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    • 1. 发明授权
    • Laser for generating narrow-band radiation
    • 用于产生窄带辐射的激光
    • US5761236A
    • 1998-06-02
    • US687793
    • 1996-07-18
    • Jurgen KleinschmidtPeter Heist
    • Jurgen KleinschmidtPeter Heist
    • H01S3/134H01S3/08H01S3/137H01S3/225
    • H01S3/08004H01S3/137H01S3/225
    • A laser, especially an excimer laser, is designed to generate narrow-band radiation and comprises a laser resonator, including two reflecting elements (12, 14) between which there is disposed a laser active medium (10), and further comprises a group of several refractive dispersive elements (32, 34) arranged in the laser beam path and each deflecting, incident light at an angle (.gamma..sub.a, .gamma..sub.b) which is specific of the wavelength of the incident light. It is provided to reduce variations of the emission wavelength which are temperature responsive and time dependent during burst operation by giving at least one of the refractive dispersive elements (32) a refractive index which increases as the temperature goes up and at least one of these elements (34) a refractive index which drops as the temperature rises.
    • 激光器,特别是准分子激光器被设计成产生窄带辐射并且包括激光谐振器,包括两个反射元件(12,14),在该激光谐振器之间设置有激光活性介质(10),并且还包括一组 布置在激光束路径中的几个折射色散元件(32,34),并且每个偏转的入射光以入射光的波长特有的角度(γa,γb)偏转。 提供了通过使折射色散元件(32)中的至少一个折射率随着温度升高而增加的这些元件中的至少一个来减少在脉冲串操作期间温度响应和时间依赖性的发射波长的变化, (34)当温度升高时降低的折射率。
    • 2. 发明授权
    • Wavelength calibration tool for narrow band excimer lasers
    • 窄带准分子激光器的波长校准工具
    • US6160831A
    • 2000-12-12
    • US271020
    • 1999-03-17
    • Jurgen KleinschmidtHans-Stephan AlbrechtPeter Heist
    • Jurgen KleinschmidtHans-Stephan AlbrechtPeter Heist
    • H01S3/225G01J9/00H01S3/00H01S3/137H01S3/22
    • G01J9/00
    • An excimer laser system having a precisely calibratable absolute emission wavelength is provided wherein at least one source of reference light is used. The reference light may be a laser such as a HeNe laser or a cathode lamp such as a hollow Pt, As, C, or Fe cathode lamp. The reference light and the excimer laser beam are directed along substantially the same optical path. The beams are broadened and recollimated by beam expanding optics. The broadened beams impinge upon a dispersive element, preferably an echelle grating, and various orders for each incident wavelength are dispersed. The beams are refocused onto a position sensitive detector such as a CCD camera. Different orders of one or more lines of known wavelength of the reference light and a line from the excimer laser emission are also incident at the detector simultaneously. An absolute wavelength calibration of the excimer laser emission is precisely determinable based on a position of said excimer laser emission relative to positions of the one or more lines of the reference light at the detector. The grating constant of the preferred grating and the detector are such that calibration of the central wavelength of the narrowed excimer laser emission is performable when the central wavelength is anywhere within the broadband emission spectrum of the excimer laser. A processor calculates the absolute wavelength of the excimer laser emission. Embodiments are provided for refractive optic, catadioptric, and reflective imaging systems.
    • 提供具有精确可校准的绝对发射波长的准分子激光系统,其中使用至少一个参考光源。 参考光可以是诸如HeNe激光器的激光器或诸如中空Pt,As,C或Fe阴极灯的阴极灯。 参考光和准分子激光束沿着基本上相同的光路被引导。 光束通过光束扩展光学器件变宽和重新准直。 扩大的光束撞击在色散元件上,优选地是一个电子琴格栅,并且各个入射波长的各种顺序被分散。 光束被重新聚焦到诸如CCD相机的位置敏感检测器上。 参考光的已知波长的一条或多条线和来自准分子激光发射的线的不同阶数也同时入射到检测器。 准分子激光发射的绝对波长校准可以基于所述准分子激光发射相对于检测器上参考光的一行或多行的位置的位置来精确地确定。 优选光栅和检测器的光栅常数使得当中心波长在准分子激光器的宽带发射光谱内的任何位置时,可以对变窄的准分子激光器发射的中心波长进行校准。 处理器计算准分子激光器发射的绝对波长。 为折射光学,反射折射和反射成像系统提供实施例。
    • 8. 发明授权
    • Arrangement for connecting a metal pipe to a receiving sleeve
    • 用于将金属管连接到接收套筒的布置
    • US5857718A
    • 1999-01-12
    • US737397
    • 1996-11-08
    • Jurgen Kleinschmidt
    • Jurgen Kleinschmidt
    • F16L37/14F16L37/12
    • F16L37/144
    • An arrangement for tightly connecting a metal pipe to a receiving sleeve includes a plug-in sleeve of metal fastened on the metal pipe, wherein the plug-in sleeve has radial projections engaging in two diametrically oppositely located grooves of the receiving sleeve, wherein the grooves terminate at the end face of the receiving sleeve. A U-shaped clamp is inserted in tangential slots of the receiving sleeve and the plug-in sleeve for coupling the sleeves to each other detachably but rigidly against pulling and pushing forces. The plug-in sleeve has a cylindrical fixing portion, a cylindrical coupling portion with greater inner and outer diameter than the fixing portion, and a conically-shaped transition portion integrally connecting the transition portion and the coupling portion. The radial projections are substantially axially oriented tongues cut out of the coupling portion and extending at an angle relative to the coupling portion.
    • PCT No.PCT / DE96 / 00811 Sec。 371日期:1996年11月8日 102(e)1996年11月8日PCT PCT 1996年5月10日PCT公布。 公开号WO96 / 35901 日期:1996年11月14日金属管与接收套筒的紧密连接的装置包括紧固在金属管上的金属插入式套筒,其中插入式套管具有接合在接收器的两个直径相对定位的凹槽中的径向突起 套筒,其中凹槽终止在接收套筒的端面。 U形夹具插入接收套筒和插入式套筒的切槽中,用于将套筒彼此可拆卸地连接,但是刚性地抵抗拉力和推力。 插入式套筒具有圆柱形固定部分,具有比固定部分更大的内径和外径的圆柱形联接部分和一体地连接过渡部分和联接部分的圆锥形过渡部分。 径向突起是从联接部分切出并且相对于联接部分以一定角度延伸的大致轴向取向的舌片。