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1. 发明授权

US11854851B2 Interface tool 有权
公开(公告)号：US11854851B2
公开(公告)日：2023-12-26
申请号：US17249568
申请日：2021-03-05
申请人： Taiwan Semiconductor Manufacturing Company, Ltd.
发明人： Jyh-Shiou Hsu , Chyi-Tsong Ni , Mu-Tsang Lin , Su-Horng Lin
IPC分类号： H01L21/677 , H01L21/687 , F24F9/00
CPC分类号： H01L21/67772 , F24F9/00 , H01L21/67766 , H01L21/67778 , H01L21/68707 , F24F2009/005
摘要： A closed gas circulation system may include a sealed plenum, circulation fans, and a fan filter unit (FFU) inlet to contain, filter, condition, and re-circulate a gas through a chamber of an interface tool. The gas provided to the chamber is maintained in a conditioned environment in the closed gas circulation system as opposed to introducing external air into the chamber through the FFU inlet. This enables precise control over the relative humidity and oxygen concentration of the gas used in the chamber, which reduces the oxidation of semiconductor wafers that are transferred through the chamber. The closed gas circulation system may also include an air-flow rectifier, a return vent, and one or more vacuum pumps to form a downflow of collimated gas in the chamber and to automatically control the feed-forward pressure and flow of gas through the chamber and the sealed plenum.

2. 发明申请

US20180328610A1 AIR CURTAIN APPARATUS 审中-公开
公开(公告)号：US20180328610A1
公开(公告)日：2018-11-15
申请号：US15976017
申请日：2018-05-10
申请人： SERGE DUBE
发明人： SERGE DUBE
IPC分类号： F24F9/00
CPC分类号： F24F9/00 , F24F2009/005 , F24F2009/007
摘要： An air curtain apparatus comprises a generally horizontal duct having at least one inlet and defining at least one outlet in a wall thereof. A plurality of axial fan units are mounted side-by-side across the at least one outlet defined in the wall of the duct, the axial fan units having rotational axes generally parallel to one another and side-by-side to blow air from an interior of the duct to an exterior of the duct. One or more grills are positioned adjacent to the axial fan units in a downstream flow path of the axial fan units, the grill(s) directing an air flow of the axial fan units into a downwardly directed air curtain. A method for creating an air curtain is also provided.

3. 发明授权

US07465225B2 Clean room unit 失效
标题翻译：洁净室单位
公开(公告)号：US07465225B2
公开(公告)日：2008-12-16
申请号：US10546584
申请日：2004-06-03
申请人： Shiro Ohmura , Yoshihito Ohmura , Hideaki Hirobe , Takehiko Imura
发明人： Shiro Ohmura , Yoshihito Ohmura , Hideaki Hirobe , Takehiko Imura
IPC分类号： F24F7/06 , B01L1/04 , B08B15/02
CPC分类号： F24F3/161 , F24F2009/005 , F24F2011/0004 , F24F2011/0005
摘要： A clean room unit which is equipped with a work room and a clean bench unit can be independently installed inside a building, can generate an air shower in the work room, and can realize miniaturization and cost reduction. The clean room has a work room, a clean bench unit which has a work opening and has the work opening installed to look onto the work room, an air conditioning system which can perform purification and pressure control of air inside the work room and the clean bench unit and can generate an air shower in the work room, and a control unit. The air conditioning system is controlled by the control unit to switch exclusively between the air shower mode, the ventilation mode, the positively-pressurized work mode, and the negatively-pressurized work mode.
摘要翻译：可以独立地安装一个装有工作室和洁净台单元的洁净室单元，可以在工作室内产生空气淋浴，实现小型化和降低成本。洁净室有一个工作室，一个干净的工作台，它有一个工作开口，安装了工作开关，可以看到工作室，一个空调系统，可以对工作室内的空气进行净化和压力控制，并清洁可以在工作室内产生一个空气淋浴，一个控制单元。空调系统由控制单元控制，仅在空气淋浴模式，通风模式，正压工作模式和负压工作模式之间切换。

4. 发明申请

US20040192187A1 Conditioned vestibule for a cold storage doorway 失效
标题翻译：用于冷藏门口的条件前庭
公开(公告)号：US20040192187A1
公开(公告)日：2004-09-30
申请号：US10754678
申请日：2004-01-09
发明人： Paul Ashley , Colin D. Johnstone , Peter R. Smith
IPC分类号： F24F009/00
CPC分类号： F25D23/023 , F24F9/00 , F24F11/77 , F24F2009/005 , F25D13/00 , F25D2700/02
摘要： A conditioned vestibule for a cold storage doorway is disclosed. The vestibule includes a frame that supports inner and outer moveable door-forming members. The vestibule also includes a heater that circulates air between the inner and outer door-forming members and a variable-speed fan that varies flow of the air between the inner and outer door-forming members. In one embodiment, the airflow from the fan increases upon the opening of the door-forming members and decreases upon the closing of the door-forming members.
摘要翻译：公开了一种用于冷藏入口的调节前庭。前庭包括支撑内部和外部可移动门形成构件的框架。前庭还包括一个加热器，该加热器使内外门形成部件之间的空气循环，以及变速风扇，其改变内门形成部件和外门形成部件之间的空气流动。在一个实施例中，来自风扇的气流在门形成部件的打开时增加，并且在门形成部件关闭时减小。

5. 发明申请

US20060180081A1 Semiconductor manufacturing apparatus having air curtain in door entrance 审中-公开
标题翻译：半导体制造装置在门口具有气帘
公开(公告)号：US20060180081A1
公开(公告)日：2006-08-17
申请号：US11190117
申请日：2005-07-27
申请人： Young-ho Park
发明人： Young-ho Park
IPC分类号： B05C11/00
CPC分类号： H01L21/67126 , F24F9/00 , F24F2009/005 , H01L21/67017 , H01L21/67739
摘要： Disclosed is a semiconductor manufacturing apparatus having an air curtain located in a door entrance thereof. The air curtain is generated by an air curtain generator located in the door entrance of the apparatus. The air curtain typically flows into a discharge pipe located in the door entrance opposite the air curtain generator.
摘要翻译：公开了一种具有位于门入口的气帘的半导体制造装置。气幕由位于设备门入口的气幕发生器产生。气帘通常流入位于与气帘发生器相对的门入口的排放管中。

6. 发明申请

US20060160484A1 Door with integrated identification system in the air curtain device 审中-公开
标题翻译：具有综合识别系统的门在气幕装置中
公开(公告)号：US20060160484A1
公开(公告)日：2006-07-20
申请号：US10564687
申请日：2004-07-08
申请人： Robert Falk
发明人： Robert Falk
IPC分类号： E06B7/02
CPC分类号： E06B3/90 , E05F15/605 , E05F15/608 , E05F15/632 , E05F15/73 , E05G5/003 , E05Y2900/132 , E06B7/28 , F24F9/00 , F24F2009/005
摘要： The invention relates to a door device (10) with at least one door (11), for opening and closing a passageway (27), such as used in stores, public buildings, or similar. The doors (11) may be displaced in a door frame (12), for example, by means of a rotational or longitudinal displaceable mounting. The door device (10) is further provided with at least one air curtain device (30), essentially running along the complete height of the passageway (27) and which generates an exiting air curtain (33), such that, with the door (11) open, the passageway (27) is screened by the air curtain (33). The generated air curtain (33) serves to reduce the energy losses which occur when air from the outside (28) of the door device (10) reaches the inside (29) of the door device (10), or vice versa. According to the invention, a door device (10) may be achieved which not only permits the access of people and objects, but also identification of the people, objects, or similar and the management thereof is as uncomplicated as possible, whereby the door device (10) is provided with at least one additional identification system (40). Said identification system (40) comprises at least one sensor unit (41), a control unit (42) and an output unit (43) which are connected to each other. Furthermore, at least one sensor unit (41) in the identification system (40) is integrated in the air curtain device (30).
摘要翻译：本发明涉及一种具有至少一个门（11）的门装置（10），用于打开和关闭诸如在商店，公共建筑物或类似物中使用的通道（27）。门（11）可以例如通过旋转或纵向可移位安装在门框（12）中移位。门装置（10）还设置有至少一个空气幕装置（30），其基本上沿着通道（27）的整个高度延伸并且产生出口空气幕（33），使得与门 11）打开，通道（27）被气帘（33）屏蔽。所产生的气帘（33）用于减少从门装置（10）的外部（28）到达门装置（10）的内部（29）的空气发生的能量损失，反之亦然。根据本发明，可以实现门装置（10），其不仅允许人和物体的进入，而且允许人，物体或类似物的识别，并且其管理尽可能不复杂，由此门装置（10）设置有至少一个附加识别系统（40）。所述识别系统（40）包括彼此连接的至少一个传感器单元（41），控制单元（42）和输出单元（43）。此外，识别系统（40）中的至少一个传感器单元（41）集成在气幕装置（30）中。

7. 发明授权

US06960129B2 Conditioned vestibule for a cold storage doorway 失效
标题翻译：用于冷藏门口的条件前庭
公开(公告)号：US06960129B2
公开(公告)日：2005-11-01
申请号：US10754678
申请日：2004-01-09
申请人： Paul Ashley , Colin D. Johnstone , Peter R. Smith
发明人： Paul Ashley , Colin D. Johnstone , Peter R. Smith
IPC分类号： F24F9/00 , F25D23/02 , F25D17/04
CPC分类号： F25D23/023 , F24F9/00 , F24F11/77 , F24F2009/005 , F25D13/00 , F25D2700/02
摘要： A conditioned vestibule for a cold storage doorway is disclosed. The vestibule includes a frame that supports inner and outer moveable door-forming members. The vestibule also includes a heater that circulates air between the inner and outer door-forming members and a variable-speed fan that varies flow of the air between the inner and outer door-forming members. In one embodiment, the airflow from the fan increases upon the opening of the door-forming members and decreases upon the closing of the door-forming members.
摘要翻译：公开了一种用于冷藏入口的调节前庭。前庭包括支撑内部和外部可移动门形成构件的框架。前庭还包括一个加热器，该加热器使内外门形成部件之间的空气循环，以及变速风扇，其改变内门形成部件和外门形成部件之间的空气流动。在一个实施例中，来自风扇的气流在门形成部件的打开时增加，并且在门形成部件关闭时减小。

8. 发明申请

US20040242146A1 Sliding door device 失效
标题翻译：滑门装置
公开(公告)号：US20040242146A1
公开(公告)日：2004-12-02
申请号：US10493082
申请日：2004-04-16
发明人： Robert Falk
IPC分类号： E06B007/02
CPC分类号： F24F9/00 , E05F15/73 , E05Y2900/132 , E06B7/00 , F24F2009/005
摘要： The invention concerns a sliding door device (10) comprising at least a mobile sliding door (11) and separating elements (12) for maintaining and guiding the mobile and removable sliding door (11). The latter enables automatic opening and closure of an opening (20) based on a command. Therefor, the edges of the sliding door are at least partly enclosed with a frame part (14), an air curtain (24) being produced in front of the passageway (20) by means of a fan (16). The invention is characterized in that the sliding door comprises on its free vertical sides a frame part (14) provided with a housing wherein is arranged a fan (16). The outlet (17) of said fan leads to a longitudinal opening in the form of a nozzle producing the air curtain (24) and extending over practically the entire length of the vertical side (13) of the door. Additionally an inlet (18) of the fan (16) is provided in the frame part (14).
摘要翻译：本发明涉及一种滑动门装置（10），其包括至少一个移动滑动门（11）和分离元件（12），用于维持和引导移动和可拆卸滑动门（11）。后者基于命令实现开口（20）的自动打开和关闭。因此，滑动门的边缘至少部分地与框架部分（14）封闭，通过风扇（16）在通道（20）的前面产生空气幕（24）。本发明的特征在于，滑动门在其自由垂直侧上包括设置有壳体的框架部分（14），其中布置有风扇（16）。所述风扇的出口（17）以形成空气幕（24）的喷嘴形式的纵向开口形成，并且几乎在门的垂直侧（13）的整个长度上延伸。此外，风扇（16）的入口（18）设置在框架部分（14）中。

9. 发明授权

US11737583B2 Air curtain blanking plate 有权
公开(公告)号：US11737583B2
公开(公告)日：2023-08-29
申请号：US16302471
申请日：2017-05-16
申请人： Aerofoil Energy Limited
发明人： Paul McAndrew
IPC分类号： A47F3/04 , F24F9/00
CPC分类号： A47F3/0447 , A47F3/0469 , F24F9/00 , F24F2009/005
摘要： An open display refrigerator comprises a refrigerated interior space, air in the refrigerated interior space being separated from air exterior to the open display refrigerator by an air curtain established by a fan which blows air through an air outlet towards a corresponding air inlet which recovers air from the air curtain for recirculation to the air outlet. A distal region of the air outlet is occluded to leave only a region of the air outlet proximal to the interior space open, and an air curtain guide is aligned in a direction of air flow of the air curtain with an edge of the blanking plate proximal to the interior space.

10. 发明授权

US08618444B2 Rotary door heater system 有权
标题翻译：旋转门加热器系统
公开(公告)号：US08618444B2
公开(公告)日：2013-12-31
申请号：US11453402
申请日：2006-06-15
申请人： Thaddeus M. Jones
发明人： Thaddeus M. Jones
IPC分类号： H05B3/00 , H05B3/06
CPC分类号： H05B3/28 , F24F11/41 , F24F2009/005 , H05B2203/003
摘要： A revolving door deicer/dryer system including a floor grate having a bottom side and a heating system associated with the bottom side of the floor grate. The heating system includes at least one shaped plate and at least one heating element serpentinely routed on the at least one shaped plate.
摘要翻译：一种旋转门除冰机/干燥器系统，包括具有底侧的地板格栅和与地板格栅的底侧相关联的加热系统。加热系统包括至少一个成形板和在至少一个成形板上蛇形地路由的至少一个加热元件。

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