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1. 发明授权

US07197201B2 Optical wiring substrate fabrication process and optical wiring substrate device 有权
标题翻译：光布线基板制造工艺和光布线基板装置
公开(公告)号：US07197201B2
公开(公告)日：2007-03-27
申请号：US10456965
申请日：2003-06-09
申请人： Daisuke Nakaya , Takeshi Fujii , Yoji Okazaki , Kazuhiko Nagano , Hiromi Ishikawa
发明人： Daisuke Nakaya , Takeshi Fujii , Yoji Okazaki , Kazuhiko Nagano , Hiromi Ishikawa
IPC分类号： G02B6/12
CPC分类号： G03F7/7005 , G02B6/136 , G02B6/138 , G02B2006/12104 , G03F7/70291 , G03F7/70391
摘要： An optical wiring substrate fabrication method capable of simple formation, by maskless exposure, of an inclined face shape at an end portion of a core layer structuring an optical waveguide. Using an exposure apparatus, image exposure is carried out with a light beam which is modulated by a spatial modulation element in accordance with image information. A predetermined area of a photosensitive material (a photoresist), which is coated on the core layer which is a material of the optical wiring substrate, is exposed by a light beam (UV) and patterned to form an etching mask. A region corresponding to the inclined face, which is to be formed at the end portion of the core layer, is exposed and patterned by the light beam, exposure amounts of which are controlled in accordance with the inclined form of the inclined face, such that an end portion of the etching mask has an inclined face structure. When the core layer is worked by etching using this etching mask, working of the core layer at the end portion of the core layer progresses in proportion to film thickness of the etching mask, and the inclined face is formed.
摘要翻译：一种光学布线基板的制造方法，其能够通过无掩模地曝光在构成光波导的芯层的端部处形成倾斜的表面形状。使用曝光装置，利用由空间调制元件根据图像信息调制的光束进行图像曝光。通过光束（UV）对作为光布线基板的材料的芯层上涂布的感光材料（光致抗蚀剂）的预定区域进行曝光并图案化以形成蚀刻掩模。对应于要形成在芯层的端部的倾斜面的区域被光束曝光和图案化，其曝光量根据倾斜面的倾斜形式被控制，使得蚀刻掩模的端部具有倾斜面结构。当通过使用该蚀刻掩模的蚀刻加工芯层时，芯层的端部的芯层的加工与蚀刻掩模的膜厚度成比例地进行，并且形成倾斜面。

2. 发明授权

US07095921B2 Laser apparatus, exposure head, exposure apparatus, and optical fiber connection method 有权
公开(公告)号：US07095921B2
公开(公告)日：2006-08-22
申请号：US11195594
申请日：2005-08-03
申请人： Yoji Okazaki , Hiromi Ishikawa , Kazuhiko Nagano , Takeshi Fujii , Hiromitsu Yamakawa
发明人： Yoji Okazaki , Hiromi Ishikawa , Kazuhiko Nagano , Takeshi Fujii , Hiromitsu Yamakawa
IPC分类号： G02B6/26
CPC分类号： G02B6/4249 , G02B6/04 , G02B6/08 , G02B6/2551 , G02B6/4206 , G02B6/425 , H01S3/06708 , H01S3/06745
摘要： An optical fiber of a bundled fiber light source is an optical fiber whose core diameter is uniform but whose emission end cladding diameter is smaller than an incidence end cladding diameter thereof, and a light emission region thereof is made smaller. An angle of luminous flux from this higher luminance bundled fiber light source, which passes through a lens system and is incident on a DMD, is smaller, i.e., an illumination NA is made smaller. Thus, an angle of flux which is incident on a surface that is to be exposed is smaller. That is, a minute image formation beam can be obtained without increasing the image formation NA, focal depth is lengthen.

3. 发明授权

US07015488B2 Exposure head, exposure apparatus, and application thereof 失效
公开(公告)号：US07015488B2
公开(公告)日：2006-03-21
申请号：US11104561
申请日：2005-04-13
申请人： Hiromi Ishikawa , Kazuhiko Nagano , Yoji Okazaki , Takeshi Fujii , Hiromitsu Yamakawa
发明人： Hiromi Ishikawa , Kazuhiko Nagano , Yoji Okazaki , Takeshi Fujii , Hiromitsu Yamakawa
IPC分类号： D06L3/04 , D06L3/12
CPC分类号： B41J2/451 , B23K26/0604 , B23K26/066 , B29C64/135 , B29C64/153 , B33Y30/00 , B41J2/45 , B41J2/465 , B41J2/47 , D06L4/50 , D06M10/005 , G02B26/0841 , G03F7/7005 , G03F7/70291 , H04N1/12 , H04N1/191 , H04N1/1916
摘要： In an exposure apparatus of the invention, for a spatial light modulator, each of a plurality of pixel portions fewer than the total number of the pixel portions is controlled with a control signal generated according to exposure information. Namely, a part of the pixel portions is controlled without controlling a whole of the pixel portions on the substrate. Thus, the number of pixels in the pixel portions is decreased, and transfer time of the control signal becomes short. This enables modulation speed of the laser beam to be increased and the high-speed exposure to be performed. An incorporated laser light source, in which the laser beams are incorporated and struck on the optical fiber, is preferable to the laser device. By adopting the incorporated laser light source, high brightness and high output can be obtained, and it is preferable to the exposure of the spatial light modulator. Since the fiber array is obtained with few optical fibers, it is low cost. Since the number of optical fibers is few, the light-emitting region is further decreased when the optical fibers are arrayed.

4. 发明授权

US06975659B2 Laser diode array, laser device, wave-coupling laser source, and exposure device 失效
标题翻译：激光二极管阵列，激光器件，波耦合激光源和曝光装置
公开(公告)号：US06975659B2
公开(公告)日：2005-12-13
申请号：US10237687
申请日：2002-09-10
申请人： Kazuhiko Nagano , Yoji Okazaki , Teruhiko Kuramachi
发明人： Kazuhiko Nagano , Yoji Okazaki , Teruhiko Kuramachi
IPC分类号： G02B6/42 , G02B27/09 , H01S5/02 , H01S5/022 , H01S5/10 , H01S5/323 , H01S5/40 , H01S3/04 , H01S000/91
CPC分类号： G02B6/4206 , G02B27/09 , H01L2224/48091 , H01S5/02216 , H01S5/02236 , H01S5/0224 , H01S5/02252 , H01S5/02284 , H01S5/02469 , H01S5/32341 , H01S5/4031 , H01S5/4043 , H01L2924/00014
摘要： A plurality of multi-cavity laser diode chips, each having a plurality of light emitting points, are fixed side by side and form a laser diode array.
摘要翻译：多个具有多个发光点的多腔激光二极管芯片并排固定并形成激光二极管阵列。

5. 发明申请

US20050191016A1 Exposure head, exposure apparatus, and application thereof 有权
公开(公告)号：US20050191016A1
公开(公告)日：2005-09-01
申请号：US11116342
申请日：2005-04-28
申请人： Hiromi Ishikawa , Kazuhiko Nagano , Yoji Okazaki , Takeshi Fujii , Hiromitsu Yamakawa
发明人： Hiromi Ishikawa , Kazuhiko Nagano , Yoji Okazaki , Takeshi Fujii , Hiromitsu Yamakawa
IPC分类号： B23K26/06 , B29C67/00 , B41J2/447 , B41J2/465 , B41J2/47 , D06L3/04 , D06M10/00 , G02B26/08 , G03F7/20 , H04N1/12 , H04N1/191 , G02B6/04
CPC分类号： B41J2/451 , B23K26/0604 , B23K26/066 , B29C64/135 , B29C64/153 , B33Y30/00 , B41J2/45 , B41J2/465 , B41J2/47 , D06L4/50 , D06M10/005 , G02B26/0841 , G03F7/7005 , G03F7/70291 , H04N1/12 , H04N1/191 , H04N1/1916
摘要： In an exposure apparatus of the invention, for a spatial light modulator, each of a plurality of pixel portions fewer than the total number of the pixel portions is controlled with a control signal generated according to exposure information. Namely, a part of the pixel portions is controlled without controlling a whole of the pixel portions on the substrate. Thus, the number of pixels in the pixel portions is decreased, and transfer time of the control signal becomes short. This enables modulation speed of the laser beam to be increased and the high-speed exposure to be performed. An incorporated laser light source, in which the laser beams are incorporated and struck on the optical fiber, is preferable to the laser device. By adopting the incorporated laser light source, high brightness and high output can be obtained, and it is preferable to the exposure of the spatial light modulator. Since the fiber array is obtained with few optical fibers, it is low cost. Since the number of optical fibers is few, the light-emitting region is further decreased when the optical fibers are arrayed.

6. 发明申请

US20050180692A1 Exposure head, exposure apparatus, and application thereof 失效
标题翻译：曝光头，曝光装置及其应用
公开(公告)号：US20050180692A1
公开(公告)日：2005-08-18
申请号：US11104561
申请日：2005-04-13
申请人： Hiromi Ishikawa , Kazuhiko Nagano , Yoji Okazaki , Takeshi Fujii , Hiromitsu Yamakawa
发明人： Hiromi Ishikawa , Kazuhiko Nagano , Yoji Okazaki , Takeshi Fujii , Hiromitsu Yamakawa
IPC分类号： B23K26/06 , B29C67/00 , B41J2/447 , B41J2/465 , B41J2/47 , D06L3/04 , D06M10/00 , G02B26/08 , G03F7/20 , H04N1/12 , H04N1/191 , G02B6/34
CPC分类号： B41J2/451 , B23K26/0604 , B23K26/066 , B29C64/135 , B29C64/153 , B33Y30/00 , B41J2/45 , B41J2/465 , B41J2/47 , D06L4/50 , D06M10/005 , G02B26/0841 , G03F7/7005 , G03F7/70291 , H04N1/12 , H04N1/191 , H04N1/1916
摘要： In an exposure apparatus of the invention, for a spatial light modulator, each of a plurality of pixel portions fewer than the total number of the pixel portions is controlled with a control signal generated according to exposure information. Namely, a part of the pixel portions is controlled without controlling a whole of the pixel portions on the substrate. Thus, the number of pixels in the pixel portions is decreased, and transfer time of the control signal becomes short. This enables modulation speed of the laser beam to be increased and the high-speed exposure to be performed. An incorporated laser light source, in which the laser beams are incorporated and struck on the optical fiber, is preferable to the laser device. By adopting the incorporated laser light source, high brightness and high output can be obtained, and it is preferable to the exposure of the spatial light modulator. Since the fiber array is obtained with few optical fibers, it is low cost. Since the number of optical fibers is few, the light-emitting region is further decreased when the optical fibers are arrayed.
摘要翻译：在本发明的曝光装置中，对于空间光调制器，利用根据曝光信息生成的控制信号来控制少于像素部分总数的多个像素部分中的每一个。即，在不控制基板上的整个像素部分的情况下，控制像素部分的一部分。因此，像素部分中的像素数量减少，并且控制信号的传送时间变短。这使得能够增加激光束的调制速度并执行高速曝光。其中激光束并入并撞击在光纤上的并入的激光光源优于激光装置。通过采用所结合的激光光源，可以获得高亮度和高输出，并且优选空间光调制器的曝光。由于光纤阵列获得的光纤很少，所以成本低。由于光纤的数量少，所以在配置光纤时，发光区域进一步降低。

7. 发明授权

US07301975B2 Laser module 有权
标题翻译：激光模块
公开(公告)号：US07301975B2
公开(公告)日：2007-11-27
申请号：US10954244
申请日：2004-10-01
申请人： Teruhiko Kuramachi , Fusao Yamanaka , Kazuhiko Nagano , Yoji Okazaki
发明人： Teruhiko Kuramachi , Fusao Yamanaka , Kazuhiko Nagano , Yoji Okazaki
IPC分类号： H01S3/04
CPC分类号： G02B6/4206 , G02B6/4248
摘要： In a laser module comprising a hermetically sealed container having inside a semiconductor laser device whose emission wavelength is 350˜450 nm, generation of organic volatile gas is suppressed in the container and life of the module is prolonged. In a laser module comprising a hermetically sealed container having inside a semiconductor laser device whose emission wavelength is 350˜450 nm and whose life is 5500 hours or more, optical components whose organic volatile gas generation measured by GC/MS is 10 μg/g or less at 150° C. are positioned in the container. In addition, as an organic adhesive to fix the optical components such as a collimating lens is used an organic adhesive whose organic volatile gas generation measured by GC/MS is 300 μg/g or less at 15° C.
摘要翻译：在包含发光波长为350〜450nm的半导体激光装置的内部的气密密封容器的激光模块中，在容器中抑制有机挥发性气体的产生，延长了模块的使用寿命。在发光波长为350〜450nm，寿命为5500小时以上的半导体激光装置的内部的气密密封容器的激光组件中，通过GC / MS测定的有机挥发性气体产生量为10mug / g，在150℃下较少位于容器中。此外，作为用于固定准直透镜等光学部件的有机粘合剂，使用通过GC / MS测定的有机挥发性气体产生在15℃下为300mug / g以下的有机粘合剂。

8. 发明授权

US07110425B2 Laser module and production process thereof 有权
公开(公告)号：US07110425B2
公开(公告)日：2006-09-19
申请号：US10405931
申请日：2003-04-03
申请人： Fusao Yamanaka , Yoji Okazaki , Kazuhiko Nagano , Teruhiko Kuramachi
发明人： Fusao Yamanaka , Yoji Okazaki , Kazuhiko Nagano , Teruhiko Kuramachi
IPC分类号： H01S3/30 , H01S3/04
CPC分类号： H01S5/4012 , H01L2224/48091 , H01S5/0021 , H01S5/02212 , H01S5/0222 , H01S5/02284 , H01S5/32341 , H01S5/4031 , H01L2924/00014
摘要： In a disclosed laser module, a usage amount of organic adhesive is set to no more than 1.0 g/ml. Thus, an equilibrium density of outgas components from the adhesive after an air removal treatment is less than 1000 ppm. In another laser module, a heat sink at which a semiconductor laser element is adhered on a submount, an electrode terminal wire-connected with the laser element, a photodiode wire-connected with the electrode terminal, and a zeolite adsorbent are fixedly provided on a stem. These are ring-welded in a container in a dry air atmosphere (80% nitrogen, 20% oxygen). In still another laser module, sixteen multiplexed lasers are disposed in a container. The container is connected with an air circulation apparatus, which is provided with a filter for removing contaminants, a rotary pump for circulating inert gas, and a valve for controlling replenishment of the gas.

9. 发明授权

US07061517B2 Exposure head 失效
标题翻译：曝光头
公开(公告)号：US07061517B2
公开(公告)日：2006-06-13
申请号：US11124058
申请日：2005-05-09
申请人： Hiromi Ishikawa , Yoji Okazaki , Kazuhiko Nagano
发明人： Hiromi Ishikawa , Yoji Okazaki , Kazuhiko Nagano
IPC分类号： B41J2/47 , G02F1/295
CPC分类号： G03F7/70291 , G02B26/0841 , G03F7/7005
摘要： In the present invention provides, in order to obtain a desired focal depth t in a range α of an acceptable increased amount of beam diameter, an exposure head is designed so that the ratio D/W of an output beam width D to a beam width W at the position where a DMD is placed satisfies the following relational formula. D W ≤ α × M 2 × t - K × λ a θ In the above formula, parameters are defined as follows. λ: the wavelength of laser light θ: the angle of beam outputted from an illumination light source that is derived by a numerical aperture (NA) of optical fiber according to the following formula θ=sin−1(NA) D: the width of beam outputted from the illumination light source W: the beam width at the position where the DMD is placed (at the irradiated surface) a: the size of one pixel on the DMD K: a coefficient determined by beam characteristics, K=1 M: the magnification of imaging optical system t: required focal depth α: acceptable increased amount of beam diameter
摘要翻译：在本发明中，为了获得可接受的增加光束直径的α的范围内的所需焦点深度t，曝光头被设计成使得输出光束宽度D的比D / W与光束宽度放置DMD的位置的W满足以下关系式。 $DW2-/> > 在上述公式中，参数定义如下。 λ：激光的波长θ：根据以下公式由光纤的数值孔径（NA）导出的照明光源输出的光束的角度<？in-line-formula description =“In-line 公式“end =”lead“？> theta = sin （NA）<？in-line-formula description =”In-line Formulas“end =”tail“？> D：从照明光源W输出的光束：DMD放置位置处的光束宽度（照射面）a：DMD上的一个像素的大小K：由光束特性确定的系数，K = 1M ：成像光学系统的放大倍数t：所需的焦深α：可接受的增加光束直径的数量$

10. 发明授权

US06995912B2 Condensing lens, optically-multiplexed-laser-light source, and exposure system 失效
标题翻译：冷凝透镜，光复用激光光源和曝光系统
公开(公告)号：US06995912B2
公开(公告)日：2006-02-07
申请号：US10444084
申请日：2003-05-23
申请人： Yoji Okazaki , Kazuhiko Nagano , Hiromitsu Yamakawa
发明人： Yoji Okazaki , Kazuhiko Nagano , Hiromitsu Yamakawa
IPC分类号： G02B27/10 , G02B27/30 , H01S3/10
CPC分类号： H01S5/4031 , G02B19/0014 , G02B19/0057 , G02B19/0095 , G02B27/0961 , H01S5/005 , H01S5/02248 , H01S5/02284 , H01S5/4012 , H04N1/06 , H04N1/0678 , H04N1/1911
摘要： A condensing lens is integrally formed with collimator-lens portions which respectively collimate light beams and a condensing lens portion which makes the collimated light beams converge at a common point. In addition, an optically-multiplexed-laser-light source is constituted by semiconductor lasers, a multimode optical fiber, and the above condensing lens, where the collimator-lens portions in the condensing lens are respectively arranged in correspondence with the semiconductor lasers, and the condensing lens portion couples the light beams collimated by the collimator-lens portions, to the multimode optical fiber.
摘要翻译：聚光透镜与准直透镜部分一体地形成，该准直透镜部分分别准直光束，并使聚光透镜部分使准直光束在共同点处会聚。此外，光复用激光光源由半导体激光器，多模光纤和上述聚光透镜构成，其中聚光透镜中的准直透镜部分分别对应于半导体激光器布置，以及聚光透镜部分将由准直透镜部分准直的光束耦合到多模光纤。

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