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1. 发明授权

US08200356B2 Semiconductor manufacturing apparatus data acquisition apparatus and semiconductor manufacturing system 失效
标题翻译：半导体制造装置数据采集装置及半导体制造系统
公开(公告)号：US08200356B2
公开(公告)日：2012-06-12
申请号：US12100184
申请日：2008-04-09
申请人： Yuichi Oya
发明人： Yuichi Oya
IPC分类号： G06F19/00
CPC分类号： H04L41/00 , G05B19/4184 , G05B19/41855 , G05B2219/31481 , Y02P90/14 , Y02P90/185
摘要： A semiconductor manufacturing apparatus data acquisition apparatus is provided. The apparatus has a production management system interface unit which may communicate with the production management system, an apparatus interface unit which communicates with the semiconductor manufacturing apparatus, and a production management system substitution unit which may communicate with the semiconductor manufacturing apparatus via the apparatus interface unit. When the production management system can communicate with the production management system interface unit, the production management system and the semiconductor manufacturing apparatus communicate with each other via the production management system interface unit and the apparatus interface unit to receive process data output from the semiconductor manufacturing apparatus. When the production management system cannot communicate with the production management system interface unit, the production management system substitution unit and the semiconductor manufacturing apparatus communicate with each other via the apparatus interface unit to receive process data output from the semiconductor manufacturing apparatus.
摘要翻译：提供一种半导体制造装置数据采集装置。该装置具有可以与生产管理系统通信的生产管理系统接口单元，与半导体制造装置通信的装置接口单元，以及可以经由装置接口单元与半导体制造装置通信的生产管理系统替代单元。当生产管理系统能够与生产管理系统接口单元通信时，生产管理系统和半导体制造装置经由生产管理系统接口单元和设备接口单元相互通信，以接收从半导体制造装置输出的处理数据。当生产管理系统不能与生产管理系统接口单元通信时，生产管理系统替代单元和半导体制造设备经由设备接口单元相互通信，以接收从半导体制造设备输出的处理数据。

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