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    • 7. 发明授权
    • Method for minimizing sample damage during the ablation of material using a focused ultrashort pulsed laser beam
    • 使用聚焦超短脉冲激光束消融材料期间样品损伤最小化的方法
    • US07649153B2
    • 2010-01-19
    • US09933461
    • 2001-08-20
    • Richard Alan HaightPeter P. LongoDaniel Peter MorrisAlfred Wagner
    • Richard Alan HaightPeter P. LongoDaniel Peter MorrisAlfred Wagner
    • B23K26/36B23K26/06
    • A61B18/20A61B18/203A61B18/26A61B2018/00577A61B2018/00625A61F9/00814A61F9/0084A61F2009/00863B23K26/0624B23K26/066B23K26/361B23K26/362B23K26/40B23K26/402B23K2103/30B23K2103/50G03F1/72
    • In one aspect the invention provides a method for laser induced breakdown of a material with a pulsed laser beam where the material is characterized by a relationship of fluence breakdown threshold (Fth) versus laser beam pulse width (T) that exhibits an abrupt, rapid, and distinct change or at least a clearly detectable and distinct change in slope at a predetermined laser pulse width value. The method comprises generating a beam of laser pulses in which each pulse has a pulse width equal to or less than the predetermined laser pulse width value. The beam is focused above the surface of a material where laser induced breakdown is desired. The region of least confusion (minimum beam waist or average spot size) is above the surface of the material in which laser induced breakdown is desired since the intensity of the beam falls off in the forward direction, preferably the region of the beam at or within the surface is between the region of least confusion and sufficient to remove material and the minimum intensity necessary for laser induced breakdown of the material to be removed, most preferably the region of minimum intensity is disposed at the surface of the material to be removed. The beam may be used in combination with a mask in the beam path. The beam or mask may be moved in the x, y, and Z directions to produce desired features. The technique can produce features smaller than the spot size and Rayleigh range due to enhanced damage threshold accuracy in the short pulse regime.
    • 在一个方面,本发明提供了一种用于脉冲激光束的材料的激光诱导击穿的方法,其中材料的特征在于注射击穿阈值(Fth)与激光束脉冲宽度(T)的关系,其显示突然,快速, 并且在预定的激光脉冲宽度值处具有明显的变化或至少清楚可检测和明显的斜率变化。 该方法包括生成激光脉冲束,其中每个脉冲具有等于或小于预定激光脉冲宽度值的脉冲宽度。 光束聚焦在需要激光诱发击穿的材料的表面之上。 最小混乱(最小光束腰部或平均光点尺寸)的区域高于激光诱发击穿所需的材料的表面,因为光束的强度在向前方向上脱落,优选地在波束的或在其内的区域 表面处于最少混淆的区域之间并且足以去除材料并且要被去除的材料的激光诱发击穿所需的最小强度,最优选地,最小强度的区域设置在要去除的材料的表面上。 光束可以与光束路径中的掩模组合使用。 光束或掩模可以在x,y和z方向上移动以产生期望的特征。 该技术可以产生小于点尺寸和瑞利范围的特征,这是由于在短脉冲状态下增强的损伤阈值精度。