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    • 1. 发明授权
    • Tunable narrowband source of a coherent radiation
    • 可调窄带源的相干辐射
    • US5663973A
    • 1997-09-02
    • US661229
    • 1996-06-10
    • Uwe StammIngo KlaftVadim BergerStefan BorneisPeter Lokai
    • Uwe StammIngo KlaftVadim BergerStefan BorneisPeter Lokai
    • G02F1/39H01S3/10
    • G02F1/39
    • A tunable narrowband source of a coherent radiation, comprisinga first optical parametric oscillator (OPO1) which includes at least one first optical parametric amplifier medium (K.sub.1) in a resonator (18, 20; 20, 34) or an optical parametric generator;at least one second optical parametric oscillator (OPO2) which includes at least one second optical parametric amplifier medium (K.sub.2) in a resonator (22, 24) and into which is coupled the output radiation (28; 28b) of the first optical parametric oscillator (OPO1);at least one third optical parametric amplifier medium (OPA) into which is coupled the output radiation (30) of the second optical parametric oscillator (OPO2); andmeans (12, 14, 16, 26) for generating and coupling the pump radiation (10, 10') into the first and second optical parametric oscillators (OPO1, OPO2) and into the third optical parametric amplifier medium OPA), whereinthe output radiation (28; 28b) of the first optical parametric oscillator (OPO1) which is coupled into the second optical parametric oscillator (OPO2) has a bandwidth which is smaller than the spacing of the only one longitudinal mode is excited and coupled into the third optical parametric amplifier medium (K.sub.3, K.sub.4) and amplified therein.
    • 包括相干辐射的可调窄带源,包括第一光参量振荡器(OPO1),其包括在谐振器(18,20; 20,34)中的至少一个第一光参量放大器介质(K1)或光参量发生器; 至少一个第二光参量振荡器(OPO2),其包括在谐振器(22,24)中的至少一个第二光参量放大器介质(K2),其中耦合到所述第一光参量振荡器的输出辐射(28; 28b) (OPO1); 至少一个第三光参量放大器介质(OPA),其耦合到所述第二光参量振荡器(OPO2)的输出辐射(30); 以及用于产生并将泵浦辐射(10,10')耦合到第一和第二光学参量振荡器(OPO1,OPO2)并进入第三光学参量放大器介质OPA的装置(12,14,16,26)),其中 耦合到第二光参量振荡器(OPO2)中的第一光参量振荡器(OPO1)的输出辐射(28; 28b)具有小于仅一个纵模的间隔的带宽被激发并耦合到第三光参参振荡器 光学参量放大器介质(K3,K4)并在其中放大。
    • 4. 发明授权
    • Very stable excimer or molecular fluorine laser
    • 非常稳定的准分子或分子氟激光
    • US06243405B1
    • 2001-06-05
    • US09484818
    • 2000-01-18
    • Stefan BorneisKlaus BrunwinkelUwe StammFrank Voss
    • Stefan BorneisKlaus BrunwinkelUwe StammFrank Voss
    • H01S322
    • G03F7/70025G03F7/70041G03F7/70575H01S3/036H01S3/134H01S3/225
    • A technique of stabalizing during operation a gas mixture with a gas composition initially provided within a discharge chamber of an excimer or molecular fluorine gas discharge laser includes monitoring a temporal pulse shape of the laser beam and adjusting and/or determining the status of the gas mixture based on the monitored temporal pulse shape. The monitored temporal pulse shape is preferably compared with a reference temporal pulse shape. The difference or deviation between the monitored temporal pulse shape and a reference temporal pulse shape is calculated. The amount of and intervals between gas replenishment actions are determined based on the calculated deviation. The energy of the beam is also monitored and the driving voltage and gas actions are adjusted to stabilize the energy, energy stability and/or energy dose.
    • 在操作期间稳定化技术,其中最初设置在准分子或分子氟气放电激光器的放电室内的气体组成的气体混合物包括监测激光束的时间脉冲形状并调节和/或确定气体混合物的状态 基于监视的时间脉冲形状。 所监视的时间脉冲形状优选地与参考时间脉冲形状进行比较。 计算所监视的时间脉冲形状与参考时间脉冲形状之间的差异或偏差。 基于计算的偏差来确定补充气体动作的量和间隔。 还监测光束的能量,并且调节驱动电压和气体动作以稳定能量,能量稳定性和/或能量剂量。