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    • 8. 发明授权
    • Production controlling method
    • 生产控制方法
    • US06819975B2
    • 2004-11-16
    • US10166689
    • 2002-06-12
    • Shinji Watanabe
    • Shinji Watanabe
    • G06F700
    • G05B19/41865G05B2219/32127G05B2219/36371G05B2219/45031H01L21/67294Y02P90/14Y02P90/18Y02P90/20
    • Data on manufacturing processes in a semiconductor manufacturing apparatus mainly containing bar code data are input to a portable input unit in step S1. A main bar code label can be affixed to an extremely short bar-code-labeled component such as a reticle having only a very narrow bar-code to-be-labeled region, which enables data input by bar codes. The portable input unit is placed in a terminal in step S2, so that data input to the portable input unit are transferred to a production line terminal. The production line terminal performs a compiling process (production controlling process) in step S3 based on input data obtained from the portable input unit and master data obtained from a server. Consequently obtained are a production control system and a production controlling method capable of performing production control with high accuracy in which errors created by operators in data input are minimized.
    • 主要包含条形码数据的半导体制造装置中的制造过程的数据在步骤S1中被输入到便携式输入单元。 可以将主要的条形码标签附加到非常短的条形码标签组件,例如仅具有非常窄的条形码待标记区域的掩模版,其使得能够通过条形码输入数据。 便携式输入单元在步骤S2中被放置在终端中,从而将输入到便携式输入单元的数据传送到生产线终端。 生产线终端基于从便携式输入单元获得的输入数据和从服务器获得的主数据,在步骤S3中执行编译处理(生产控制处理)。 所得到的是一种生产控制系统和生产控制方法,其能够以最小化数据输入中由操作者产生的误差的高精度执行生产控制。