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    • 6. 发明授权
    • Laser for generating narrow-band radiation
    • 用于产生窄带辐射的激光
    • US5761236A
    • 1998-06-02
    • US687793
    • 1996-07-18
    • Jurgen KleinschmidtPeter Heist
    • Jurgen KleinschmidtPeter Heist
    • H01S3/134H01S3/08H01S3/137H01S3/225
    • H01S3/08004H01S3/137H01S3/225
    • A laser, especially an excimer laser, is designed to generate narrow-band radiation and comprises a laser resonator, including two reflecting elements (12, 14) between which there is disposed a laser active medium (10), and further comprises a group of several refractive dispersive elements (32, 34) arranged in the laser beam path and each deflecting, incident light at an angle (.gamma..sub.a, .gamma..sub.b) which is specific of the wavelength of the incident light. It is provided to reduce variations of the emission wavelength which are temperature responsive and time dependent during burst operation by giving at least one of the refractive dispersive elements (32) a refractive index which increases as the temperature goes up and at least one of these elements (34) a refractive index which drops as the temperature rises.
    • 激光器,特别是准分子激光器被设计成产生窄带辐射并且包括激光谐振器,包括两个反射元件(12,14),在该激光谐振器之间设置有激光活性介质(10),并且还包括一组 布置在激光束路径中的几个折射色散元件(32,34),并且每个偏转的入射光以入射光的波长特有的角度(γa,γb)偏转。 提供了通过使折射色散元件(32)中的至少一个折射率随着温度升高而增加的这些元件中的至少一个来减少在脉冲串操作期间温度响应和时间依赖性的发射波长的变化, (34)当温度升高时降低的折射率。