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    • 1. 发明授权
    • Miniature energy transducer for emitting x-ray radiation including schottky cathode
    • 用于发射包括肖特基阴极的X射线辐射的微型能量换能器
    • US06463124B1
    • 2002-10-08
    • US09596530
    • 2000-06-19
    • Effraim WeismanNathan SelaDan HashimshonyUriel HalaveeGuy ShinarGilad Marcus
    • Effraim WeismanNathan SelaDan HashimshonyUriel HalaveeGuy ShinarGilad Marcus
    • H01J3506
    • A61N5/1001A61N5/1002H01J35/065H01J35/32H01J2201/342H01J2235/06H01J2235/164
    • An apparatus provides in-situ radiation treating utilizing a miniature energy transducer to produce x-rays, wherein the energy transducer includes a Schottky cathode tip. More specifically, the energy transducer includes a transducer body, an anode provided at a first end of the transducer body, and a cathode provided at a second end of the transducer body opposite the anode. The energy transducer is coupled to an energy source by a flexible insertion device. The energy source provides electrical and/or light signals to the energy transducer via the flexible insertion device. Light transmitted from the energy source to the energy transducer by the flexible insertion device is focused on a Schottky cathode tip of the cathode by the optical fiber provided in the hollow core of the anode. The application of the light signal to the cathode tip results in heating of the tip and along with the electric field generated by the acceleration voltage it leads to electron Schottky emission and electron acceleration towards the anode. In another preferred embodiment, an electrical current, transmitted from the energy source to the energy transducer by the flexible insertion device, is applied to the Schottky cathode tip of the cathode, causing thermo-emission. The electrons generated due to this process are accelerated towards the anode across a voltage difference between the anode and the cathode.
    • 一种装置利用微型能量换能器提供原位辐射处理以产生X射线,其中能量换能器包括肖特基阴极尖端。 更具体地,能量换能器包括换能器主体,设置在换能器主体的第一端的阳极和设置在换能器本体的与阳极相对的第二端的阴极。 能量传感器通过柔性插入装置耦合到能量源。 能量源通过柔性插入装置向能量换能器提供电和/或光信号。 通过柔性插入装置从能量源传递到能量换能器的光通过设置在阳极中空芯中的光纤聚焦在阴极的肖特基阴极尖端上。 将光信号施加到阴极尖端导致尖端的加热以及由加速电压产生的电场,从而导致电子肖特基发射和朝向阳极的电子加速。 在另一个优选实施例中,通过柔性插入装置从能量源传递到能量换能器的电流被施加到阴极的肖特基阴极尖端,引起热发射。 由于该过程产生的电子在阳极和阴极之间的电压差上被朝向阳极加速。
    • 2. 发明授权
    • X-ray source with improved beam steering
    • 具有改进的光束转向的X射线源
    • US5442678A
    • 1995-08-15
    • US184021
    • 1994-01-21
    • Mark T. DinsmoreDonald O. Smith
    • Mark T. DinsmoreDonald O. Smith
    • A61B19/00A61N5/10H01B11/22H01J35/00H01J35/06H01J35/08H01J35/14H01J35/30H01J35/32H05G1/00H05G1/06H05G1/10H05G1/32H05G1/34
    • A61N5/1001A61B90/11H01J35/065H01J35/08H01J35/30H01J35/32H05G1/06H05G1/10H05G1/32H05G1/34A61B2090/101A61N2005/1005H01J2201/342
    • This invention is directed to an x-ray source comprising a housing, an elongated tubular probe, a target assembly, and a beam steering assembly. The housing encloses an electron beam source, and has elements for generating an electron beam along a beam path. The elongated tubular probe extends along a central axis from the housing about the beam path. The target assembly extends along the central axis and is adapted for coupling to the end of the probe distal form the housing. The target assembly includes a target element positioned along the beam path, wherein the target element is adapted to emit x-rays in a predetermined spectral range in response to incident electrons. The beam steering assembly includes a deflection element, a feedback network, and a deflection controller. The deflection element deflects the beam from a nominal axis to a selected surface region on the target element in response to a deflection control signal. The feedback network includes deflection sensing elements for sensing the deflection of the beam and elements for generating a feedback signal representative thereof. The deflection controller couples to the deflection element and to the feedback network and includes elements for generating a deflection control signal in response to the feedback signal.
    • 本发明涉及一种包括壳体,细长管状探针,目标组件和射束转向组件的X射线源。 壳体包围电子束源,并且具有用于沿着光束路径产生电子束的元件。 细长管状探针沿着中心轴线从壳体围绕光束路径延伸。 目标组件沿着中心轴线延伸并且适于从外壳的远端连接到探头的端部。 目标组件包括沿着光束路径定位的目标元件,其中目标元件适于响应入射电子在预定光谱范围内发射x射线。 光束转向组件包括偏转元件,反馈网络和偏转控制器。 响应于偏转控制信号,偏转元件将光束从标称轴偏转到目标元件上的选定表面区域。 反馈网络包括用于感测波束和元件的偏转的偏转感测元件,用于产生代表其的反馈信号。 偏转控制器耦合到偏转元件和反馈网络,并且包括用于响应于反馈信号产生偏转控制信号的元件。
    • 3. 发明授权
    • X-ray source with shaped radiation pattern
    • 具有形状辐射图的X射线源
    • US5422926A
    • 1995-06-06
    • US184271
    • 1994-01-21
    • Donald O. SmithAlan P. SliskiKenneth J. HarteMark T. Dinsmore
    • Donald O. SmithAlan P. SliskiKenneth J. HarteMark T. Dinsmore
    • A61B19/00A61N5/10H01B11/22H01J35/00H01J35/06H01J35/08H01J35/14H01J35/30H01J35/32H05G1/00H05G1/06H05G1/10H05G1/32H05G1/34
    • A61N5/1001A61B90/11H01J35/065H01J35/08H01J35/30H01J35/32H05G1/06H05G1/10H05G1/32H05G1/34A61B2090/101A61N2005/1005H01J2201/342
    • The present invention is directed to an x-ray source for irradiating a volume in accordance with a predetermined dose distribution. The source comprises a housing, an elongated tubular probe, and a target assembly. The housing encloses an electron beam source and includes elements for generating an electron beam along a beam path. The tubular probe extends along a central axis from the housing about the beam path. The target assembly extends along the central axis and is adapted for coupling to the end of the probe distal from the housing. The target assembly includes a target element, a probe tip assembly, and a variable transmission shield. The target element is positioned in the beam path. The target element is adapted to emit x-rays in response to electrons incident thereon from the beam. The probe tip assembly and associated control electronics include elements for positioning the target element in the beam path, and is substantially x-ray transparent. The variable transmission shield is positioned on an outer surface of the probe tip assembly, and is adapted to control the position of the isodose surfaces of the x-rays emitted from the target and passing through the probe tip assembly.
    • 本发明涉及一种用于根据预定剂量分布照射体积的x射线源。 源包括壳体,细长管状探针和目标组件。 壳体包围电子束源并且包括用于沿着光束路径产生电子束的元件。 管状探针沿着中心轴线从壳体围绕光束路径延伸。 目标组件沿着中心轴线延伸并且适于联接到远离壳体的探针的端部。 目标组件包括目标元件,探针尖端组件和可变透射屏蔽。 目标元件位于光束路径中。 目标元件适于响应于从光束入射到其上的电子而发射X射线。 探针尖端组件和相关联的控制电子器件包括用于将目标元件定位在光束路径中的元件,并且基本上是x射线透明的。 可变透射屏蔽定位在探针头组件的外表面上,并且适于控制从靶发射并穿过探针头组件的X射线的等剂量表面的位置。
    • 5. 发明申请
    • ELECTRON BEAM APPARATUS
    • 电子束设备
    • US20130341527A1
    • 2013-12-26
    • US14003030
    • 2012-03-15
    • Jean Berney
    • Jean Berney
    • G21K5/04
    • G21K5/04H01J37/073H01J2201/342H01J2237/06333H01J2237/065
    • A method suitable for preparing a specimen for inspection, the method comprising the steps of: irradiating a photocathode so that the photocathode emits electrons from a surface of the photocathode, wherein the emitted electrons each follow a trajectory, and the trajectories of the electrons are such that they can be extrapolated to intersect at a region within the photocathode, the region defining a virtual source, and wherein the photocathode comprises a rounded tip which has a radius of curvature; configuring the emitted electrons so that they form an electron beam; focusing the electron beam onto a specimen to form an image of the virtual source on the specimen. There is further provided a corresponding electron beam apparatus.
    • 一种适于制备用于检查的样品的方法,所述方法包括以下步骤:照射光电阴极,使得光电阴极从光电阴极的表面发射电子,其中发射的电子各自遵循轨迹,并且电子的轨迹为 它们可以外推到在光电阴极内的区域相交,所述区域限定虚拟源,并且其中所述光电阴极包括具有曲率半径的圆形尖端; 配置发射的电子,使它们形成电子束; 将电子束聚焦到样本上以形成样本上的虚拟源的图像。 还提供了相应的电子束装置。
    • 9. 发明授权
    • Optically powered charged particle accelerator
    • 光学带电粒子加速器
    • US5049753A
    • 1991-09-17
    • US549885
    • 1990-06-28
    • Larry D. Flesner
    • Larry D. Flesner
    • H01J3/02H01J27/00H01J37/073H01J37/248H02J17/00H05H5/00
    • H02J17/00H01J27/00H01J3/021H01J37/073H01J37/248H05H5/00H01J2201/342
    • A charged particle control apparatus provides very high voltage particle beams. One or more photocell arrays provide bias voltages for beam accelerating stages. The arrays are made from a number of microfabricated photocells connected in series to produce a voltage output that is the sum of the voltages from the individual cells. Arrays of each stage are connected in series to produce a cumulative stage voltage that is applied to an accelerating electrode made part of the stage.These accelerating stages are disposed within a transparent vacuum chamber and are spaced from a charged particle source stage disposed near one end of the chamber. This charged particle source stage includes an emission source such as a photocathode. The photo arrays of the accelerating stages are connected in series to produce a potential that is applied to the particle source stage.Optical power illuminates the stages to generate desired voltage biases to the accelerating electrodes. A light source is used to excite the photocathode when this emission source is used. Electrons from the emission source are accelerated by the accelerating electrodes and are emitted from the chamber which is typically conjoined with other apparatus.By utilizing photocell arrays to generate beam current and accelerating biases, as well as a photocathode for providing a source of electrons, the apparatus of the invention is completely optically isolated thereby requiring no direct electrical connections to the apparatus even though multiple accelerating stages are used to facilitate the achievement of very high voltage particle beams.
    • 带电粒子控制装置提供非常高电压的粒子束。 一个或多个光电池阵列为光束加速阶段提供偏置电压。 阵列由多个串联连接的微细胞光电池制成,以产生电压输出,该电压输出是来自各个单元的电压之和。 每个级的阵列串联连接以产生累加级电压,该电压施加到制成该级的一部分的加速电极。 这些加速阶段设置在透明真空室内并与设置在室的一端附近的带电粒子源级间隔开。 该带电粒子源级包括诸如光电阴极的发射源。 加速级的光阵列被串联连接以产生施加到粒子源级的电位。 光功率照亮阶段以产生对加速电极的期望的电压偏压。 当使用该发射源时,使用光源来激发光电阴极。 来自发射源的电子被加速电极加速并且从通常与其他装置结合的室发射。 通过利用光电池阵列产生射束电流和加速偏置,以及用于提供电子源的光电阴极,本发明的装置是完全光学隔离的,因此即使使用多个加速阶段也不需要与设备的直接电连接 有助于实现非常高电压的粒子束。
    • 10. 发明授权
    • Electron beam apparatus
    • 电子束装置
    • US08895922B2
    • 2014-11-25
    • US14003030
    • 2012-03-15
    • Jean Berney
    • Jean Berney
    • G21K5/04H01J37/073
    • G21K5/04H01J37/073H01J2201/342H01J2237/06333H01J2237/065
    • A method suitable for preparing a specimen for inspection, the method comprising the steps of: irradiating a photocathode so that the photocathode emits electrons from a surface of the photocathode, wherein the emitted electrons each follow a trajectory, and the trajectories of the electrons are such that they can be extrapolated to intersect at a region within the photocathode, the region defining a virtual source, and wherein the photocathode comprises a rounded tip which has a radius of curvature; configuring the emitted electrons so that they form an electron beam; focusing the electron beam onto a specimen to form an image of the virtual source on the specimen. There is further provided a corresponding electron beam apparatus.
    • 一种适于制备用于检查的样品的方法,所述方法包括以下步骤:照射光电阴极,使得光电阴极从光电阴极的表面发射电子,其中发射的电子各自遵循轨迹,并且电子的轨迹为 它们可以外推到在光电阴极内的区域相交,所述区域限定虚拟源,并且其中所述光电阴极包括具有曲率半径的圆形尖端; 配置发射的电子,使它们形成电子束; 将电子束聚焦到样本上以形成样本上的虚拟源的图像。 还提供了相应的电子束装置。