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    • 3. 发明授权
    • Scanning probe with digitized pulsed-force mode operation and real-time evaluation
    • 扫描探头采用数字化脉冲力模式操作和实时评估
    • US07129486B2
    • 2006-10-31
    • US10433917
    • 2001-12-12
    • Peter SpizigDetlef SanchenJörg FörstnerJoachim KoenenOthmar Marti
    • Peter SpizigDetlef SanchenJörg FörstnerJoachim KoenenOthmar Marti
    • G01N23/00
    • G01Q60/34G01Q10/06G01Q30/04G01Q60/32
    • The invention relates to a method for creating the image of a sample surface to be analyzed, with a resolution which is better than 1 μm laterally in relation to the sample surface and better than 100 nm vertically in relation to said surface. According to the invention, the surface is scanned on a point-by-point basis by a scanning probe, the distance between the scanning probe and the sample surface at each scanning point being periodically modulated, in such a way that a force-time curve of the probe is produced for this point. The force-time curve is recorded at each scanning point, digitized using an A/D converter, evaluated online in real-time and stored, together with the entire data stream, in a first area of a memory device. One or several characteristic variables of the force-time curves are determined for each scanning point from the real-time evaluation results and the stored digitized force-time curves and an image of the sample surface is obtained from said characteristic variables of the scanning points.
    • 本发明涉及一种用于创建待分析样品表面的图像的方法,其分辨率相对于样品表面横向优于1μm,相对于所述表面垂直于100nm。 根据本发明,通过扫描探针逐点扫描表面,在每个扫描点处扫描探针和样品表面之间的距离被周期性地调制,使得力 - 时间曲线 的探针是为此而产生的。 在每个扫描点记录力 - 时间曲线,使用A / D转换器进行数字化,实时在线评估,并与整个数据流一起存储在存储器件的第一区域中。 从实时评估结果和存储的数字化力 - 时间曲线确定每个扫描点的力 - 时间曲线的一个或几个特征变量,并且从扫描点的所述特征变量获得样本表面的图像。
    • 9. 发明授权
    • Method and device for simultaneously determining the adhesion, friction, and other material properties of a sample surface
    • 用于同时测定样品表面的粘合性,摩擦性和其它材料性质的方法和装置
    • US06880386B1
    • 2005-04-19
    • US09869789
    • 2000-01-04
    • Hans-Ulrich KrotilThomas StifterOthmar Marti
    • Hans-Ulrich KrotilThomas StifterOthmar Marti
    • G01N13/00G01N19/02G01N19/04G01Q20/02G01Q60/26G01Q60/28G01N13/16G01B11/30G01B21/30
    • G01Q60/26G01N19/02G01N19/04G01Q20/02G01Q60/28
    • A process for the location-resolved simultaneous detection of the adhesion and friction as well as possibly of other material properties of a sample surface to be examined by means of a raster probe microscope comprising a raster probe. The raster probe and/or the sample with sample surface are moved until at a point of the sample surface to be examined the raster probe interacts in a determined manner with this surface. The raster probe and/or the sample are subjected to a vertical oscillation, and a first measuring signal characterized by the deformation of the raster probe is recorded. A second measuring signal characterizing the deformation of the raster probe is recorded, wherein the raster probe and/or the sample are subjected to a horizontal and/or vertical oscillation. From these two measuring signals the desired material properties are determined. For the detection of the entire surface area to be examined the raster probe and or the sample are again moved and for the repetition of the measuring process described brought into contact with the sample surface in the above described manner.
    • 用于通过包括光栅探针的光栅探针显微镜同时检测粘合和摩擦以及可能通过待检查的样品表面的其它材料性质的位置分辨的方法。 光栅探针和/或具有样品表面的样品被移动直到待检测的样品表面的点处,光栅探针以确定的方式与该表面相互作用。 光栅探针和/或样品经受垂直振荡,并且记录由光栅探针的变形表征的第一测量信号。 记录表征光栅探针的变形的第二测量信号,其中光栅探针和/或样品经受水平和/或垂直振荡。 从这两个测量信号中,确定所需的材料性质。 为了检测待检查的整个表面区域,再次移动光栅探针和/或样品,并且以上述方式重复与描述的样品表面接触的测量过程。