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1. 发明授权

US4844616A Interferometric dimensional measurement and defect detection method 失效
标题翻译：干涉测量和缺陷检测方法
公开(公告)号：US4844616A
公开(公告)日：1989-07-04
申请号：US200262
申请日：1988-05-31
申请人： Murlidhar V. Kulkarni , William H. Lancaster, Jr.
发明人： Murlidhar V. Kulkarni , William H. Lancaster, Jr.
IPC分类号： G01B9/02 , G01J9/02 , G01N21/88 , G01N21/95
CPC分类号： G01B9/0201 , G01B9/02048 , G01B9/02057 , G01N21/9501 , G01N21/9506 , G01B2290/70 , G01J2009/0265 , G01N2021/178
摘要： The invention is a method for detecting both surface topography and defect presence using an AC interferometer. Surface topography measurements are maximized by adjusting the signal voltage of the light modulator to a relative phase-sensitive value. Defect detection is maximized by adjusting the signal voltage of the light modulator to a relatively phase-insensitive value. This method not only allows for heretofore unknown defect detection by an AC interferometer but, because the signal voltage can be switched electronically, permits both observations to be taken at a high speed and for many points of a specimen, thereby making the method suitable for the manufacturing environment. More specifically, the method would be applicable to both optical disk and microchip manufacturing.
摘要翻译：本发明是使用AC干涉仪检测表面形貌和缺陷存在的方法。通过将光调制器的信号电压调整到相对相敏值来最大化表面形貌测量。通过将光调制器的信号电压调整到相对不敏感的值来最大化缺陷检测。该方法不仅能够通过AC干涉仪进行未知的未知缺陷检测，而且由于可以电子地切换信号电压，因此允许以高速度和样本的多个点进行观察，从而使该方法适合于制造环境。更具体地，该方法将适用于光盘和微芯片制造。

2. 发明申请

US20170184455A1 MEASURING DEVICE FOR POINT DIFFRACTION INTERFEROMETRIC WAVEFRONT ABERRATION AND METHOD FOR DETECTING WAVE ABERRATION 有权
公开(公告)号：US20170184455A1
公开(公告)日：2017-06-29
申请号：US14986560
申请日：2015-12-31
申请人： Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences
发明人： Xiangzhao Wang , Feng Tang , Guoxian Zhang , Shifu Xu
IPC分类号： G01J9/02
CPC分类号： G01M11/0271 , G01J9/0215 , G01J2009/0223 , G01J2009/0226 , G01J2009/0265 , G03F7/706
摘要： A point diffraction interferometric wavefront aberration measuring device comprising an optical source, an optical splitter, a first light intensity and polarization regulator, a phase shifter, a second light intensity and polarization regulator, an ideal wavefront generator, an object precision adjusting stage, a measured optical system, an image wavefront detection unit, an image precision adjusting stage, and a data processing unit. The center distance between the first output port and the second output port of the ideal wavefront generator is smaller than the diameter of the isoplanatic region of the measured optical system and is greater than the ratio of the diameter of the image point dispersion speckle of the measured optical system over the amplification factor thereof. A method for detecting wavefront aberration of the optical system is also provided by using the device.

3. 发明授权

US09441948B2 Apparatus, methods and storage medium for performing polarization-based quadrature demodulation in optical coherence tomography 有权
标题翻译：用于在光学相干断层摄影中执行基于偏振的正交解调的装置，方法和存储介质
公开(公告)号：US09441948B2
公开(公告)日：2016-09-13
申请号：US11502330
申请日：2006-08-09
申请人： Benjamin J. Vakoc , Seok-Hyun Yun , Guillermo J. Tearney , Brett Eugene Bouma
发明人： Benjamin J. Vakoc , Seok-Hyun Yun , Guillermo J. Tearney , Brett Eugene Bouma
IPC分类号： G01B9/02 , G01N21/21 , G01N21/47 , A61B5/00 , G01J3/45 , G01J9/02 , G01N21/27
CPC分类号： G01B9/02044 , A61B5/0059 , A61B5/0066 , G01B9/02004 , G01B9/02072 , G01B9/02081 , G01B9/02091 , G01B2290/45 , G01B2290/70 , G01J3/45 , G01J2009/0265 , G01N21/21 , G01N21/274 , G01N21/4795
摘要： Apparatus, method and storage medium which can provide at least one first electro-magnetic radiation to a sample and at least one second electromagnetic radiation to a reference, such that the first and/or second electromagnetic radiations have a spectrum which changes over time. In addition, a first polarization component of at least one third radiation associated with the first radiation can be combined with a second polarization component of at least one fourth radiation associated with the second radiation with one another. The first and second polarizations may be specifically controlled to be at least approximately orthogonal to one another.
摘要翻译：可以向样品提供至少一个第一电磁辐射和至少一个第二电磁辐射至参考物的装置，方法和存储介质，使得第一和/或第二电磁辐射具有随时间变化的光谱。此外，与第一辐射相关联的至少一个第三辐射的第一偏振分量可以与与第二辐射相关联的至少一个第四辐射的第二偏振分量彼此组合。可以将第一和第二偏振特别地控制为至少大致彼此正交。

4. 发明授权

US07123364B2 Acoustic imaging microscope 失效
标题翻译：声像显微镜
公开(公告)号：US07123364B2
公开(公告)日：2006-10-17
申请号：US10267237
申请日：2002-10-08
申请人： Vance A. Deason , Kenneth L. Telschow
发明人： Vance A. Deason , Kenneth L. Telschow
IPC分类号： G01B9/02
CPC分类号： G01H9/002 , G01B9/04 , G01H9/00 , G01J2009/0265
摘要： An imaging system includes: an object wavefront source and an optical microscope objective all positioned to direct an object wavefront onto an area of a vibrating subject surface encompassed by a field of view of the microscope objective, and to direct a modulated object wavefront reflected from the encompassed surface area through a photorefractive material; and a reference wavefront source and at least one phase modulator all positioned to direct a reference wavefront through the phase modulator and to direct a modulated reference wavefront from the phase modulator through the photorefractive material to interfere with the modulated object wavefront. The photorefractive material has a composition and a position such that interference of the modulated object wavefront and modulated reference wavefront occurs within the photorefractive material, providing a full-field, real-time image signal of the encompassed surface area.
摘要翻译：一种成像系统包括：物体波前源和光学显微镜物镜，其全部定位成将物体波前引导到由显微镜物镜的视场所包围的振动对象表面的区域上，并且引导从通过光折射材料包围的表面积; 以及参考波前源和至少一个相位调制器，其全部定位成将参考波前引导通过相位调制器，并且通过光折射材料引导来自相位调制器的调制参考波阵面以干扰调制对象波前。光折射材料具有组成和位置，使得调制对象波前和调制参考波阵面的干涉发生在光折射材料内，从而提供包围的表面区域的全场实时图像信号。

5. 发明申请

US20030128366A1 Imaging systems 失效
标题翻译：成像系统
公开(公告)号：US20030128366A1
公开(公告)日：2003-07-10
申请号：US10267237
申请日：2002-10-08
发明人： Vance A. Deason , Kenneth L. Telschow
IPC分类号： G01B009/02
CPC分类号： G01H9/002 , G01B9/04 , G01H9/00 , G01J2009/0265
摘要： An imaging system includes: an object wavefront source and an optical microscope objective all positioned to direct an object wavefront onto an area of a vibrating subject surface encompassed by a field of view of the microscope objective, and to direct a modulated object wavefront reflected from the encompassed surface area through a photorefractive material; and a reference wavefront source and at least one phase modulator all positioned to direct a reference wavefront through the phase modulator and to direct a modulated reference wavefront from the phase modulator through the photorefractive material to interfere with the modulated object wavefront. The photorefractive material has a composition and a position such that interference of the modulated object wavefront and modulated reference wavefront occurs within the photorefractive material, providing a full-field, real-time image signal of the encompassed surface area.
摘要翻译：一种成像系统包括：物体波前源和光学显微镜物镜，其全部定位成将物体波前引导到由显微镜物镜的视场所包围的振动对象表面的区域上，并且引导从通过光折射材料包围的表面积; 以及参考波前源和至少一个相位调制器，其全部定位成将参考波前引导通过相位调制器，并且通过光折射材料引导来自相位调制器的调制参考波阵面以干扰调制对象波前。光折射材料具有组成和位置，使得调制对象波前和调制参考波阵面的干涉发生在光折射材料内，从而提供包围的表面区域的全场实时图像信号。

6. 发明授权

US07564568B2 Phase shifting interferometry with multiple accumulation 失效
标题翻译：具有多次积分的相移干涉测量
公开(公告)号：US07564568B2
公开(公告)日：2009-07-21
申请号：US11680968
申请日：2007-03-01
申请人： Peter De Groot , Leslie L. Deck
发明人： Peter De Groot , Leslie L. Deck
IPC分类号： G01B11/02
CPC分类号： G01B9/02011 , G01B9/02002 , G01B9/02004 , G01B9/02007 , G01B9/02012 , G01B9/02057 , G01B2290/45 , G01B2290/70 , G01J2009/0234 , G01J2009/0265
摘要： An interferometer system is disclosed which is configured to combine measurement light with reference light to form an optical interference pattern, where the interferometer system includes a modulator configured to repetitively introduce a sequence of phase shifts between the measurement and reference light; and a camera system positioned to measure the optical interference pattern, where the camera system is configured to separately accumulate time-integrated images of the optical interference pattern corresponding to the different phase shifts in the sequence during the repetitions of the sequence.
摘要翻译：公开了一种干涉仪系统，其被配置为将测量光与参考光结合以形成光学干涉图案，其中所述干涉仪系统包括被配置为在所述测量参考光和所述参考光之间重复地引入相移序列的调制器; 以及定位成测量光学干涉图案的相机系统，其中相机系统被配置为在序列的重复期间分别累积对应于序列中的不同相移的光学干涉图案的时间集成图像。

7. 发明申请

US20070035743A1 Apparatus, methods and storage medium for performing polarization-based quadrature demodulation in optical coherence tomography 有权
标题翻译：用于在光学相干断层摄影中执行基于偏振的正交解调的装置，方法和存储介质
公开(公告)号：US20070035743A1
公开(公告)日：2007-02-15
申请号：US11502330
申请日：2006-08-09
申请人： Benjamin Vakoc , Seok-Hyun Yun , Guillermo Tearney , Brett Bouma
发明人： Benjamin Vakoc , Seok-Hyun Yun , Guillermo Tearney , Brett Bouma
IPC分类号： G01B9/02 , G01B11/02
CPC分类号： G01B9/02044 , A61B5/0059 , A61B5/0066 , G01B9/02004 , G01B9/02072 , G01B9/02081 , G01B9/02091 , G01B2290/45 , G01B2290/70 , G01J3/45 , G01J2009/0265 , G01N21/21 , G01N21/274 , G01N21/4795
摘要： Apparatus, method and storage medium which can provide at least one first electro-magnetic radiation to a sample and at least one second electromagnetic radiation to a reference, such that the first and/or second electromagnetic radiations have a spectrum which changes over time. In addition, a first polarization component of at least one third radiation associated with the first radiation can be combined with a second polarization component of at least one fourth radiation associated with the second radiation with one another. The first and second polarizations may be specifically controlled to be at least approximately orthogonal to one another.
摘要翻译：可以向样品提供至少一个第一电磁辐射和至少一个第二电磁辐射至参考物的装置，方法和存储介质，使得第一和/或第二电磁辐射具有随时间变化的光谱。此外，与第一辐射相关联的至少一个第三辐射的第一偏振分量可以与与第二辐射相关联的至少一个第四辐射的第二偏振分量彼此组合。可以将第一和第二偏振特别地控制为至少大致彼此正交。

8. 发明授权

US4905169A Method and apparatus for simultaneously measuring a plurality of spectral wavelengths present in electromagnetic radiation 失效
标题翻译：用于同时测量存在于电磁辐射中的多个光谱波长的方法和装置
公开(公告)号：US4905169A
公开(公告)日：1990-02-27
申请号：US366348
申请日：1989-06-15
申请人： Tudor N. Buican , John C. Martin
发明人： Tudor N. Buican , John C. Martin
IPC分类号： G01J3/447 , G01J3/453 , G01J9/02 , G01N15/10 , G01N15/14
CPC分类号： G01J3/453 , G01J3/447 , G01J9/0246 , G01J2009/0249 , G01J2009/0265 , G01N15/14 , G01N2015/1006 , G01N2021/6439
摘要： An apparatus and method simultaneously measures a plurality of spectral wavelengths present in electromagnetic radiation. A modulatable birefringent optical element is employed to divide a polarized light beam into two components, thereby producing a phase difference in two resulting light beams such that the two beams can be made to interfere with one another when recombined, the interference pattern providing the wavelength information required for the analysis of the incident light. The interferometer thus created performs in a similar manner to a Michelson interferometer, but with no moving parts, and with a resolution dependent on the degree of phase shift introduced by the modulator.
摘要翻译：一种装置和方法同时测量电磁辐射中存在的多个光谱波长。采用可调制的双折射光学元件将偏振光束分成两个分量，从而在两个产生的光束中产生相位差，使得当重新组合时可以使两个光束彼此干扰，提供波长信息的干涉图案需要分析入射光。这样创建的干涉仪以与迈克尔逊干涉仪类似的方式执行，但没有移动部件，并且具有取决于由调制器引入的相移程度的分辨率。

9. 发明授权

US09863841B2 Measuring device having ideal wavefront generator for detecting point diffraction interferometric wavefront aberration of measured optical system and method for detecting wavefront aberration thereof 有权
$Measuring device having ideal wavefront generator for detecting point diffraction interferometric wavefront aberration of measured optical system and method for detecting wavefront aberration thereof$
公开(公告)号：US09863841B2
公开(公告)日：2018-01-09
申请号：US14986560
申请日：2015-12-31
申请人： Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
发明人： Xiangzhao Wang , Feng Tang , Guoxian Zhang , Shifu Xu
IPC分类号： G01M11/02 , G03F7/20 , G01J9/02
CPC分类号： G01M11/0271 , G01J9/0215 , G01J2009/0223 , G01J2009/0226 , G01J2009/0265 , G03F7/706
摘要： A point diffraction interferometric wavefront aberration measuring device comprising an optical source, an optical splitter, a first light intensity and polarization regulator, a phase shifter, a second light intensity and polarization regulator, an ideal wavefront generator, an object precision adjusting stage, a measured optical system, an image wavefront detection unit, an image precision adjusting stage, and a data processing unit. The center distance between the first output port and the second output port of the ideal wavefront generator is smaller than the diameter of the isoplanatic region of the measured optical system and is greater than the ratio of the diameter of the image point dispersion speckle of the measured optical system over the amplification factor thereof. A method for detecting wavefront aberration of the optical system is also provided by using the device.

10. 发明申请

US20070206201A1 Phase Shifting Interferometry With Multiple Accumulation 失效
标题翻译：具有多次累积的相移干涉测量
公开(公告)号：US20070206201A1
公开(公告)日：2007-09-06
申请号：US11680968
申请日：2007-03-01
申请人： Peter de Groot , Leslie Deck
发明人： Peter de Groot , Leslie Deck
IPC分类号： G01B11/02
CPC分类号： G01B9/02011 , G01B9/02002 , G01B9/02004 , G01B9/02007 , G01B9/02012 , G01B9/02057 , G01B2290/45 , G01B2290/70 , G01J2009/0234 , G01J2009/0265
摘要： An interferometer system is disclosed which is configured to combine measurement light with reference light to form an optical interference pattern, where the interferometer system includes a modulator configured to repetitively introduce a sequence of phase shifts between the measurement and reference light; and a camera system positioned to measure the optical interference pattern, where the camera system is configured to separately accumulate time-integrated images of the optical interference pattern corresponding to the different phase shifts in the sequence during the repetitions of the sequence.
摘要翻译：公开了一种干涉仪系统，其被配置为将测量光与参考光结合以形成光学干涉图案，其中所述干涉仪系统包括被配置为在所述测量参考光和所述参考光之间重复地引入相移序列的调制器; 以及定位成测量光学干涉图案的相机系统，其中相机系统被配置为在序列的重复期间分别累积对应于序列中的不同相移的光学干涉图案的时间集成图像。

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