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    • 2. 发明申请
    • Method of forming zinc oxide film, method of producing semiconductor element substrate using same, and method of producing photovoltaic element
    • 氧化锌膜的形成方法,使用其的半导体元件基板的制造方法以及光电元件的制造方法
    • US20030085129A1
    • 2003-05-08
    • US10187810
    • 2002-07-03
    • Yukie Shishido
    • C25D007/06H01L021/31H01L021/469C23C016/00C25D009/00
    • C25D5/028C25D7/0671C25D7/12C25D9/04H01L31/056H01L31/1884Y02E10/52
    • A ZnO film forming method is a method of letting an electric current flow between a conductive substrate immersed in at least one forming bath containing at least zinc ions, and a counter electrode immersed in the at least one forming bath, thereby forming a zinc oxide film on the conductive substrate, wherein deposition of a zinc oxide film on a back surface of the conductive substrate is decreased by adjusting (1) a distance between the back surface of the conductive substrate and a region facing at least the periphery of the back surface in a surface facing the back surface, and (2) an electric conductivity of the forming bath, and (3) an electric current density between the conductive substrate and the counter electrode, thereby establishing a mass production technology based on electrolytic deposition of the zinc oxide film as a low cost technology and providing the method of forming the ZnO film with high performance and excellent adhesion to the substrate while reducing the amount of the film deposited on the back surface.
    • ZnO膜形成方法是使浸渍在至少含有锌离子的至少一个成形槽中的导电性基板和浸入至少一层成形槽中的对置电极之间的电流流动的方法,由此形成氧化锌膜 在导电性基板上,通过调整(1)导电性基板的背面与至少背面的周边的区域之间的距离,减小导电性基板的背面上的氧化锌膜的沉积, 面向背面的表面,(2)成形槽的导电性,(3)导电性基板与对电极之间的电流密度,由此建立基于氧化锌的电解沉积的大规模生产技术 薄膜作为低成本技术,并且提供了在减少ou ou色时具有高性能和优异的粘附性的方法形成ZnO薄膜 nt的膜沉积在背面。
    • 6. 发明申请
    • Method of forming zinc oxide film and process for producing photovoltaic device using it
    • 形成氧化锌膜的方法和使用该方法生产光伏器件的方法
    • US20020063065A1
    • 2002-05-30
    • US09953256
    • 2001-09-17
    • Yuichi SonodaNoboru ToyamaYusuke MiyamotoHidetoshi Tsuzuki
    • H01L031/00H01L021/00G01J001/00H01J040/00C25D009/00C25D011/00H02N006/00H01L025/00
    • C25D9/08H01L31/1836H01L31/1884Y02E10/50
    • The present invention provides a method of forming a zinc oxide film on a conductive substrate, which comprises dipping the conductive substrate and a counter electrode in an aqueous solution containing at least nitric acid ion and zinc ion and supplying a current between these electrodes to form a zinc oxide film, wherein the aqueous solution further contains polycarboxylic acid in which a carboxyl radical is bonded to each of carbon having sp2 hybrid orbital, or its ester with a concentration of 0.5 nullmol/L to 500 nullmol/L. Thereby, it is possible to form in a short time a thin film having texture structure exhibiting an optical confinement effect, to prevent abnormal growth of a deposited film, and to obtain a zinc oxide thin film having excellent uniformity and adhesion on a surface thereof where the film is formed. Also, by applying the photovoltaic device to a stacked structure, it is possible to enhance the photoelectric characteristics and mass producibility.
    • 本发明提供一种在导电性基材上形成氧化锌膜的方法,该方法包括将导电性基板和对置电极浸渍在至少含有硝酸离子和锌离子的水溶液中,并在这些电极之间供给电流,形成 氧化锌膜,其中所述水溶液还含有其中羧基与每个具有sp2混合轨道的碳键合的多元羧酸或其浓度为0.5mumol / L至500mumol / L的酯。 由此,可以在短时间内形成具有光学限制效果的纹理结构的薄膜,以防止沉积膜的异常生长,并且获得在其表面上具有优异的均匀性和粘附性的氧化锌薄膜, 形成了电影。 此外,通过将光电器件应用于层叠结构,可以提高光电特性和大规模生产率。
    • 10. 发明申请
    • Anodizing system with a coating thickness monitor and an anodized product
    • 具有涂层厚度监测器和阳极氧化产品的阳极氧化系统
    • US20020112967A1
    • 2002-08-22
    • US09742595
    • 2000-12-21
    • Joseph K. Price
    • B32B009/00C25C007/00C25B009/00C25D017/00C25D009/00
    • C25D11/005C25D11/04C25D21/12
    • An anodizing system for forming a anodized coating on at least a portion of a substrate thereby creating an anodized substrate is disclosed. The anodizing system includes a bath, a coating thickness monitor, at least one probe and at least one controller. The coating thickness monitor includes at least one radiation source directed at at least a portion of the anodized substrate; at least one probe for capturing at least a portion of the radiation reflected and refracted by the anodized coating on the anodized substrate, the captured radiation being at least a portion of the radiation directed the anodized substrate from the radiation source; and at least one detector in communication with the at least one probe, the at least one detector capable of processing the captured radiation to allow a determination of at least the thickness.
    • 公开了一种用于在基底的至少一部分上形成阳极化涂层的阳极氧化系统,从而产生阳极氧化的基底。 阳极氧化系统包括浴,涂层厚度监测器,至少一个探针和至少一个控制器。 所述涂层厚度监测器包括至少一个辐射源,所述至少一个辐射源指向所述阳极氧化基板的至少一部分; 至少一个探针,用于捕获由所述阳极氧化基底上的所述阳极化涂层反射和折射的所述辐射的至少一部分,所述被捕获的辐射是从所述辐射源引导所述经阳极氧化的基底的所述辐射的至少一部分; 以及与所述至少一个探针连通的至少一个检测器,所述至少一个检测器能够处理所捕获的辐射以允许至少确定所述厚度。