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    • 8. 发明授权
    • Methods for releasably attaching support members to microfeature workpieces and microfeature assemblies formed using such methods
    • 用于将支撑构件可释放地附接到微型工件和使用这种方法形成的微特征组件的方法
    • US07833601B2
    • 2010-11-16
    • US11585485
    • 2006-10-24
    • Kyle K. KirbySteven D. Oliver
    • Kyle K. KirbySteven D. Oliver
    • B32B9/00B32B33/00
    • H01L21/6835H01L21/6836H01L2221/68327H01L2221/6834H01L2924/3025Y10T156/1052Y10T156/108Y10T428/14Y10T428/1414Y10T428/1471
    • Methods for releasably attaching support members to microfeature workpieces and microfeature assemblies formed using such methods are disclosed herein. A method for processing a microfeature workpiece in accordance with one embodiment includes applying adhesive material to a non-active portion on a first side of a workpiece. The workpiece can include a first active portion and a second active portion separated from each other at least in part by the non-active portion. The method continues by adhesively attaching the first side of the workpiece to a first support member, and releasably attaching the second side of the workpiece to a second support member. The method further includes separating the first active portion from the second active portion while the workpiece is attached to the second support member by cutting through the first support member and the non-active portion of the workpiece. The separation process removes at least approximately all the adhesive material from the non-active portion of the workpiece.
    • 本文公开了将支撑构件可释放地附接到微特征工件和使用这种方法形成的微特征组件的方法。 根据一个实施例的用于处理微特征工件的方法包括将粘合剂材料施加到工件的第一侧上的非活动部分。 工件可以包括至少部分地由非活动部分彼此分离的第一有效部分和第二有效部分。 该方法通过将工件的第一侧粘合地附接到第一支撑构件并且将工件的第二侧可释放地附接到第二支撑构件来继续。 该方法还包括通过切割穿过第一支撑构件和工件的非活动部分而将工件附接到第二支撑构件而将第一活动部分与第二活动部分分离。 分离过程至少从工件的非活性部分去除所有的粘合剂材料。