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    • 1. 发明申请
    • ANTIFUSE OTP MEMORY CELL WITH PERFORMANCE IMPROVEMENT PREVENTION AND OPERATING METHOD OF MEMORY
    • 具有性能改进的防毒OTP存储器单元内存的预防和操作方法
    • US20140098591A1
    • 2014-04-10
    • US14101367
    • 2013-12-10
    • eMemory Technology Inc.
    • Chin-Yi ChenLun-Chun ChenYueh-Chia WenMeng-Yi WuHsin-Ming Chen
    • G11C17/16
    • G11C17/16G11C17/18H01L23/5252H01L27/11206H01L2924/0002H01L2924/00
    • Provided is an OTP memory cell including a first antifuse unit, a second antifuse unit, a select transistor, and a well region. The first and the second antifuse unit respectively include an antifuse layer and an antifuse gate disposed on a substrate in sequence. The select transistor includes a select gate, a gate dielectric layer, a first doped region, and a second doped region. The select gate is disposed on the substrate. The gate dielectric layer is disposed between the select gate and the substrate. The first and the second doped region are respectively disposed in the substrate at two sides of the select gate, wherein the second doped region is disposed in the substrate at the periphery of the first and the second antifuse unit. The well region is disposed in the substrate below the first and the second antifuse unit and is connected to the second doped region.
    • 提供了包括第一反熔丝单元,第二反熔丝单元,选择晶体管和阱区的OTP存储单元。 第一和第二反熔丝单元分别包括依次设置在基板上的反熔丝层和反熔丝。 选择晶体管包括选择栅极,栅极电介质层,第一掺杂区域和第二掺杂区域。 选择栅极设置在基板上。 栅介质层设置在选择栅极和衬底之间。 第一掺杂区域和第二掺杂区域分别设置在选择栅极两侧的衬底中,其中第二掺杂区域设置在第一和第二反熔丝单元的周边处的衬底中。 阱区设置在第一和第二反熔丝单元下方的衬底中,并连接到第二掺杂区。