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    • 4. 发明授权
    • Communication platform LSI system
    • 通信平台LSI系统
    • US06522664B1
    • 2003-02-18
    • US09267647
    • 1999-03-15
    • Nobuo Kawahara
    • Nobuo Kawahara
    • H04J322
    • H04L12/413G05B19/4185G05B2219/31122G05B2219/31145H04L12/40013H04L12/4604H04L12/462H04L43/00H04L67/12H04L69/08H05B37/0254Y02P90/04
    • The present invention provides a communication LSI for easily realizing mutually sending and receiving control system data and information system data by incorporating a control system I/O interface used when executing sensor monitoring and actuator drive control, an information system communication interface of Ethernet or others, and a data conversion CPU on one chip. Specifically, when sending control system data from a sensor connected to the control system I/O interface 107 to the Ethernet 106, the control system data stored in the memory 102 is converted to an Ethernet protocol by the CPU 101 and stored in the memory 102. The data converted to the Ethernet protocol is then sent to the Ethernet 106 from the information system controller 105 via the bus controller 104. On the other hand, when sending information system data to the sensor from the Ethernet 106, the reverse procedure of the aforementioned procedure is performed.
    • 本发明提供一种用于通过结合在执行传感器监视和致动器驱动控制时使用的控制系统I / O接口,以太网等的信息系统通信接口来容易地实现相互发送和接收控制系统数据和信息系统数据的通信LSI, 和一个芯片上的数据转换CPU。 具体地说,当从连接到控制系统I / O接口107的传感器向以太网106发送控制系统数据时,由CPU 101将存储在存储器102中的控制系统数据转换成以太网协议并存储在存储器102中 然后,转换成以太网协议的数据经由总线控制器104从信息系统控制器105发送到以太网106.另一方面,当从以太网106向传感器发送信息系统数据时, 执行上述过程。
    • 8. 发明授权
    • System for providing integrated monitoring, control and diagnostics
functions for semiconductor spray process tools
    • 用于为半导体喷涂工艺工具提供综合监控,控制和诊断功能的系统
    • US5591299A
    • 1997-01-07
    • US430329
    • 1995-04-28
    • Jay J. SeatonMichael AllenDonald LandisPatrick LeeDavid LinzySusan B. Luca
    • Jay J. SeatonMichael AllenDonald LandisPatrick LeeDavid LinzySusan B. Luca
    • H01L21/306G05B19/418G05B23/02H01L21/02H01L21/304H01L21/00
    • G05B19/41865G05B2219/31145G05B2219/31151G05B2219/31207G05B2219/31288G05B2219/31402G05B2219/31443G05B2219/32095G05B2219/32404G05B2219/32412G05B2219/36116G05B2219/45026Y02P90/14Y02P90/18Y02P90/185Y02P90/20
    • Method and apparatus for providing integrated monitoring, control and diagnostics functions for semiconductor spray processors is disclosed. In a preferred embodiment, a spray processor host system of the present invention comprises a plurality of PC-class computers interconnected via a network link. Each of a first subset of the spray processor host system computers comprises a supervisor computer connected to one of a plurality of spray process tools, which in the preferred embodiment comprise Mercury.RTM. MP processors. The supervisor computers provide ongoing information exchange with the processors and maintain up-to-date status information. Each supervisor computer maintains an event log of processor operations and operator actions, as well as data capture files for storing process variables captured by the supervisor computer. Each of a second subset of the spray processor host system computers comprises an engineer computer for providing the system operator with a command driven interface to the spray processor host system. Each engineer computer can monitor a plurality of supervisor computers and is used to enable such functions as recipe directory editing, recipe downloading, event log searching, data capture file data graphing and processor status viewing. A third subset of the spray processor host system computers comprises a bridge computer for providing a communications link between the supervisor computers and a upstream host computer outside the spray processor host system, for example, a lot scheduling or material flow control computer.
    • 公开了用于提供用于半导体喷雾处理器的综合监控,控制和诊断功能的方法和设备。 在优选实施例中,本发明的喷雾处理器主机系统包括通过网络链路互连的多个PC级计算机。 喷雾处理器主机系统计算机的第一子集中的每一个包括连接到多个喷射处理工具中的一个的管理计算机,在优选实施例中,该处理工具包括Mercury TM MP处理器。 主管计算机与处理器进行持续的信息交换并维护最新的状态信息。 每个主管计算机维护处理器操作和操作员动作的事件日志,以及用于存储由主管计算机捕获的过程变量的数据捕获文件。 喷雾处理器主机系统计算机的第二子集中的每一个包括工程计算机,用于向系统操作员提供与喷雾处理器主机系统的命令驱动接口。 每个工程师计算机可以监视多个管理计算机,并且用于启用诸如食谱目录编辑,食谱下载,事件日志搜索,数据捕获文件数据图形和处理器状态查看之类的功能。 喷雾处理器主机系统计算机的第三子集包括桥式计算机,用于在主管计算机和喷雾处理器主机系统之外的上游主机之间提供通信链路,例如批量调度或物料流控制计算机。