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    • 1. 发明申请
    • Electropolishing electrolyte and method for planarizing a metal layer using the same
    • 电抛光电解质及使用其进行平面化金属层的方法
    • US20060070888A1
    • 2006-04-06
    • US11051163
    • 2005-02-04
    • Jia ShiehSue LiuBau Dai
    • Jia ShiehSue LiuBau Dai
    • B23H3/08
    • B23H5/08B23H5/12C25F3/02H01L21/32115
    • The present electropolishing electrolyte comprises an acid solution and an alcohol additive having at least one hydroxy group, wherein the contact angle of the alcohol additive is smaller than the contact angle of the acid solution on a metal layer under electropolishing. The alcohol additive is selected methanol, ethanol and glycerol, and the acid-solution comprises phosphoric acid. The volumetric ratio of glycerol to phosphoric acid is between 1:50 and 1:200, and is preferably 1:100. The volumetric ratio is between 1:100 and 1:150 for methanol to phosphoric acid, and between 1:100 and 1:150 for ethanol to phosphoric acid. In addition, the acid solution further comprises an organic acid selected from the group consisting of acetic acid and citric acid. The concentration is between 10000 and 12000 ppm for the acetic acid, and between 500 and 1000 ppm for citric acid.
    • 本电解抛光电解质包含酸溶液和具有至少一个羟基的醇添加剂,其中醇添加剂的接触角小于在电解抛光下的金属层上的酸溶液的接触角。 醇添加剂选择甲醇,乙醇和甘油,酸溶液包含磷酸。 甘油与磷酸的体积比为1:50至1:200,优选为1:100。 甲醇与磷酸的体积比为1:100至1:150,乙醇至磷酸的体积比为1:100至1:150。 此外,酸溶液还包含选自乙酸和柠檬酸的有机酸。 乙酸的浓度为10000至12000ppm,柠檬酸的浓度为500至1000ppm。
    • 6. 发明申请
    • EDM wire
    • 电火花线
    • US20070295695A1
    • 2007-12-27
    • US11473995
    • 2006-06-23
    • Dandridge Tomalin
    • Dandridge Tomalin
    • B23H1/04B05D5/12
    • B23H5/08B23H5/12
    • An EDM wire having an outer coating of epsilon phase brass and a process for manufacturing the EDM wire is provided. The process includes coating a copper bearing metallic core with zinc. The zinc coating is then converted to epsilon phase brass by heat treating the wire at a temperature low enough to minimize or eliminate any resulting changes in the mechanical properties of the wire. The coated core wire may be drawn to a finish size prior to heat treatment which will result in a wire with a substantially continuous epsilon phase coating.
    • 提供了具有ε相黄铜的外涂层的EDM线和用于制造EDM线的方法。 该方法包括用锌涂覆铜轴承金属芯。 然后通过在足够低的温度下对线材进行热处理将锌涂层转化为ε相黄铜,以最小化或消除导线的机械性能的任何变化。 涂覆的芯线可以在热处理之前被拉伸至精加工尺寸,这将导致具有基本上连续的ε相涂层的导线。
    • 9. 发明授权
    • Electropolishing electrolyte and method for planarizing a metal layer using the same
    • 电抛光电解质及使用其进行平面化金属层的方法
    • US07501051B2
    • 2009-03-10
    • US11051163
    • 2005-02-04
    • Jia Min ShiehSue Hong LiuBau Tong Dai
    • Jia Min ShiehSue Hong LiuBau Tong Dai
    • B23H11/00
    • B23H5/08B23H5/12C25F3/02H01L21/32115
    • The present electropolishing electrolyte comprises an acid solution and an alcohol additive having at least one hydroxy group, wherein the contact angle of the alcohol additive is smaller than the contact angle of the acid solution on a metal layer under electropolishing. The alcohol additive is selected methanol, ethanol and glycerol, and the acid solution comprises phosphoric acid. The volumetric ratio of glycerol to phosphoric acid is between 1:50 and 1:200, and is preferably 1:100. The volumetric ratio is between 1:100 and 1:150 for methanol to phosphoric acid, and between 1:100 and 1:150 for ethanol to phosphoric acid. In addition, the acid solution further comprises an organic acid selected from the group consisting of acetic acid and citric acid. The concentration is between 10000 and 12000 ppm for the acetic acid, and between 500 and 1000 ppm for citric acid.
    • 本电解抛光电解质包含酸溶液和具有至少一个羟基的醇添加剂,其中醇添加剂的接触角小于电解抛光时酸溶液在金属层上的接触角。 醇添加剂选择甲醇,乙醇和甘油,酸溶液含磷酸。 甘油与磷酸的体积比为1:50至1:200,优选为1:100。 甲醇与磷酸的体积比为1:100至1:150,乙醇至磷酸的体积比为1:100至1:150。 此外,酸溶液还包含选自乙酸和柠檬酸的有机酸。 乙酸的浓度为10000至12000ppm,柠檬酸的浓度为500至1000ppm。