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1. 发明申请

US20170083011A1 SYSTEM AND METHOD FOR IDENTIFYING MANUFACTURED PARTS 审中-公开
公开(公告)号：US20170083011A1
公开(公告)日：2017-03-23
申请号：US14859896
申请日：2015-09-21
申请人： Raytheon Company
发明人： David Hughes
IPC分类号： G05B19/418
CPC分类号： G05B19/41875 , G05B2219/31477 , G05B2219/32368 , Y02P90/14 , Y02P90/22 , Y02P90/26
摘要： A system and method can identify manufactured parts. A user can select a particular manufactured part, which can be out-of-specification. The system can retrieve test data for the selected part and for other manufactured parts. The system can normalize the retrieved test data against historical means and historical standard deviations to form normalized test data. The system can correlate the normalized test data for the selected part against normalized test data for each of the other manufactured parts to form correlation values. The system can display the correlation values with identifiers corresponding to the manufactured parts. Each correlation value can represent a degree of similarity between the selected part and a respective manufactured part. The manufactured parts with the highest correlation values can have the same failure mechanism as the selected part, which can help diagnose why the selected part can be out-of-specification.

2. 发明申请

US20150347371A1 USER INTERFACES FOR DISPLAYING RELATIONSHIPS BETWEEN CELLS IN A GRID 审中-公开
标题翻译：用于显示网格中的细胞之间的关系的用户界面
公开(公告)号：US20150347371A1
公开(公告)日：2015-12-03
申请号：US14692394
申请日：2015-04-21
申请人： SURFWAX, INC.
发明人： Thomas D. Holt
IPC分类号： G06F17/24 , G06F3/0484
CPC分类号： G06F17/246 , G05B2219/31477 , G06F3/0484 , G06F3/04842 , G06F16/288 , G06F17/2235 , G06F17/241 , G06F17/245 , G06Q10/067 , G16H10/60 , G16H15/00
摘要： User interfaces for displaying visual representations of relationships between cells in a grid. In one example embodiment, a user interface includes a grid including rows and columns, a viewport that displays only a portion of the grid, and a plurality of cells each having a specific position in one of the rows and one of the columns of the grid. A first one of the cells is related to a second one of the cells that is positioned in a different one of the rows and a different one of the columns of the grid from the first cell such that the first cell and the second cell are not capable of being displayed in the viewport at the same time. The viewport is configured to display, upon selection of the first cell displayed in the viewport, a completely visible visual representation in the viewport of the relationship between the first cell and the second cell.
摘要翻译：用于显示网格中单元格之间关系的视觉表示的用户界面。在一个示例实施例中，用户界面包括包括行和列的网格，仅显示网格的一部分的视口，以及多个单元格，每个单元格具有网格中的一列和一列中的特定位置。小区中的第一个与位于不同行中的第二个单元相关联，并且与第一个单元位于网格的不同列之间，使得第一单元和第二单元不是能够同时在视口中显示。视口配置为在选择视口中显示的第一单元格时，在第一单元和第二单元之间的关系的视口中显示完全可见的视觉表示。

3. 发明授权

US07640126B2 Combine-information processing apparatus, method for processing combine-information, program, and recording medium 有权
标题翻译：组合信息处理装置，处理组合信息，程序和记录介质的方法
公开(公告)号：US07640126B2
公开(公告)日：2009-12-29
申请号：US12108153
申请日：2008-04-23
申请人： Toru Fujii
发明人： Toru Fujii
IPC分类号： G06F19/00
CPC分类号： G05B23/024 , G05B2219/31477 , G05B2219/32221 , Y02P90/14 , Y02P90/22
摘要： An inspectional equation storage unit 103 for storing an inspectional equation calculating one or more principal component scores, the inspectional equation being obtained by performing a principal component analysis on measured data on a plurality of measuring objects in terms of two or more correlated measurement items, and the measuring objects being processed by the manufacturing apparatus whose adjustable conditions are changed while the manufacturing apparatus is in a normal state; an inspected measured-data acceptance unit 104 for accepting inspected measured data on the measuring objects processed by the manufacturing apparatus in terms of the measurement items corresponding to each term contained in the inspectional equation; a principal-component-score calculation unit 105 for calculating principal component scores using the inspected measured data with the inspectional equation; an inspecting unit 106 for inspecting the manufacturing apparatus using the calculated principal component scores; and an output unit 107 for outputting the inspecting results.
摘要翻译：检验方程式存储单元103，用于存储计算一个或多个主成分分数的检验方程，所述检验方程通过对两个或更多个相关测量项目的多个测量对象上的测量数据执行主成分分析而获得，以及在制造装置处于正常状态时，由可调整条件改变的制造装置处理的测量对象; 检查测量数据接收单元104，用于根据与检查方程中包含的每个项相对应的测量项接受由制造设备处理的测量对象上的检查测量数据; 主成分分数计算单元105，用于使用检查方程用检验的测量数据计算主成分分数; 检查单元106，用于使用所计算的主成分分数来检查制造装置; 以及用于输出检查结果的输出单元107。

4. 发明授权

US07831330B2 Process control system, process control method, and method of manufacturing electronic apparatus 有权
标题翻译：过程控制系统，过程控制方法和制造电子设备的方法
公开(公告)号：US07831330B2
公开(公告)日：2010-11-09
申请号：US12458421
申请日：2009-07-10
申请人： Junji Sugamoto , Yukihiro Ushiku , Kazutaka Akiyama , Shoichi Harakawa
发明人： Junji Sugamoto , Yukihiro Ushiku , Kazutaka Akiyama , Shoichi Harakawa
IPC分类号： G06F19/00
CPC分类号： G05B19/41875 , G05B2219/31477 , G05B2219/32057 , G05B2219/32097 , G05B2219/45031 , Y02P90/12 , Y02P90/20 , Y02P90/22
摘要： A process control system includes a client computer which prepares a correlation between a reference monitored value of apparatus information and a feature quantity, a manufacturing execution system which prepares a processing recipe describing, as a first setting value in an actual manufacturing process, a value of the control parameter, an apparatus information collection section which collects an objective monitored value of the apparatus information in operation of the actual manufacturing process with the first setting value, a feature quantity calculation section which calculates a value of a feature quantity corresponding to the objective monitored value based on the correlation, a parameter calculation section which calculates a second setting value in the actual manufacturing process on the basis of the value of the feature quantity, and an apparatus control unit which changes the processing recipe with the second setting value being as a setting value of the second step.
摘要翻译：过程控制系统包括：准备设备信息的参考监视值和特征量之间的相关性的客户端计算机;准备描述作为实际制造过程中的第一设定值的处理配方的制造执行系统，所述控制参数，设备信息收集部分，其在具有所述第一设定值的实际制造过程的操作中收集所述设备信息的客观监视值;特征量计算部，其计算与所监视的目标对应的特征量的值基于相关性的值，参数计算部，其基于特征量的值计算实际制造过程中的第二设定值;以及装置控制单元，其将处理配方改变为第二设定值为设定第二步的值。

5. 发明授权

US07630858B1 Tool health information monitoring and tool performance analysis in semiconductor processing 失效
标题翻译：半导体加工中的工具健康信息监测和刀具性能分析
公开(公告)号：US07630858B1
公开(公告)日：2009-12-08
申请号：US11904858
申请日：2007-09-28
申请人： Susan Weiher-Telford , Stefan Soens
发明人： Susan Weiher-Telford , Stefan Soens
IPC分类号： G06F17/18 , G06F19/00
CPC分类号： G05B19/41875 , G05B2219/31477 , G05B2219/32221 , G05B2219/45031 , H01L21/67276 , H01L21/67288 , Y02P90/22
摘要： A plurality of tool identifiers, a plurality of information types, and a plurality of report types are displayed in a first user interface of a tool health reporting system. A user selection of a distinct report type from the plurality of report types, a distinct information type from the plurality of information types, and a distinct tool identifier from the plurality of tool identifiers are received. A report is displayed in a second user interface of the tool health reporting system, the report including data associated with the distinct information type, the distinct report type and the distinct tool identifier, wherein the report correlates equipment based measurement data to product level measurement data.
摘要翻译：在工具健康报告系统的第一用户界面中显示多个工具标识符，多个信息类型和多个报告类型。接收来自多个报告类型的不同报告类型的用户选择，来自多个信息类型的不同信息类型以及来自多个工具标识符的不同工具标识符。报告显示在工具健康报告系统的第二用户界面中，报告包括与不同信息类型相关联的数据，不同报告类型和不同的工具标识符，其中该报告将基于设备的测量数据与产品级测量数据相关联。

6. 发明授权

US07606681B2 System and method for process monitoring 有权
标题翻译：过程监控系统和方法
公开(公告)号：US07606681B2
公开(公告)日：2009-10-20
申请号：US11934156
申请日：2007-11-02
申请人： Ali Esmaili , Sanjay Mehta , Debashis Neogi , Carlos A. Valenzuela
发明人： Ali Esmaili , Sanjay Mehta , Debashis Neogi , Carlos A. Valenzuela
IPC分类号： G06F17/40 , G06F19/00 , G05B15/02 , G05B17/02
CPC分类号： G05B23/0254 , G05B17/02 , G05B2219/31457 , G05B2219/31477 , G05B2219/31478 , G05B2223/06
摘要： Systems and methods are provided that allow a user to monitor, diagnose, and configure a process. A user interface may be presented that displays data received from process monitors, sensors, and multivariate models. The user interface may be interactive, allowing a user to select which composite and multivariate models are displayed. The user interface and multivariate model may be constructed and updated in real time. The user interface may present various data and interfaces, such as a representation of a composite variable in a multivariate model, a representation of the contribution of process variables to the composite variable, and a representation of a subset of the process variables. The user may select a point of the composite variable for analysis, and the interface may indicate the contribution and values of process variables at the selected point. The interface may be transmitted to a remote user.
摘要翻译：提供了允许用户监视，诊断和配置进程的系统和方法。可以呈现显示从过程监视器，传感器和多变量模型接收的数据的用户界面。用户界面可以是交互式的，允许用户选择显示哪些复合和多变量模型。可以实时构建和更新用户界面和多变量模型。用户界面可以呈现各种数据和接口，诸如多变量模型中的复合变量的表示，过程变量对复合变量的贡献的表示，以及过程变量的子集的表示。用户可以选择用于分析的复合变量的点，并且接口可以指示所选点处的过程变量的贡献和值。该接口可以被发送到远程用户。

7. 发明授权

US06862484B2 Controlling method for manufacturing process 有权
标题翻译：制造过程的控制方法
公开(公告)号：US06862484B2
公开(公告)日：2005-03-01
申请号：US10125403
申请日：2002-04-19
申请人： Shunji Hayashi
发明人： Shunji Hayashi
IPC分类号： G01M99/00 , G05B19/418 , G05B23/02 , G06Q10/10 , G06Q50/00 , G06Q50/04 , H01L21/02 , G05B21/02
CPC分类号： G06Q10/10 , G05B19/41875 , G05B2219/31477 , G05B2219/32221 , Y02P90/14 , Y02P90/22
摘要： In a method of controlling a manufacturing process, a Mahalanobis space of plural manufacturing control parameters is generated on the basis of first sampled data. Then, a Mahalanobis distance from the Mahalanobis space and second sampled data is calculated. A manufacturing process is determined to be under a malfunction operating condition by comparing the Mahalanobis distance and a threshold value.
摘要翻译：在控制制造过程的方法中，基于第一采样数据生成多个制造控制参数的马氏距离空间。然后，计算马哈拉诺比斯与马哈拉诺比斯空间的距离和第二采样数据。通过比较马氏距离和阈值，确定制造过程处于故障运行状态。

8. 发明公开

US20240210927A1 VISUALIZATION SYSTEM 审中-公开
公开(公告)号：US20240210927A1
公开(公告)日：2024-06-27
申请号：US17907181
申请日：2020-10-22
申请人： KABUSHIKI KAISHA TOSHIBA , Toshiba Digital Solutions Corporation
发明人： Katsuhisa CHIBA , Masanori TAJIMA , Shinya WATANABE
IPC分类号： G05B19/418
CPC分类号： G05B19/41875 , G05B2219/31472 , G05B2219/31477
摘要： [PROBLEM] To visually display the manufacturing statuses of products manufactured through a plurality of manufacturing processes in order and changes of process characteristic factors caused in the manufacturing processes.
[SOLVING MEANS] A visualization system according to an embodiment stores manufacturing log information including start times and end times of manufacturing processes of products grouped in manufacturing units and manufactured through a plurality of manufacturing processes in order, and chronological history information of process characteristic factors corresponding to factors affecting quality characteristics in the manufacturing processes. A time axis for the process characteristic factors in synchronization with the time course of the manufacturing log information is created, and a display object representing a state or a change of each of the process characteristic factors is created based on the chronological history information and placed on the time axis to create a time line object of each of the process characteristic factors. A process characteristic factor timeline screen including the timeline objects of the respective process characteristic factors arranged in parallel is displayed on a display apparatus.

9. 发明申请

US20110046765A1 INFORMATION PROCESSING DEVICE, INFORMATION PROCESSING METHOD, AND PROGRAM 审中-公开
标题翻译：信息处理设备，信息处理方法和程序
公开(公告)号：US20110046765A1
公开(公告)日：2011-02-24
申请号：US12809749
申请日：2008-12-17
申请人： Munetaka Yamagami
发明人： Munetaka Yamagami
IPC分类号： G06F19/00
CPC分类号： G05B19/41875 , G05B2219/31477 , G05B2219/32187 , G05B2219/45031 , H01L21/67109 , H01L22/20 , H01L2924/0002 , Y02P90/12 , Y02P90/22 , H01L2924/00
摘要： An information processing device includes a target value receiving unit receiving one or more types of target values in a predetermined semiconductor manufacturing process; a parameter acquiring unit acquiring values of parameters during the semiconductor manufacturing process; an execution result acquiring unit acquiring one or more types of execution results indicating results of the semiconductor manufacturing process; an accumulation unit associating the execution results, the target values, and the values of parameters with one another and accumulating the same; a correlation acquiring unit acquiring correlation information indicating correlations among the execution results, the target values, and the values of parameters; an assist information acquiring unit acquiring assist information related to parameters with high correlation with respect to the target values received by the target value receiving unit by using the correlation information; and an output unit outputting the assist information acquired by the assist information acquiring unit.
摘要翻译：信息处理装置包括在预定的半导体制造过程中接收一种或多种类型的目标值的目标值接收单元; 参数获取单元，在半导体制造过程中获取参数值; 执行结果获取单元获取指示半导体制造过程的结果的一种或多种类型的执行结果; 累加单元，将执行结果，目标值和参数值相互关联并累加; 相关获取单元获取指示执行结果，目标值和参数值之间的相关性的相关信息; 辅助信息获取单元通过使用所述相关信息来获取与由所述目标值接收单元接收到的所述目标值具有高相关性的参数相关的辅助信息; 以及输出单元，输出由辅助信息获取单元获取的辅助信息。

10. 发明申请

US20090228839A1 Plant information display apparatus and method 审中-公开
标题翻译：植物信息显示装置及方法
公开(公告)号：US20090228839A1
公开(公告)日：2009-09-10
申请号：US12381232
申请日：2009-03-10
申请人： Ryotatsu Iga
发明人： Ryotatsu Iga
IPC分类号： G06F3/048
CPC分类号： G05B19/409 , G05B19/41875 , G05B2219/31467 , G05B2219/31472 , G05B2219/31477 , Y02P90/22
摘要： A plant information display apparatus and a plant information display method are provided. A defining section 11 defines correspondence relationships between all of plant data and softwares displaying the corresponding plant data. A plant data displaying section 12 expands and displays the plant data in a hierarchical manner. A plant data selection accepting section 13 accepts an operation of selecting the plant data on the screen displayed by the plant data displaying section 12. A software selection accepting section 14 displays a selecting screen for selecting one of the softwares, and accepts an operation of selecting the one of the softwares in accordance with an operation of the selecting screen. A extracting section 15 extracts the software or plant data based on the defining section 11.
摘要翻译：提供植物信息显示装置和植物信息显示方法。定义部分11定义所有工厂数据和显示相应工厂数据的软件之间的对应关系。工厂数据显示部分12以分层方式扩展和显示工厂数据。工厂数据选择接收部分13接受在工厂数据显示部分12所显示的画面上选择工厂数据的操作。软件选择接收部分14显示用于选择一个软件的选择画面，并接受选择操作根据选择屏幕的操作，该软件中的一个。提取部分15基于定义部分11提取软件或工厂数据。

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