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    • 7. 发明授权
    • Crystal grower
    • 水晶花岗岩
    • US3857679A
    • 1974-12-31
    • US32974673
    • 1973-02-05
    • UNIV SOUTHERN CALIFORNIA
    • ALLRED W
    • C30B15/14C30B15/30F16J15/40B01J17/06B01J17/18
    • F16J15/403C30B15/14C30B15/30Y10S117/90Y10T117/1016Y10T117/106Y10T117/1064
    • A crystal grower furnace assembly having a gastight housing, a crystal pulling rod extending into the housing coaxially with the vertical axis of the housing and the heating elements. The housing is divided into a first chamber adapted for growing a crystal by the Czochralski technique, from a melt of the crystalline material, a second chamber above the first chamber having a port for evacuation and admission of gases, and a narrow neck connecting the chambers in coaxial alignment. The rod extends through the neck and is adapted for rotational and vertical movement therein. One heater element, situated near the juncture of the neck portion and the second chamber, is employed to heat boron oxide to a liquid which is used to seal the space between the rod and the inner wall of the neck portion to seal off the first chamber from the second chamber during the crystal growth operation. The second heater is situated near the top of the first chamber and is employed to prevent the condensation of arsenic during crystal growth.
    • 一种具有密封壳体的晶体生长炉组件,与壳体的垂直轴线和加热元件同轴延伸到壳体中的晶体拉杆。 壳体被分为适于通过切克劳斯基技术从晶体材料的熔体生长晶体的第一室,在第一室上方的第二室具有用于抽空和进入气体的端口,以及连接室的窄颈部 同轴对齐。 杆延伸穿过颈部并适于在其中旋转和垂直移动。 使用位于颈部和第二腔的接合部附近的一个加热器元件将氧化硼加热到液体,该液体用于密封杆与颈部内壁之间的空间,以密封第一腔室 在晶体生长操作期间从第二腔室。 第二加热器位于第一室的顶部附近,并且用于防止在晶体生长期间砷的冷凝。