离真空计电路
公开(公告)号：US4296356A
公开(公告)日：1981-10-20
申请号：US102480
申请日：1979-12-11
申请人： Karl Beinitz , Joachim Schubert
发明人： Karl Beinitz , Joachim Schubert
IPC分类号： G01L21/32 , H01J41/00 , G08B21/00 , H05B37/03
CPC分类号： H01J41/00 , G01L21/32
摘要： In a circuit for an ionization vacuum gauge having a thermionic filament, a control circuit receptive of a control current for controlling the filament and a switch for applying the control current to the control circuit, a circuit is provided for indicating a filament interruption independent of the state of the switch. The circuit includes at least one resistor by-passing the switch to provide a continuous sensing current to the filament and a detector for detecting the interruption in the sensing current and for indicating such an interruption.
摘要翻译：在具有热离子细丝的电离真空计的电路中，接受用于控制灯丝的控制电流的控制电路和用于向控制电路施加控制电流的开关，提供电路以指示灯丝中断，独立于状态的开关。该电路包括至少一个电阻器旁通开关以向灯丝提供连续的感测电流，以及用于检测感测电流中断并用于指示这种中断的检测器。

8. 发明授权

US3717525A Method for production of a diffusion membrane arrangement 失效
标题翻译：生产扩散膜装置的方法
公开(公告)号：US3717525A
公开(公告)日：1973-02-20
申请号：US3717525D
申请日：1968-05-23
申请人： VARIAN MAT GMBH
发明人： BUELTEMANN H
IPC分类号： G01M3/20 , H01J41/00 , B32B5/18 , B32B31/12
CPC分类号： G01M3/20 , H01J41/00
摘要： THE INVENTION IS CONCERNED WITH A METHOD OF MAKING GAS DIFFUUSION MEMBRANES. THE PORES ADJACENT THE SURFACE OF A POROUS PERMEABLE CARRIER MEMBER ARE FILLED WITH A MATERIAL, LATER TO BE REMOVED, A DIFFUSION MEMBER IS APPLIED TO THAT SURFACE, AND THE FILLER MATERIAL IS THEN REMOVED. IN ANOTHER EMBODIMENT A DIFFUSION MEMBER IS APPLIED TIO A GLASS CARRIER MEMBER WHICH IS PORE-FREE, AND THE GLASS IS THEN MADE POROUS BY HEAT TREATMENT AND SELECTIVE DISSOLUTION.

9. 发明授权

US3591827A Ion-pumped mass spectrometer leak detector apparatus and method and ion pump therefor 失效
标题翻译：离子泵质谱仪泄漏探测器装置及方法及其离子泵
公开(公告)号：US3591827A
公开(公告)日：1971-07-06
申请号：US3591827D
申请日：1967-11-29
申请人： ANDAR ITI INC
发明人： HALL LEWIS D
IPC分类号： G01M3/20 , H01J7/18 , H01J41/00 , H01J41/20 , H01J17/22
CPC分类号： H01J7/18 , G01M3/202 , H01J41/00 , H01J41/20
摘要： A mass spectrometer is connected to a vacuum system which includes a vacuum-pumping system and which is communicated with the vessel under test exposed to a suitable probe gas. The vacuum-pumping system consists of a first stage in the form of a mechanical roughing pump for reducing the system pressure to roughing pressure, and a second stage in the form of a highvacuum pump which comprises an electronic getter-ion (sublimation) pump for pumping the chemically active nonnoble gases in combination with a Penning discharge chamber which houses discharge cathodes exposed to the deposit of the getter material from the getter-ion pump for pumping the noble gas.

10. 发明授权

US09625325B2 System and method for identifying operating temperatures and modifying of integrated circuits 有权
公开(公告)号：US09625325B2
公开(公告)日：2017-04-18
申请号：US14624907
申请日：2015-02-18
申请人： GLOBALFOUNDRIES INC.
发明人： Jeanne P. Bickford , Nazmul Habib , Baozhen Li , Tad J. Wilder
IPC分类号： G01R31/26 , G01K7/16 , G01L21/30 , G01R31/00 , G01N27/64 , G01N27/62 , G01N17/00 , G01N27/82 , G01R33/12 , G01N27/74 , H01J41/02 , H01J41/00
CPC分类号： G01K7/16 , G01L21/30 , G01N17/00 , G01N27/62 , G01N27/64 , G01R31/00 , H01J41/00 , H01J41/02 , H01L23/34
摘要： Aspects of the present disclosure include a computer-implemented method for identifying an operating temperature of an integrated circuit (IC), the method including using a computing device for: applying a test voltage to a test circuit embedded within the IC, the test circuit including a phase shift memory (PSM) element therein, wherein the PSM element crystallizes at a crystallization temperature from an amorphous phase having a first electrical resistance into a crystalline phase having a second electrical resistance, the second electrical resistance being less than the first electrical resistance; and identifying the IC as having operated above the crystallization temperature in response to a resistance of the test circuit at the test voltage being outside of the target operating range.

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