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    • 6. 发明授权
    • Tertiary alcohol compounds having an alicyclic structure
    • 具有脂环结构的叔醇化合物
    • US06469220B2
    • 2002-10-22
    • US10025064
    • 2001-12-19
    • Koji HasegawaTakeshi KinshoTakeru Watanabe
    • Koji HasegawaTakeshi KinshoTakeru Watanabe
    • C07C3522
    • C07C33/14C07C35/21C07C2601/08C07C2601/14C07C2603/90G03F7/0395G03F7/0397
    • The present invention provides novel tertiary alcohol compounds which are useful as monomers for the preparation of photoresist materials having high transparency and a great affinity for the substrate and hence suitable for use in photolithography using a light source comprising preferably light having a wavelength of 300 nm or less and more preferably light emitted from an ArF excimer laser. Specifically, the present invention provides tertiary alcohols compounds represented by the following general formula (1): wherein R1 and R2 each independently represent a straigh-chain, branched or cyclic alkyl group having 1 to 10 carbon atoms, in which some or all of the hydrogen atoms on the constituent carbon atoms may be replaced by a halogen atom or halogen atoms, or R1 and R2 may be joined together to form an aliphatic hydrocarbon ring; Z represents a straight-chain, branched or cyclic divalent organic group having 2 to 10 carbon atoms; and k is 0 or 1.
    • 本发明提供新颖的叔醇化合物,其可用作制备具有高透明度和对基材的极好亲和力的光致抗蚀剂材料的单体,因此适用于使用光源的光刻法,该光源优选包含波长为300nm的光或 更优选由ArF准分子激光器发出的光。特别地,本发明提供由以下通式(1)表示的叔醇化合物:其中R 1和R 2各自独立地表示具有1个 10个碳原子,其中构成碳原子上的一些或全部氢原子可以被卤素原子或卤素原子取代,或者R1和R2可以连接在一起形成脂族烃环; Z表示具有2〜10个碳原子的直链,支链或环状二价有机基团; k为0或1。