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1. 发明授权

US07572499B2 Contact magnetic transfer template 失效
标题翻译：接触磁性传递模板
公开(公告)号：US07572499B2
公开(公告)日：2009-08-11
申请号：US11044777
申请日：2005-01-26
申请人： Zvonimir Z. Bandic , A. David Erpelding , Jordan Asher Katine , Quang Le , Kim Y. Lee , Jui-Lung Li , Michael J. Rooks
发明人： Zvonimir Z. Bandic , A. David Erpelding , Jordan Asher Katine , Quang Le , Kim Y. Lee , Jui-Lung Li , Michael J. Rooks
IPC分类号： G11B5/64 , G11B5/66 , G11B5/65 , G11B5/86
CPC分类号： G11B5/865 , G11B5/855 , Y10T428/24612
摘要： A contact magnetic transfer (CMT) master template has a flexible plastic film with a planarized top or upper surface containing magnetic islands separated from one another by nonmagnetic regions. The flexible plastic film is secured at its perimeter to a silicon annulus that provides rigid support at the perimeter of the film. The plastic film is preferably polyimide that has recesses filled with the magnetic material that form the pattern of magnetic islands. The upper surfaces of the islands and the upper surfaces of the nonmagnetic regions form a continuous planar surface. The nonmagnetic regions are formed of chemical-mechanical-polishing (CMP) stop layer material that remains after a CMP process has planarized the upper surface of the plastic film.
摘要翻译：接触磁传递（CMT）主模板具有柔性塑料膜，其具有包含通过非磁性区域彼此分离的磁岛的平坦化顶部或上部表面。柔性塑料膜在其周边固定在硅环上，该硅环在膜的周边提供刚性支撑。塑料膜优选为具有填充有形成磁岛图案的磁性材料的凹部的聚酰亚胺。岛的上表面和非磁性区的上表面形成连续的平坦表面。非磁性区域由化学机械抛光（CMP）阻挡层材料形成，其在CMP工艺已经使塑料膜的上表面平坦化之后残留。

2. 发明授权

US07160477B2 Method for making a contact magnetic transfer template 失效
标题翻译：制造接触磁传输模板的方法
公开(公告)号：US07160477B2
公开(公告)日：2007-01-09
申请号：US11044288
申请日：2005-01-26
申请人： Zvonimir Z. Bandic , A. David Erpelding , Jordan Asher Katine , Quang Le , Kim Y. Lee , Jui-Lung Li , Michael J. Rooks
发明人： Zvonimir Z. Bandic , A. David Erpelding , Jordan Asher Katine , Quang Le , Kim Y. Lee , Jui-Lung Li , Michael J. Rooks
IPC分类号： B44C1/22
CPC分类号： G11B5/865 , B82Y10/00 , C23F3/04 , C23F4/00 , G11B5/72 , G11B5/743 , G11B5/82 , G11B5/855 , Y10T29/4903 , Y10T29/49032
摘要： A contact magnetic transfer (CMT) master template is made by first adhering a plastic film to a first surface of a silicon wafer. A resist pattern is then formed on the polyimide film and the polyimide is reactive-ion-etched through the resist to form recesses. The resist is removed and a chemical-mechanical-polishing (CMP) stop layer is deposited over the non-recessed regions of the polyimide, and optionally into the bottoms of the recesses. A layer of magnetic material is then deposited over the polyimide film to fill the recesses. A CMP process is then performed to remove magnetic material above the recesses and above the non-recessed regions and continued until the CMP stop layer is reached. The resulting upper surface of the polyimide film is then a continuous planar film of magnetic islands and regions of CMP stop layer material that function as the nonmagnetic regions of the template.
摘要翻译：通过首先将塑料膜粘附到硅晶片的第一表面上来制造接触磁传递（CMT）主模板。然后在聚酰亚胺膜上形成抗蚀剂图案，并通过抗蚀剂反应离子蚀刻聚酰亚胺以形成凹陷。去除抗蚀剂，并在化学机械抛光（CMP）停止层上沉积在聚酰亚胺的非凹陷区域上，并且任选地沉积到凹部的底部中。然后将一层磁性材料沉积在聚酰亚胺膜上以填充凹部。然后执行CMP处理以除去凹部上方的磁性材料并且在非凹陷区域上方并继续直到达到CMP停止层。所得到的聚酰亚胺膜的上表面是磁性岛的连续平面膜和作为模板的非磁性区域的CMP停止层材料的区域。

3. 发明授权

US07211195B2 Method for providing a liftoff process using a single layer resist and chemical mechanical polishing and sensor formed therewith 失效
标题翻译：提供使用单层抗蚀剂和化学机械抛光和传感器形成的提升工艺的方法
公开(公告)号：US07211195B2
公开(公告)日：2007-05-01
申请号：US10633765
申请日：2003-08-04
申请人： Marie-Claire Cyrille , Kim Y. Lee , Jui-Lung Li , Chun-Ming Wang
发明人： Marie-Claire Cyrille , Kim Y. Lee , Jui-Lung Li , Chun-Ming Wang
IPC分类号： B44C1/22
CPC分类号： G11B5/3906
摘要： A method for providing a liftoff process using a single layer resist and chemical mechanical polishing and sensor formed therewith are disclosed. Chemical mechanical polishing is combined with liftoff using only a single resist layer to allow the removal of leftover fencing on the side of a lifted resist pattern.
摘要翻译：公开了一种使用单层抗蚀剂提供剥离工艺的方法和由其形成的化学机械抛光和传感器。化学机械抛光与仅使用单个抗蚀剂层的剥离相结合，以允许在提升的抗蚀剂图案侧面去除剩余的栅栏。

4. 发明授权

US07186348B2 Method for fabricating a pole tip in a magnetic transducer 有权
标题翻译：在磁换能器中制造极尖的方法
公开(公告)号：US07186348B2
公开(公告)日：2007-03-06
申请号：US10882883
申请日：2004-06-30
申请人： Tsung Yuan Chen , David Patrick Druist , Quang Le , Kim Y. Lee , Chun-Ming Wang , Howard Gordon Zolla
发明人： Tsung Yuan Chen , David Patrick Druist , Quang Le , Kim Y. Lee , Chun-Ming Wang , Howard Gordon Zolla
IPC分类号： G11B5/187
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , Y10T29/49032
摘要： A method for fabricating a magnetic head with a trapezoidal shaped pole piece tip is described. The body of the main pole piece is deposited, then one or more layers for the pole piece tip are deposited. A bed material is deposited over the pole piece tip material. A void is formed in the bed material over the area for the pole piece tip. The void is filled with an ion-milling resistant material such as alumina preferably using atomic layer deposition or atomic layer chemical vapor deposition. The excess ion-milling resistant material and the bed material are removed. The result is an ion-milling mask formed over the area for the pole piece tip. Ion milling is then used to remove the unmasked material in the pole piece tip layer and to form a beveled pole piece tip and preferably a beveled face on the main pole piece.
摘要翻译：描述了制造具有梯形极片尖端的磁头的方法。沉积主极片的主体，然后沉积用于极片尖端的一个或多个层。床材料沉积在极片末端材料上。在用于极片尖端的区域上的床材料中形成空隙。空隙填充有耐离子碾磨材料，例如氧化铝，优选使用原子层沉积或原子层化学气相沉积。除去过量的抗离子碾磨材料和床料。结果是在极片尖端的区域上形成离子铣削掩模。然后使用离子铣削去除极片末端层中的未掩模材料，并且在主极片上形成斜面极片末端，并且优选地形成斜面。

5. 发明授权

US07742258B2 Magnetic transducer with milling mask 失效
标题翻译：具有铣削掩模的磁性换能器
公开(公告)号：US07742258B2
公开(公告)日：2010-06-22
申请号：US11707524
申请日：2007-02-12
申请人： Tsung Yuan Chen , David Patrick Druist , Quang Le , Kim Y. Lee , Chun-Ming Wang , Howard Gordon Zolla
发明人： Tsung Yuan Chen , David Patrick Druist , Quang Le , Kim Y. Lee , Chun-Ming Wang , Howard Gordon Zolla
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , Y10T29/49032
摘要： A method for fabricating a magnetic head with a trapezoidal shaped pole piece tip is described. The body of the main pole piece is deposited; then one or more layers for the pole piece tip are deposited. A bed material is deposited over the pole piece tip material. A void is formed in the bed material over the area for the pole piece tip. The void is filled with an ion-milling resistant material such as alumina preferably using atomic layer deposition or atomic layer chemical vapor deposition. The excess ion-milling resistant material and the bed material are removed. The result is an ion-milling mask formed over the area for the pole piece tip. Ion milling is then used to remove the unmasked material in the pole piece tip layer and to form a beveled pole piece tip and preferably a beveled face on the main pole piece.
摘要翻译：描述了制造具有梯形极片尖端的磁头的方法。主极片的主体被沉积; 然后沉积用于极片尖端的一个或多个层。床材料沉积在极片末端材料上。在用于极片尖端的区域上的床材料中形成空隙。空隙填充有耐离子碾磨材料，例如氧化铝，优选使用原子层沉积或原子层化学气相沉积。除去过量的抗离子碾磨材料和床料。结果是在极片尖端的区域上形成离子铣削掩模。然后使用离子铣削去除极片末端层中的未掩模材料，并且在主极片上形成斜面极片末端，并且优选地形成斜面。

6. 发明授权

US07716813B2 Method for fabricating magnetic write pole for a magnetic head using an E-beam resist mask 有权
标题翻译：使用电子束抗蚀剂掩模制造用于磁头的磁写磁极的方法
公开(公告)号：US07716813B2
公开(公告)日：2010-05-18
申请号：US11634667
申请日：2006-12-05
申请人： Kim Y. Lee , Jyh-Shuey Lo
发明人： Kim Y. Lee , Jyh-Shuey Lo
IPC分类号： G11B5/187 , B44C1/22
CPC分类号： G11B5/3163 , G11B5/127 , G11B5/3116 , Y10T29/49021 , Y10T29/49041 , Y10T29/49043 , Y10T29/49046 , Y10T29/49052
摘要： A method is disclosed for independently controlling track width and bevel angle of a write pole tip of a magnetic recording head. The method includes establishing the track width in the pole tip layer material utilizing E-beam lithography. A portion of this pole tip material having the established track width is protected by providing a temporary masking material to make a protected portion. At least one unprotected portion is left exposed to be shaped. This unprotected portion is then beveled to produce at least one beveled portion. The protected portion produces an upper pole tip portion which together with the beveled portion produce an improved pole tip. Also disclosed is a magnetic head having the improved pole tip, and a disk drive having a magnetic head having the improved pole tip.
摘要翻译：公开了一种用于独立地控制磁记录头的写极尖的轨道宽度和斜角的方法。该方法包括利用电子束平版印刷法在极尖层材料中建立轨道宽度。通过提供临时掩蔽材料来制造具有已建立的轨道宽度的该极尖材料的一部分，以形成受保护的部分。至少一个未保护的部分被暴露以成形。然后将该未保护部分倾斜以产生至少一个倾斜部分。受保护部分产生上极尖部分，其与斜面部分一起产生改进的极尖。还公开了具有改进的极尖的磁头和具有具有改进的极尖的磁头的磁盘驱动器。

7. 发明授权

US07536774B2 Method and apparatus for integrating a stair notch and a gap bump at a pole tip in a write head 失效
标题翻译：用于将台阶缺口和间隙凸起集成在写头中的极尖处的方法和装置
公开(公告)号：US07536774B2
公开(公告)日：2009-05-26
申请号：US11399821
申请日：2006-04-07
申请人： Daniel Wayne Bedell , Wen-Chien David Hsiao , Ming Jiang , Hieu Lam , Kim Y. Lee , Jyh-Shuey Lo , Aron Pentek
发明人： Daniel Wayne Bedell , Wen-Chien David Hsiao , Ming Jiang , Hieu Lam , Kim Y. Lee , Jyh-Shuey Lo , Aron Pentek
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , Y10T29/49043
摘要： A method and apparatus for integrating a stair notch and a gap bump at a pole tip in a write head is disclosed. A protective plated layer is formed over the bump to prevent the bump form being damaged during formation of the notch at the pole tip. The flux from the second pole outside of the track will be effectively channeled to the first pole piece under the alumina bump.
摘要翻译：公开了一种用于将写入头中的极尖处的台阶缺口和间隙凸起集成的方法和装置。在凸起之上形成保护镀层，以防止在极尖处形成凹口期间凸起形状被损坏。来自轨道外部的第二极的磁通将有效地引导到氧化铝凸块下方的第一极靴。

8. 发明申请

US20080127481A1 Method for fabricating magnetic write pole for a magnetic head using an E-beam resist mask 有权
标题翻译：使用电子束抗蚀剂掩模制造用于磁头的磁写磁极的方法
公开(公告)号：US20080127481A1
公开(公告)日：2008-06-05
申请号：US11634667
申请日：2006-12-05
申请人： Kim Y. Lee , Jyh-Shuey Lo
发明人： Kim Y. Lee , Jyh-Shuey Lo
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/127 , G11B5/3116 , Y10T29/49021 , Y10T29/49041 , Y10T29/49043 , Y10T29/49046 , Y10T29/49052
摘要： A method is disclosed for independently controlling track width and bevel angle of a write pole tip of a magnetic recording head. The method includes establishing the track width in the pole tip layer material utilizing E-beam lithography. A portion of this pole tip material having the established track width is protected by providing a temporary masking material to make a protected portion. At least one unprotected portion is left exposed to be shaped. This unprotected portion is then beveled to produce at least one beveled portion. The protected portion produces an upper pole tip portion which together with the beveled portion produce an improved pole tip. Also disclosed is a magnetic head having the improved pole tip, and a disk drive having a magnetic head having the improved pole tip.
摘要翻译：公开了一种用于独立地控制磁记录头的写极尖的轨道宽度和斜角的方法。该方法包括利用电子束平版印刷法在极尖层材料中建立轨道宽度。通过提供临时掩蔽材料来制造具有已建立的轨道宽度的该极尖材料的一部分，以形成受保护的部分。至少一个未保护的部分被暴露以成形。然后将该未保护部分倾斜以产生至少一个倾斜部分。受保护部分产生上极尖部分，其与斜面部分一起产生改进的极尖。还公开了具有改进的极尖的磁头和具有具有改进的极尖的磁头的磁盘驱动器。

9. 发明申请

US20080093336A1 Process for fabricating patterned magnetic recording media 有权
标题翻译：制造图案化磁记录介质的方法
公开(公告)号：US20080093336A1
公开(公告)日：2008-04-24
申请号：US11583845
申请日：2006-10-20
申请人： Kim Y. Lee , Hong Ying Wang , Nobuo Kurataka , Christopher Formato , David S. Kuo , Dieter K. Weller
发明人： Kim Y. Lee , Hong Ying Wang , Nobuo Kurataka , Christopher Formato , David S. Kuo , Dieter K. Weller
IPC分类号： B44C1/22 , C03C25/68
CPC分类号： G11B5/855 , G11B5/667 , G11B5/732
摘要： A method of fabricating a patterned magnetic recording medium, comprises steps of: (a) providing a layer stack including an uppermost non-magnetic interlayer; (b) forming a resist layer on the interlayer; (c) forming a first pattern comprising a first group of recesses extending through the resist layer and exposing a first group of spaced apart surface portions of the interlayer; (d) filling the first group of recesses with a layer of a hard mask material; (e) selectively removing the resist layer to form a second pattern comprising a second group of recesses extending through the hard mask layer and exposing a second group of spaced apart surface portions of the interlayer; and (f) filling the second group of recesses with a layer of a magnetically hard material forming a magnetic recording layer.
摘要翻译：一种制造图案化磁记录介质的方法，包括以下步骤：（a）提供包括最上面的非磁性中间层的层堆叠; （b）在所述中间层上形成抗蚀剂层; （c）形成第一图案，其包括延伸穿过抗蚀剂层的第一组凹槽，并暴露出中间层的第一组间隔开的表面部分; （d）用一层硬掩模材料填充第一组凹槽; （e）选择性地去除所述抗蚀剂层以形成第二图案，所述第二图案包括延伸穿过所述硬掩模层并暴露所述中间层的第二组间隔开的表面部分的第二组凹部; 和（f）用形成磁记录层的磁性硬质材料层填充第二组凹部。

10. 发明申请

US20080085362A1 Method for fabricating patterned perpendicular magnetic recording media 有权
标题翻译：图案化垂直磁记录介质的制造方法
公开(公告)号：US20080085362A1
公开(公告)日：2008-04-10
申请号：US11542129
申请日：2006-10-04
申请人： Bing K. Yen , David S. Kuo , Dieter K. Weller , Kim Y. Lee , Koichi Wago
发明人： Bing K. Yen , David S. Kuo , Dieter K. Weller , Kim Y. Lee , Koichi Wago
IPC分类号： B05D5/12 , B05D1/32
CPC分类号： G11B5/732 , G11B5/656 , G11B5/7325 , G11B5/855
摘要： A method of fabricating a patterned perpendicular magnetic recording medium comprises steps of: (a) providing a layer stack including a magnetically soft underlayer (“SUL”) and an overlying non-magnetic interlayer; (b) forming a masking layer on the non-magnetic interlayer; (c) forming a resist layer on the masking layer; (d) forming a pattern of recesses extending through the resist layer and exposing spaced apart surface portions of the masking layer; (e) extending the pattern of recesses through the masking layer to expose spaced apart surface portions of the interlayer; and (f) at least partially filling the pattern of recesses with a magnetically hard material to form a perpendicular magnetic recording layer.
摘要翻译：制造图案化的垂直磁记录介质的方法包括以下步骤：（a）提供包括磁软底层（“SUL”）和上覆非磁性中间层的层堆叠; （b）在非磁性中间层上形成掩模层; （c）在掩模层上形成抗蚀剂层; （d）形成延伸穿过抗蚀剂层并露出掩模层的间隔开的表面部分的凹陷图案; （e）将凹槽的图案延伸穿过掩模层以暴露中间层的间隔开的表面部分; 和（f）至少部分地用磁性硬的材料填充凹槽的图案以形成垂直的磁记录层。

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