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    • 1. 发明申请
    • HDD PATTERN APPARATUS USING LASER, E-BEAM, OR FOCUSED ION BEAM
    • 使用激光,电子束或聚焦离子束的硬盘图案设备
    • US20100258758A1
    • 2010-10-14
    • US12759587
    • 2010-04-13
    • Majeed A. FoadStephen Moffatt
    • Majeed A. FoadStephen Moffatt
    • G03F7/20G03B27/42H01F1/00
    • G03B27/42G11B5/8404H01F10/187H01F41/34
    • A method and apparatus for manufacturing magnetic storage media is provided. A structural substrate is coated with a magnetically active material, and a magnetic pattern is formed in the magnetically active material by treating portions of the material with energy from a laser, e-beam, or focused ion beam. The beam may be divided into a packet of beamlets by passing the beam through a divider, which may be a diffraction grating for laser energy, a thin film single crystal for electrons, or a perforated plate for ions, or the beam may be generated by an array of emitters. The beamlets are then focused to a desired dimension and distribution by optics or electric fields. The resulting beam packet may be shaped further by passing through an aperture of any desired shape. The resulting beam may be applied sequentially to exposure zones to treat an entire substrate or plurality of substrates.
    • 提供了一种用于制造磁存储介质的方法和装置。 用磁性活性材料涂覆结构基材,通过用激光,电子束或聚焦离子束的能量处理材料的部分,在磁性活性材料中形成磁性图案。 通过将光束通过分隔器(可以是用于激光能量的衍射光栅),用于电子的薄膜单晶或用于离子的多孔板,可以将光束分成束分束,或者可以通过 一组发射器。 然后通过光学或电场将子束聚焦到期望的尺寸和分布。 所得到的束束可以进一步通过穿过任何所需形状的孔。 所得到的光束可以顺序施加到曝光区域以处理整个基板或多个基板。
    • 6. 发明授权
    • HDD pattern apparatus using laser, E-beam, or focused ion beam
    • 使用激光,电子束或聚焦离子束的HDD图案设备
    • US08431911B2
    • 2013-04-30
    • US12759587
    • 2010-04-13
    • Majeed A. FoadStephen Moffatt
    • Majeed A. FoadStephen Moffatt
    • A61B6/00G01N21/64G11B5/02G11B21/02G11B11/00G03G13/00G03G19/00
    • G03B27/42G11B5/8404H01F10/187H01F41/34
    • A method and apparatus for manufacturing magnetic storage media is provided. A structural substrate is coated with a magnetically active material, and a magnetic pattern is formed in the magnetically active material by treating portions of the material with energy from a laser, e-beam, or focused ion beam. The beam may be divided into a packet of beamlets by passing the beam through a divider, which may be a diffraction grating for laser energy, a thin film single crystal for electrons, or a perforated plate for ions, or the beam may be generated by an array of emitters. The beamlets are then focused to a desired dimension and distribution by optics or electric fields. The resulting beam packet may be shaped further by passing through an aperture of any desired shape. The resulting beam may be applied sequentially to exposure zones to treat an entire substrate or plurality of substrates.
    • 提供了一种用于制造磁存储介质的方法和装置。 用磁性活性材料涂覆结构基材,通过用激光,电子束或聚焦离子束的能量处理材料的部分,在磁性活性材料中形成磁性图案。 通过将光束通过分隔器(可以是用于激光能量的衍射光栅),用于电子的薄膜单晶或用于离子的多孔板,光束可以被分成小束束,或者可以通过 一组发射器。 然后通过光学或电场将子束聚焦到期望的尺寸和分布。 所得到的束束可以进一步通过穿过任何所需形状的孔。 所得到的光束可以顺序施加到曝光区域以处理整个基板或多个基板。