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1. 发明授权

US08983631B2 Arrangement for identifying uncontrolled events at the process module level and methods thereof 有权
标题翻译：用于在过程模块级别识别不受控制的事件的安排及其方法
公开(公告)号：US08983631B2
公开(公告)日：2015-03-17
申请号：US12555674
申请日：2009-09-08
申请人： Chung Ho Huang , Vijayakumar C. Venugopal , Connie Lam , Dragan Podlesnik
发明人： Chung Ho Huang , Vijayakumar C. Venugopal , Connie Lam , Dragan Podlesnik
IPC分类号： G05B11/01 , G06F19/00 , G06F9/50 , G05B19/418 , G06F11/20
CPC分类号： G06F9/5027 , G05B19/4184 , G05B2219/31202 , G05B2219/31293 , G05B2219/31318 , G05B2219/31481 , G05B2219/32209 , G05B2219/45031 , G06F11/2035 , G06F11/2043 , Y02P90/14 , Y02P90/18
摘要： A process-level troubleshooting architecture (PLTA) configured to facilitate substrate processing in a plasma processing system is provided. The architecture includes a process module controller. The architecture also includes a plurality of sensors, wherein each sensor of the plurality of sensors communicates with the process module controller to collect sensed data about one or more process parameters. The architecture further includes a process-module-level analysis server, wherein the process-module-level analysis server communicates directly with the plurality of sensors and the process module controller. The process-module-level analysis server is configured for receiving data, wherein the data include at least one of the sensed data from the plurality of sensors and process module and chamber data from the process module controller. The process-module-level analysis server is also configured for analyzing the data and sending interdiction data directly to the process module controller when a problem is identified during the substrate processing.
摘要翻译：提供了一种配置为促进等离子体处理系统中的基板处理的过程级故障排除架构（PLTA）。该架构包括一个进程模块控制器。该架构还包括多个传感器，其中多个传感器中的每个传感器与过程模块控制器通信以收集关于一个或多个过程参数的感测数据。该体系结构还包括一个过程模块级分析服务器，其中过程模块级分析服务器与多个传感器和过程模块控制器直接通信。过程模块级分析服务器被配置为用于接收数据，其中数据包括来自多个传感器的感测数据中的至少一个以及来自处理模块控制器的处理模块和室数据。过程模块级分析服务器还被配置为当在衬底处理期间识别出问题时，分析数据并将拦截数据直接发送到过程模块控制器。

2. 发明申请

US20100332012A1 ARRANGEMENT FOR IDENTIFYING UNCONTROLLED EVENTS AT THE PROCESS MODULE LEVEL AND METHODS THEREOF 有权
标题翻译：在过程模块级别识别非受控事件的安排及其方法
公开(公告)号：US20100332012A1
公开(公告)日：2010-12-30
申请号：US12555674
申请日：2009-09-08
申请人： Chung-Ho Huang , Vijayakumar C. Venugopal , Connie Lam , Dragan Podlesnik
发明人： Chung-Ho Huang , Vijayakumar C. Venugopal , Connie Lam , Dragan Podlesnik
IPC分类号： G05B9/02 , G06F9/50 , G06F11/20
CPC分类号： G06F9/5027 , G05B19/4184 , G05B2219/31202 , G05B2219/31293 , G05B2219/31318 , G05B2219/31481 , G05B2219/32209 , G05B2219/45031 , G06F11/2035 , G06F11/2043 , Y02P90/14 , Y02P90/18
摘要： A process-level troubleshooting architecture (PLTA) configured to facilitate substrate processing in a plasma processing system is provided. The architecture includes a process module controller. The architecture also includes a plurality of sensors, wherein each sensor of the plurality of sensors communicates with the process module controller to collect sensed data about one or more process parameters. The architecture further includes a process-module-level analysis server, wherein the process-module-level analysis server communicates directly with the plurality of sensors and the process module controller. The process-module-level analysis server is configured for receiving data, wherein the data include at least one of the sensed data from the plurality of sensors and process module and chamber data from the process module controller. The process-module-level analysis server is also configured for analyzing the data and sending interdiction data directly to the process module controller when a problem is identified during the substrate processing.
摘要翻译：提供了一种配置为促进等离子体处理系统中的基板处理的过程级故障排除架构（PLTA）。该架构包括一个进程模块控制器。该架构还包括多个传感器，其中多个传感器中的每个传感器与过程模块控制器通信以收集关于一个或多个过程参数的感测数据。该体系结构还包括一个过程模块级分析服务器，其中过程模块级分析服务器与多个传感器和过程模块控制器直接通信。过程模块级分析服务器被配置为用于接收数据，其中数据包括来自多个传感器的感测数据中的至少一个以及来自处理模块控制器的处理模块和室数据。过程模块级分析服务器还被配置为当在衬底处理期间识别出问题时，分析数据并将拦截数据直接发送到过程模块控制器。

3. 发明申请

US20160189687A1 METHOD AND SYSTEM FOR THE SAFE VISUALIZATION OF SAFETY-RELEVANT INFORMATION 审中-公开
标题翻译：安全可视化安全相关信息的方法和系统
公开(公告)号：US20160189687A1
公开(公告)日：2016-06-30
申请号：US14982877
申请日：2015-12-29
申请人： Matthias Auchmann
发明人： Matthias Auchmann
IPC分类号： G09G5/377 , G06T1/60 , G09G5/36
CPC分类号： G09G5/377 , G05B23/0272 , G05B2219/14097 , G05B2219/31481 , G06F11/0763 , G06F11/0796 , G06F11/162 , G06T1/60 , G09G3/20 , G09G2340/12 , G09G2380/12
摘要： A method for the safe visualization of a safety-relevant information includes the steps of: for all possible states of at least one variable input parameter, decomposing a safe visualization of the at least one variable input parameter into its safe base elements (31); for each of the decomposed safe base elements, enumerating and storing a set of all possible states of safe base element visualization (32); and for each of the decomposed safe base elements, transmitting the set of all possible states of safe base element visualization to a target system that provides safe visualization at runtime (33).
摘要翻译：一种用于安全可视化安全相关信息的方法包括以下步骤：对于至少一个可变输入参数的所有可能状态，将至少一个可变输入参数的安全可视化分解成其安全基本元件（31）; 对于每个分解的安全基元件，枚举并存储一组安全的基本元素可视化的所有可能状态（32）; 并且对于每个分解的安全基元，将安全基元可视化的所有可能状态的集合传送到在运行时提供安全可视化的目标系统（33）。

4. 发明授权

US08200356B2 Semiconductor manufacturing apparatus data acquisition apparatus and semiconductor manufacturing system 失效
标题翻译：半导体制造装置数据采集装置及半导体制造系统
公开(公告)号：US08200356B2
公开(公告)日：2012-06-12
申请号：US12100184
申请日：2008-04-09
申请人： Yuichi Oya
发明人： Yuichi Oya
IPC分类号： G06F19/00
CPC分类号： H04L41/00 , G05B19/4184 , G05B19/41855 , G05B2219/31481 , Y02P90/14 , Y02P90/185
摘要： A semiconductor manufacturing apparatus data acquisition apparatus is provided. The apparatus has a production management system interface unit which may communicate with the production management system, an apparatus interface unit which communicates with the semiconductor manufacturing apparatus, and a production management system substitution unit which may communicate with the semiconductor manufacturing apparatus via the apparatus interface unit. When the production management system can communicate with the production management system interface unit, the production management system and the semiconductor manufacturing apparatus communicate with each other via the production management system interface unit and the apparatus interface unit to receive process data output from the semiconductor manufacturing apparatus. When the production management system cannot communicate with the production management system interface unit, the production management system substitution unit and the semiconductor manufacturing apparatus communicate with each other via the apparatus interface unit to receive process data output from the semiconductor manufacturing apparatus.
摘要翻译：提供一种半导体制造装置数据采集装置。该装置具有可以与生产管理系统通信的生产管理系统接口单元，与半导体制造装置通信的装置接口单元，以及可以经由装置接口单元与半导体制造装置通信的生产管理系统替代单元。当生产管理系统能够与生产管理系统接口单元通信时，生产管理系统和半导体制造装置经由生产管理系统接口单元和设备接口单元相互通信，以接收从半导体制造装置输出的处理数据。当生产管理系统不能与生产管理系统接口单元通信时，生产管理系统替代单元和半导体制造设备经由设备接口单元相互通信，以接收从半导体制造设备输出的处理数据。

5. 发明申请

US20170277166A1 METHOD AND SYSTEM TO INCREASE OPERATOR AWARENESS 审中-公开
公开(公告)号：US20170277166A1
公开(公告)日：2017-09-28
申请号：US15079387
申请日：2016-03-24
申请人： Andrei Popa-Simil , Victor Popa-Simil
发明人： Andrei Popa-Simil , Victor Popa-Simil
IPC分类号： G05B19/4069 , G05B19/4063
CPC分类号： G05B19/4184 , G05B2219/31455 , G05B2219/31481 , G05B2219/32014
摘要： A method and system to increase operator awareness for process control application providing operators team real time information on controlled process and equipment immersing them into augmented and virtual reality, provided by a computing system which collects and integrates data from process and equipment, leaving equipment, controls, and procedure unmodified. The method is creating an augmented and virtual reality for the operating crew, giving them real time supplementary information based on two types of simulation, one using models and one using process data and learning procedures, together with rich equipment data, equipment locator, enhanced communication and enhanced data acquisition from supplementary sources as surface and airborne robotic and operator headset additional equipment meant to monitor operator bio-parameters and operator's surrounding environment in order to assure that control is sound and sober, and operators are safe and secure all time providing an optimum high efficiency operation of the controlled process.

6. 发明申请

US20080256226A1 SEMICONDUCTOR MANUFACTURING APPARATUS DATA ACQUISITION APPARATUS AND SEMICONDUCTOR MANUFACTURING SYSTEM 失效
标题翻译：半导体制造设备数据采集设备和半导体制造系统
公开(公告)号：US20080256226A1
公开(公告)日：2008-10-16
申请号：US12100184
申请日：2008-04-09
申请人： Yuichi OYA
发明人： Yuichi OYA
IPC分类号： G06F15/173
CPC分类号： H04L41/00 , G05B19/4184 , G05B19/41855 , G05B2219/31481 , Y02P90/14 , Y02P90/185
摘要： According to the present invention, there is proved a semiconductor manufacturing apparatus data acquisition apparatus, having: a production management system interface unit which may communicate with the production management system; an apparatus interface unit which communicates with the semiconductor manufacturing apparatus; and a production management system substitution unit which may communicate with the semiconductor manufacturing apparatus via the apparatus interface unit, wherein when the production management system can communicate with the production management system interface unit, the production management system and the semiconductor manufacturing apparatus communicate with each other via the production management system interface unit and the apparatus interface unit to receive process data output from the semiconductor manufacturing apparatus, and when the production management system cannot communicate with the production management system interface unit, the production management system substitution unit and the semiconductor manufacturing apparatus communicate with each other via the apparatus interface unit to receive the process data output from the semiconductor manufacturing apparatus.
摘要翻译：根据本发明，证明了一种半导体制造装置数据采集装置，具有：可与生产管理系统通信的生产管理系统接口单元; 与半导体制造装置连通的装置接口单元; 以及可以经由装置接口单元与半导体制造装置通信的生产管理系统取代部，其中，当生产管理系统能够与生产管理系统接口单元通信时，生产管理系统和半导体制造装置相互通信通过生产管理系统接口单元和装置接口单元接收从半导体制造装置输出的处理数据，并且当生产管理系统不能与生产管理系统接口单元通信时，生产管理系统替代单元和半导体制造装置经由设备接口单元彼此通信以接收从半导体制造设备输出的处理数据。

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