专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20080147228A1 Automated dynamic recipe generation and selection for semiconductor manufacturing 审中-公开
标题翻译：半导体制造的自动动态配方生成和选择
公开(公告)号：US20080147228A1
公开(公告)日：2008-06-19
申请号：US11642577
申请日：2006-12-19
申请人： Joel S. Fenner , Brian S. Kinnear , Steven L. Carson , Vincent A. Pagano
发明人： Joel S. Fenner , Brian S. Kinnear , Steven L. Carson , Vincent A. Pagano
IPC分类号： G06F17/00
CPC分类号： G05B19/41835 , G05B2219/32097 , G05B2219/32127 , G05B2219/45031 , Y02P90/12 , Y02P90/20
摘要： In one embodiment, an apparatus and method for automated dynamic recipe generation and selection for semiconductor manufacturing are disclosed. In one embodiment, the method comprises: receiving a lot at a tool of a semiconductor manufacturing system; making, by a host controller for the tool, a lookup recipe call to an automated dynamic recipe generation and selection (ADRS) system; running, by the ADRS system, logic scripts to create a unique recipe instruction set for the particular tool and lot, the logic scripts to utilize at least one of results from past runs associated with the tool, historical statistical process control (SPC) system analysis results, and a context of the lookup recipe call in order to create the unique recipe instruction set; and returning the unique recipe instruction set to the host controller to be run by the tool on the lot.
摘要翻译：在一个实施例中，公开了用于半导体制造的自动动态配方生成和选择的装置和方法。在一个实施例中，该方法包括：在半导体制造系统的工具处接收批次; 通过该工具的主机控制器对自动动态配方生成和选择（ADRS）系统进行查找配方调用; 通过ADRS系统运行逻辑脚本，为特定的工具和批次创建独特的配方指令集，逻辑脚本利用与工具相关的过去运行的结果中的至少一个，历史统计过程控制（SPC）系统分析结果和查找配方调用的上下文，以便创建唯一的配方指令集; 并将唯一的配方指令集返回到主机控制器以由批次上的工具运行。

2. 发明授权

US06772612B2 Door-in-door front opening unified pod 失效
标题翻译：门内前开口统一吊舱
公开(公告)号：US06772612B2
公开(公告)日：2004-08-10
申请号：US10060864
申请日：2002-01-29
申请人： Steven L. Carson
发明人： Steven L. Carson
IPC分类号： B65D5514
CPC分类号： H01L21/67373 , E05C9/043 , E05C9/047 , E05C19/14 , H01L21/67386 , Y10T70/5031 , Y10T70/5115 , Y10T70/554
摘要： An apparatus for holding a substrate includes a shelf capable of holding the substrate; a body which encloses the shelf, the body having an open side; and an outer door frame pivotally coupled to the body and defining an opening. The apparatus also includes an inner door which fits into the opening. The body's open side is substantially covered by the inner door and by the outer door frame when the inner door and outer door frame are in closed positions. The apparatus can include a double hinge for pivotally coupling the outer door frame to the body. It can also include a bolt that is movably attached to the inner door, so that the inner door has a locked position in which the bolt extends into the frame and an unlocked position in which the bolt retracts from the frame.
摘要翻译：用于保持基板的装置包括能够保持基板的搁板; 封闭搁架的主体，主体具有开口侧; 以及外门框架，其枢转地联接到主体并且限定开口。该装置还包括装配到开口中的内门。当内门和外门框处于关闭位置时，车身的敞开侧基本上由内门和外门框架覆盖。该装置可以包括用于将外门框架可枢转地联接到主体的双铰链。它还可以包括可移动地附接到内门的螺栓，使得内门具有锁定位置，在该位置中螺栓延伸到框架中，并且锁定位置中螺栓从框架缩回。

3. 发明申请

US20090082893A1 METHOD FOR CONSISTENT UPDATES TO AUTOMATED PROCESS CONTROL (APC) MODELS WITH PARTITIONING ALONG MULTIPLE COMPONENTS 失效
标题翻译：自动化过程控制（APC）模型的一致性更新方法与多个组件分开
公开(公告)号：US20090082893A1
公开(公告)日：2009-03-26
申请号：US11860515
申请日：2007-09-24
申请人： Nital S. Patel , Steven L. Carson
发明人： Nital S. Patel , Steven L. Carson
IPC分类号： G06F19/00
CPC分类号： G05B17/02
摘要： Methods for consistent updates to APC models with partitioning along multiple components are generally described. In one example, a method includes acquiring measurement data from one or more semiconductor wafers of a processed first lot, the data having a plurality of contexts, applying a model having parameters with partitioning along the contexts to the measurement data; and applying a constraint on a subset of the model parameters such that the subset remains centered around zero to provide consistent updates for automated process control of lots processed after the first lot.
摘要翻译：一般来说，对沿着多个组件分区的APC模型进行一致更新的方法。在一个示例中，一种方法包括从经处理的第一批次的一个或多个半导体晶片获取测量数据，该数据具有多个上下文，将具有沿上下文划分的参数的模型应用于测量数据; 以及对所述模型参数的子集应用约束，使得所述子集保持以零为中心，以为在第一批之后处理的批次的自动化过程控制提供一致的更新。

4. 发明授权

US07761179B2 Method for consistent updates to automated process control (APC) models with partitioning along multiple components 失效
标题翻译：自动化过程控制（APC）模型的一致更新方法，具有沿多个组件分区的方法
公开(公告)号：US07761179B2
公开(公告)日：2010-07-20
申请号：US11860515
申请日：2007-09-24
申请人： Nital S. Patel , Steven L. Carson
发明人： Nital S. Patel , Steven L. Carson
IPC分类号： G06F19/00
CPC分类号： G05B17/02
摘要： Methods for consistent updates to APC models with partitioning along multiple components are generally described. In one example, a method includes acquiring measurement data from one or more semiconductor wafers of a processed first lot, the data having a plurality of contexts, applying a model having parameters with partitioning along the contexts to the measurement data; and applying a constraint on a subset of the model parameters such that the subset remains centered around zero to provide consistent updates for automated process control of lots processed after the first lot.
摘要翻译：一般来说，对沿着多个组件分区的APC模型进行一致更新的方法。在一个示例中，一种方法包括从经处理的第一批次的一个或多个半导体晶片获取测量数据，该数据具有多个上下文，将具有沿上下文划分的参数的模型应用于测量数据; 以及对所述模型参数的子集应用约束，使得所述子集保持以零为中心，以为在第一批之后处理的批次的自动化过程控制提供一致的更新。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式