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    • 2. 发明授权
    • Laser machining head
    • US06614002B2
    • 2003-09-02
    • US10000401
    • 2001-12-04
    • Ludwig Weber
    • Ludwig Weber
    • B23K2602
    • B23K26/034B23K26/032B23K26/1462B23K26/707
    • A laser machining head for machining a workpiece by a laser beam having a housing which has an inlet opening and an outlet opening between which a passage is constructed for the laser beam through which is led a working beam pathway; focusing optics for focusing the laser beam into a working focus which is located outside the housing at a distance from the outlet opening; a sensor arrangement, and a beam deflecting device. In order to provide a laser beam machining head which, whilst having fixed and compact external dimensions, enables a simple adaptation of the sensors to the respective machining tasks, the sensor arrangement comprises a sensor module arranged in a side wall of the housing next to the laser beam through passage; and the radiation diverting device directs the radiation, coming from a zone of interaction determined by the working focus, onto sensors of the sensor arrangement so that at least one portion of the radiation can be detected for monitoring the machining of a workpiece.
    • 4. 发明授权
    • Method for minimizing sample damage during the ablation of material using a focused ultrashort pulsed beam
    • 使用聚焦超短脉冲光束在材料消融期间最小化样品损伤的方法
    • US06333485B1
    • 2001-12-25
    • US09210226
    • 1998-12-11
    • Richard Alan HaightPeter P. LongoDaniel Peter MorrisAlfred Wagner
    • Richard Alan HaightPeter P. LongoDaniel Peter MorrisAlfred Wagner
    • B23K2602
    • G03F1/72A61B18/26B23K26/0624B23K26/066B23K26/361B23K26/40B23K2103/30B23K2103/50Y10S438/94
    • In one aspect the invention provides a method for laser induced breakdown of a material with a pulsed laser beam where the material is characterized by a relationship of fluence breakdown threshold (Fth) versus laser beam pulse width (T) that exhibits an abrupt, rapid, and distinct change or at least a clearly detectable and distinct change in slope at a predetermined laser pulse width value. The method comprises generating a beam of laser pulses in which each pulse has a pulse width equal to or less than the predetermined laser pulse width value. The beam is focused above the surface of a material where laser induced breakdown is desired. The region of least confusion (minimum beam waist or average spot size) is above the surface of the material in which laser induced breakdown is desired since the intensity of the beam falls off in the forward direction, preferably the region of the beam at or within the surface is between the region of least confusion and sufficient to remove material and the minimum intensity necessary for laser induced breakdown of the material to be removed, most preferably the region of minimum intensity is disposed at the surface of the material to be removed. The beam may be used in combination with a mask in the beam path. The beam or mask may be moved in the x, y, and Z directions to produce desired features. The technique can produce features smaller than the spot size and Rayleigh range due to enhanced damage threshold accuracy in the short pulse regime.
    • 在一个方面,本发明提供了一种用于脉冲激光束的材料的激光诱导击穿的方法,其中材料的特征在于注射击穿阈值(Fth)与激光束脉冲宽度(T)的关系,其显示突然,快速, 并且在预定的激光脉冲宽度值处具有明显的变化或至少清楚可检测和明显的斜率变化。 该方法包括生成激光脉冲束,其中每个脉冲具有等于或小于预定激光脉冲宽度值的脉冲宽度。 光束聚焦在需要激光诱发击穿的材料的表面之上。 最小混乱(最小光束腰部或平均光点尺寸)的区域高于激光诱发击穿所需的材料的表面,因为光束的强度在向前方向上脱落,优选地在波束的或在其内的区域 表面处于最少混淆的区域之间并且足以去除材料并且要被去除的材料的激光诱发击穿所需的最小强度,最优选地,最小强度的区域设置在要去除的材料的表面上。 光束可以与光束路径中的掩模组合使用。 光束或掩模可以在x,y和z方向上移动以产生期望的特征。 该技术可以产生小于点尺寸和瑞利范围的特征,这是由于在短脉冲状态下增强的损伤阈值精度。
    • 5. 发明授权
    • Method and apparatus for determining focus position of a laser
    • 用于确定激光的焦点位置的方法和装置
    • US06303903B1
    • 2001-10-16
    • US09372121
    • 1999-08-11
    • Xinbing Liu
    • Xinbing Liu
    • B23K2602
    • B23K26/04
    • A method and apparatus for positioning a surface of a workpiece for laser machining. A laser beam is focused to a focal point to form a plasma generating a plasma emission. An imaging system is oriented to receive the plasma emission and generate a plasma image. The imaging system is adjusted to focus the plasma image and is then fixed. The laser is then diverted away from the focal point and an illumination source is activated to illuminate the surface of the workpiece. The imaging system generates an image of the surface of the workpiece. The workpiece is adjusted in position toward the focal point until the image of the surface of the workpiece is in focus.
    • 一种用于定位用于激光加工的工件的表面的方法和装置。 将激光束聚焦到焦点以形成产生等离子体发射的等离子体。 成像系统被定向为接收等离子体发射并产生等离子体图像。 调整成像系统以聚焦等离子体图像,然后固定。 然后将激光器从焦点转移离开,并且激活照明源以照射工件的表面。 成像系统产生工件表面的图像。 工件被调整到朝向焦点的位置,直到工件的表面的图像被聚焦。
    • 6. 发明授权
    • Laser cutting machine with two Y-axis drives
    • 带两个Y轴驱动的激光切割机
    • US06835912B2
    • 2004-12-28
    • US10156886
    • 2002-05-28
    • Peter LeibingerThomas RauserLeonid Zeygerman
    • Peter LeibingerThomas RauserLeonid Zeygerman
    • B23K2602
    • B23K26/0884B23K26/38B23K37/0235B23Q1/012B23Q1/626
    • A tool for machining workpieces by motion of the machining tool relative to the workpiece has a support extending in the X-axis over a work support table and movable in the Y-axis. A machining tool housing is movable on the support in the Y-axis. A portion of the housing containing the machining tool is movable with respect to the mounted portion in the Y-axis within a limited range of motion. A computer control effects operation of drive motors to move the housing along the support and the support along the machining tool table to machine a workpiece supported on said worktable in X and Y axes, and the computer control can also effect operation of another drive motor to rapidly move of the housing portion and machining tool in the Y-axis when the desired length of motion in the Y-axis is within its range of motion.
    • 通过加工工具相对于工件的运动来加工工件的工具具有在工件支撑台上在X轴上延伸并可在Y轴上移动的支撑件。 加工工具壳体可以在Y轴上的支撑件上移动。 容纳加工工具的壳体的一部分可在有限的运动范围内相对于Y轴上的安装部分移动。 计算机控制对驱动电机进行操作,以沿壳体和支撑沿着加工工具台移动壳体,以对在X轴和Y轴上支撑在所述工作台上的工件进行加工,并且计算机控制还可以实现另一个驱动马达的操作 当Y轴的所需运动长度在其运动范围内时,壳体部分和机械加工工具在Y轴上快速移动。
    • 8. 发明授权
    • Laser sintering apparatus
    • 激光烧结设备
    • US06717106B2
    • 2004-04-06
    • US10236930
    • 2002-09-09
    • Kazuhiko NaganoYoji Okazaki
    • Kazuhiko NaganoYoji Okazaki
    • B23K2602
    • B23K26/0665B23K26/0604B23K26/0613B23K26/0643B23K26/0648B29C64/153B33Y30/00H01S3/067H01S3/0941H01S3/109H01S3/1613H01S3/1653H01S5/32341
    • A laser sintering apparatus for realizing high-speed and high-precision forming. When a first position of an exposure unit is decided by an XY-positioning mechanism, a micromirror of a DMD is turned on and off in accordance with image data in a region corresponding to the first position and a laser beam in a predetermined region including ultraviolet is supplied to the DMD and modulated for each pixel in accordance with image data. A laser beam reflected in the direction of a reflection mirror is reflected therefrom in the direction of a surface of a powdered body. A region having a predetermined area on the surface of the powdered body is exposed by the laser beam, and the exposed portion is thereby cured. Similarly, by repeating movement of and exposure with the exposure unit, the entire surface of the powdered body is exposed.
    • 一种用于实现高速高精度成形的激光烧结装置。 当通过XY定位机构确定曝光单元的第一位置时,根据包括紫外线的预定区域中的与第一位置相对应的区域和激光束的图像数据,DMD的微镜被打开和关闭 被提供给DMD并且根据图像数据针对每个像素进行调制。 在反射镜的方向上反射的激光束从粉末体的表面的方向反射。 在该粉体的表面上具有规定面积的区域被激光束曝光,露出部由此固化。 类似地,通过重复曝光单元的移动和曝光,粉末体的整个表面被暴露。