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2. 发明授权

US5591299A System for providing integrated monitoring, control and diagnostics functions for semiconductor spray process tools 失效
标题翻译：用于为半导体喷涂工艺工具提供综合监控，控制和诊断功能的系统
公开(公告)号：US5591299A
公开(公告)日：1997-01-07
申请号：US430329
申请日：1995-04-28
申请人： Jay J. Seaton , Michael Allen , Donald Landis , Patrick Lee , David Linzy , Susan B. Luca
发明人： Jay J. Seaton , Michael Allen , Donald Landis , Patrick Lee , David Linzy , Susan B. Luca
IPC分类号： H01L21/306 , G05B19/418 , G05B23/02 , H01L21/02 , H01L21/304 , H01L21/00
CPC分类号： G05B19/41865 , G05B2219/31145 , G05B2219/31151 , G05B2219/31207 , G05B2219/31288 , G05B2219/31402 , G05B2219/31443 , G05B2219/32095 , G05B2219/32404 , G05B2219/32412 , G05B2219/36116 , G05B2219/45026 , Y02P90/14 , Y02P90/18 , Y02P90/185 , Y02P90/20
摘要： Method and apparatus for providing integrated monitoring, control and diagnostics functions for semiconductor spray processors is disclosed. In a preferred embodiment, a spray processor host system of the present invention comprises a plurality of PC-class computers interconnected via a network link. Each of a first subset of the spray processor host system computers comprises a supervisor computer connected to one of a plurality of spray process tools, which in the preferred embodiment comprise Mercury.RTM. MP processors. The supervisor computers provide ongoing information exchange with the processors and maintain up-to-date status information. Each supervisor computer maintains an event log of processor operations and operator actions, as well as data capture files for storing process variables captured by the supervisor computer. Each of a second subset of the spray processor host system computers comprises an engineer computer for providing the system operator with a command driven interface to the spray processor host system. Each engineer computer can monitor a plurality of supervisor computers and is used to enable such functions as recipe directory editing, recipe downloading, event log searching, data capture file data graphing and processor status viewing. A third subset of the spray processor host system computers comprises a bridge computer for providing a communications link between the supervisor computers and a upstream host computer outside the spray processor host system, for example, a lot scheduling or material flow control computer.
摘要翻译：公开了用于提供用于半导体喷雾处理器的综合监控，控制和诊断功能的方法和设备。在优选实施例中，本发明的喷雾处理器主机系统包括通过网络链路互连的多个PC级计算机。喷雾处理器主机系统计算机的第一子集中的每一个包括连接到多个喷射处理工具中的一个的管理计算机，在优选实施例中，该处理工具包括Mercury TM MP处理器。主管计算机与处理器进行持续的信息交换并维护最新的状态信息。每个主管计算机维护处理器操作和操作员动作的事件日志，以及用于存储由主管计算机捕获的过程变量的数据捕获文件。喷雾处理器主机系统计算机的第二子集中的每一个包括工程计算机，用于向系统操作员提供与喷雾处理器主机系统的命令驱动接口。每个工程师计算机可以监视多个管理计算机，并且用于启用诸如食谱目录编辑，食谱下载，事件日志搜索，数据捕获文件数据图形和处理器状态查看之类的功能。喷雾处理器主机系统计算机的第三子集包括桥式计算机，用于在主管计算机和喷雾处理器主机系统之外的上游主机之间提供通信链路，例如批量调度或物料流控制计算机。

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