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1. 发明授权

US09284649B2 Method of patterning a stack 有权
标题翻译：堆叠图案的方法
公开(公告)号：US09284649B2
公开(公告)日：2016-03-15
申请号：US13173906
申请日：2011-06-30
申请人： Michael R. Feldbaum , Justin Jia-Jen Hwu , David S. Kuo , Gennady Gauzner , Kim Yang Lee , Li-Ping Wang
发明人： Michael R. Feldbaum , Justin Jia-Jen Hwu , David S. Kuo , Gennady Gauzner , Kim Yang Lee , Li-Ping Wang
IPC分类号： B32B9/00 , C23F4/00 , G03F7/00 , G11B5/855 , B82Y10/00 , B82Y40/00
CPC分类号： C23F4/00 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G11B5/855 , Y10T428/265
摘要： The embodiments disclose a method of fabricating a stack, including replacing a metal layer of a stack imprint structure with an oxide layer, patterning the oxide layer stack using chemical etch processes to transfer the pattern image and cleaning etch residue from the stack imprint structure to substantially prevent contamination of the metal layers.
摘要翻译：实施方案公开了一种制造叠层的方法，包括用氧化物层代替堆叠印记结构的金属层，使用化学蚀刻工艺对氧化物层堆叠进行图案化以将图案图像转移并将蚀刻残留物从堆叠印记结构清洗到基本上防止金属层的污染。

2. 发明授权

US08395984B2 Multilevel data structure 有权
标题翻译：多级数据结构
公开(公告)号：US08395984B2
公开(公告)日：2013-03-12
申请号：US12938233
申请日：2010-11-02
申请人： Duane C. Karns , Dieter K. Weller , William A. Challener , Edward Gage , David S. Kuo , Neil Deeman , Shih-Fu Lee , Koichi Wage
发明人： Duane C. Karns , Dieter K. Weller , William A. Challener , Edward Gage , David S. Kuo , Neil Deeman , Shih-Fu Lee , Koichi Wage
IPC分类号： G11B7/00
CPC分类号： G11B7/24088 , G11B7/0045 , G11B7/08547 , G11B7/1362
摘要： A method of performing writable optical recording of a medium to form multilevel oriented nano-structures therein, comprises steps of providing a disc-shaped, writable recording medium having a planar surface; and encoding data/information in the medium by forming a plurality of multilevel nano-structured pits in the surface by scanning with a focused spot of optical energy to form at least one data track therein, including scanning the optical spot in a cross-track direction while rotating the disc about a central axis.
摘要翻译：一种执行介质的可写光学记录以在其中形成多层次取向的纳米结构的方法，包括提供具有平坦表面的盘形可写记录介质的步骤; 以及通过用聚焦的光能点扫描在表面中形成多个多层纳米结构的凹坑来形成介质中的数据/信息，以在其中形成至少一个数据轨迹，包括沿横向方向扫描光点同时围绕中心轴旋转盘。

3. 发明申请

US20100119778A1 ULTRA THIN ALIGNMENT WALLS FOR DI-BLOCK COPOLYMER 失效
标题翻译：用于双嵌段共聚物的超薄对准壁
公开(公告)号：US20100119778A1
公开(公告)日：2010-05-13
申请号：US12270511
申请日：2008-11-13
申请人： Kim Yang Lee , David S. Kuo , Dorothea Buechel , Kalman Pelhos
发明人： Kim Yang Lee , David S. Kuo , Dorothea Buechel , Kalman Pelhos
IPC分类号： B32B3/30 , B44C1/22
CPC分类号： G11B5/855 , B81C1/00111 , B81C2201/0154 , B81C2201/038 , Y10T428/2457 , Y10T428/26
摘要： Methods comprising providing a pre-patterned substrate having an array of thick walls, depositing a conforming layer on the pre-patterned substrate, etching the conforming layer from the top of the thick walls and the space between the walls, and etching the thick walls while leaving thin walls of conforming layer.
摘要翻译：方法包括提供具有厚壁阵列的预图案化衬底，在预图案化衬底上沉积合适层，从厚壁的顶部和壁之间的空间蚀刻适形层，并蚀刻厚壁，同时留下薄壁的合格层。

4. 发明授权

US07704614B2 Process for fabricating patterned magnetic recording media 有权
标题翻译：制造图案化磁记录介质的方法
公开(公告)号：US07704614B2
公开(公告)日：2010-04-27
申请号：US11583845
申请日：2006-10-20
申请人： Kim Y. Lee , Hong Ying Wang , Nobuo Kurataka , Christopher Formato , David S. Kuo , Dieter K. Weller
发明人： Kim Y. Lee , Hong Ying Wang , Nobuo Kurataka , Christopher Formato , David S. Kuo , Dieter K. Weller
IPC分类号： G11B5/66
CPC分类号： G11B5/855 , G11B5/667 , G11B5/732
摘要： A method of fabricating a patterned magnetic recording medium, comprises steps of: (a) providing a layer stack including an uppermost non-magnetic interlayer; (b) forming a resist layer on the interlayer; (c) forming a first pattern comprising a first group of recesses extending through the resist layer and exposing a first group of spaced apart surface portions of the interlayer; (d) filling the first group of recesses with a layer of a hard mask material; (e) selectively removing the resist layer to form a second pattern comprising a second group of recesses extending through the hard mask layer and exposing a second group of spaced apart surface portions of the interlayer; and (f) filling the second group of recesses with a layer of a magnetically hard material forming a magnetic recording layer.
摘要翻译：一种制造图案化磁记录介质的方法，包括以下步骤：（a）提供包括最上面的非磁性中间层的层堆叠; （b）在所述中间层上形成抗蚀剂层; （c）形成第一图案，其包括延伸穿过抗蚀剂层的第一组凹槽，并暴露出中间层的第一组间隔开的表面部分; （d）用一层硬掩模材料填充第一组凹槽; （e）选择性地去除所述抗蚀剂层以形成第二图案，所述第二图案包括延伸穿过所述硬掩模层并暴露所述中间层的第二组间隔开的表面部分的第二组凹部; 和（f）用形成磁记录层的磁性硬质材料层填充第二组凹部。

5. 发明申请

US20100039727A1 E-BEAM WRITE FOR HIGH-PRECISION DOT PLACEMENT 有权
标题翻译：电子束写入高精度放样
公开(公告)号：US20100039727A1
公开(公告)日：2010-02-18
申请号：US12192338
申请日：2008-08-15
申请人： David S. Kuo , Kim Y. Lee
发明人： David S. Kuo , Kim Y. Lee
IPC分类号： G11B5/596
CPC分类号： G11B5/02 , B82Y10/00 , G11B5/743 , G11B5/746 , G11B2005/0005
摘要： A recording system for magnetic storage devices, including a beam column for generating a beam, a platform for moving a magnetic storage medium relative to the beam, and a signal generator for sequentially, or in a continuously alternating manner, deflecting the beam. In turn, the beam is directed according to displacement of dots on the extent of the magnetic storage medium such that dots of a plurality of dot groupings can be written to on the extent during a single pass of the beam column above the extent.
摘要翻译：用于磁存储装置的记录系统，包括用于产生光束的光束柱，用于相对于光束移动磁存储介质的平台以及用于顺序地或以连续交替的方式偏转光束的信号发生器。反过来，光束根据磁存储介质的范围上的点的位移被引导，使得多个点分组的点可以在光束柱的单次通过高于该范围的程度上被写入。

6. 发明申请

US20080113157A1 Method for fabricating master stamper/imprinters for patterned recording media utilizing hybrid resist 审中-公开
标题翻译：使用混合抗蚀剂制造图案化记录介质的主压模/打印机的方法
公开(公告)号：US20080113157A1
公开(公告)日：2008-05-15
申请号：US11595894
申请日：2006-11-13
申请人： Kim Y. Lee , Hong Ying Wang , Shih-Fu Lee , David S. Kuo , Koichi Wago , Dieter K. Weller
发明人： Kim Y. Lee , Hong Ying Wang , Shih-Fu Lee , David S. Kuo , Koichi Wago , Dieter K. Weller
IPC分类号： G03F7/00 , B32B3/00
CPC分类号： G03F7/095 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/0017 , Y10T428/24355
摘要： A method of fabricating a master stamper/imprinter for manufacturing a patterned recording medium by nano-imprint lithography comprises steps of: (a) providing a substrate having a surface; (b) forming a layer of a hybrid resist material on the surface, the resist layer having an exposed upper surface; (c) subjecting selected areas of the exposed upper surface of the resist layer to an energy beam to form therein a latent image of a topographical pattern to be formed in the resist layer and having a correspondence to a pattern to be formed in a patterned recording medium; and (d) developing the latent image into the topographical pattern in the resist layer, wherein only those areas of the resist layer which have received an energy beam exposure dose between a positive-tone threshold dose D0p and a negative-tone threshold dose D0n are developed.
摘要翻译：制造用于通过纳米压印光刻制造图案化记录介质的主压模/印刷机的方法包括以下步骤：（a）提供具有表面的基板; （b）在所述表面上形成混合抗蚀剂材料层，所述抗蚀剂层具有暴露的上表面; （c）使抗蚀剂层的暴露的上表面的选定区域能量束在其中形成要在抗蚀剂层中形成的形貌图案的潜像，并且与图案化记录中形成的图案对应中; 并且（d）将潜像显影成抗蚀剂层中的形貌图案，其中只有已经接收了能量束曝光的抗蚀剂层的那些区域剂量在正音阈值剂量D 0 P 0和开发出负色调阈值剂量D 0n 。

7. 发明授权

US06898037B2 Optical equipment assemblies and techniques 失效
标题翻译：光学设备组件和技术
公开(公告)号：US06898037B2
公开(公告)日：2005-05-24
申请号：US09996551
申请日：2001-11-27
申请人： Joseph Leigh , David S. Kuo
发明人： Joseph Leigh , David S. Kuo
IPC分类号： G01Q60/00 , G11B5/60 , G11B5/02
CPC分类号： G11B5/6005 , Y10S977/868
摘要： A method and apparatus for detecting a topographic feature on a media is described. More particularly, a light scatter detector is coupled to an atomic force microscope. The detector is used detect scattered optical energy reflected from the surface of the media to identify the topographic feature. The atomic force microscope may then be positioned in response to the topographic feature identified.
摘要翻译：描述了用于检测介质上的地形特征的方法和装置。更具体地，光散射检测器耦合到原子力显微镜。检测器用于检测从介质表面反射的散射光能，以识别地形特征。然后可以响应于所标识的地形特征来定位原子力显微镜。

8. 发明授权

US06356401B1 Method and apparatus for forming accurate optical clock patterns 失效
标题翻译：用于形成精确光时钟模式的方法和装置
公开(公告)号：US06356401B1
公开(公告)日：2002-03-12
申请号：US09120707
申请日：1998-07-22
申请人： Charles A. Bates , Lawrence M. Bryant , David S. Kuo , Eric G. Rawson
发明人： Charles A. Bates , Lawrence M. Bryant , David S. Kuo , Eric G. Rawson
IPC分类号： G11B509
CPC分类号： B82Y10/00 , G11B5/012 , G11B5/59633 , G11B5/59677 , G11B5/59688 , G11B5/60 , G11B5/743 , G11B5/82
摘要： The present invention is used to form precise, optically detectable patterns on rotating members of a disk and spindle assembly of a disk drive used in data storage system. In particular, the invention employs an optical source to form optically detectable patterns on the rotating members of the disk drive. These optically detectable patterns are used to create an accurate clock track. The clock track may be used to create multiple accurate magnetic patterns on one or more disks attached to a disk and spindle assembly in a magnetic data storage system. By successively changing the radius at which the magnetic patterns are created it is then possible to create multiple magnetic patterns at successive radii with all such magnetic patterns having a precise geometric relationship to each other. Alternatively, the accurate clock pattern may stand alone as an encoder. Additionally, the present invention may also be used to form textured surfaces on a disk to control the flying characteristics of a magnetic head slider assembly. The present invention can also create textured surfaces which will serve as a resting area for the magnetic head slider assembly of a magnetic disk drive when the disk is not spinning.
摘要翻译：本发明用于在数据存储系统中使用的磁盘驱动器的盘和主轴组件的旋转构件上形成精确的光学可检测图案。特别地，本发明采用光源来在盘驱动器的旋转构件上形成光学上可检测的图案。这些可光学检测的图案用于创建精确的时钟轨迹。时钟轨道可以用于在附接到磁数据存储系统中的盘和主轴组件的一个或多个盘上创建多个精确的磁图案。通过依次改变产生磁图案的半径，则可以在连续半径处产生多个磁图案，所有这些磁图案彼此之间具有精确的几何关系。或者，精确的时钟模式可以独立地作为编码器。另外，本发明还可用于在盘上形成纹理表面以控制磁头滑块组件的飞行特性。本发明还可以产生纹理表面，当盘不旋转时，其将用作磁盘驱动器的磁头滑块组件的静止区域。

9. 发明授权

US06187413B1 Media landing zone with recess for texturing features 失效
标题翻译：带凹槽的媒体着陆区，用于纹理特征
公开(公告)号：US06187413B1
公开(公告)日：2001-02-13
申请号：US09205927
申请日：1998-12-04
申请人： David S. Kuo , Li-Ping Wang , Wei H. Yao
发明人： David S. Kuo , Li-Ping Wang , Wei H. Yao
IPC分类号： G11B582
CPC分类号： G11B5/7315 , G11B5/74 , G11B5/82 , G11B23/0021 , Y10S428/90 , Y10T428/24355 , Y10T428/24802
摘要： A magnetic data storage medium includes a dedicated transducing head contact zone for engaging an air bearing slider, primarily when the disk is stationary and also during disk accelerations and decelerations. The contact zone has a dual baseline texture, formed by first creating a recessed region within the transducing head contact zone, and then by forming multiple nodules or other texturing features within the recessed region. The texturing features project upwardly from a recessed surface of the recessed region, and also project above an upper surface of the disk by an amount less than the texturing feature height. Consequently, the texturing features are large enough to counteract stiction due to liquid lubricant meniscus formation, yet also have heights sufficiently low relative to the upper surface to allow reduced transducer flying heights. According to a preferred texturing process, the recessed region consists of multiple individual recesses produced by applying a carbon layer to the disk, then forming cavities by selective laser ablation of the carbon layer.
摘要翻译：磁数据存储介质包括用于接合空气轴承滑块的专用换能头接触区，主要是当盘静止时以及在盘的加速和减速期间。接触区域具有双基线纹理，首先在传感头接触区域内形成凹陷区域，然后通过在凹陷区域内形成多个结节或其它纹理特征而形成。纹理特征从凹陷区域的凹陷表面向上突出，并且还以小于纹理特征高度的量突出在盘的上表面上方。因此，纹理特征足够大以抵消由于液体润滑剂弯液面形成导致的静摩擦，而且还具有相对于上表面足够低的高度，以允许减小的换能器飞行高度。根据优选的纹理化工艺，凹陷区域由通过将碳层施加到盘而产生的多个单独凹槽，然后通过碳层的选择性激光烧蚀形成空腔。

10. 发明申请

US20110128647A1 METHOD OF DISK ALIGNMENT USING PRINTED ALIGNMENT MARKS 有权
标题翻译：使用打印对齐标记进行磁盘对准的方法
公开(公告)号：US20110128647A1
公开(公告)日：2011-06-02
申请号：US12629791
申请日：2009-12-02
申请人： Gennady Gauzner , David S. Kuo , Justin Jia-Jen Hwu , Li-Ping Wang , Zhaoning Yu , Kim Yang Lee
发明人： Gennady Gauzner , David S. Kuo , Justin Jia-Jen Hwu , Li-Ping Wang , Zhaoning Yu , Kim Yang Lee
IPC分类号： G11B21/02 , G11B5/82 , G11B33/00 , G11B33/10
CPC分类号： G11B25/043 , B82Y10/00 , G11B5/743 , G11B5/746 , G11B5/82 , G11B5/855 , Y10T29/49021
摘要： Processes include aligning a disc with a template at a location so that the pattern from the template is transferred to the disc in a relative orientation. The relative orientation provides that when the disc with the transferred pattern is finally assembled into a hard disc drive, an inner diameter of the spindle hole of the disc may be abutted against an outer diameter of the disc drive spindle, and the data-containing patterns on the discs will be aligned concentrically with a center of the disc drive spindle. While the data-containing patterns are aligned concentrically with the disc drive spindle, the substrate itself is allowed to be non-concentric. Still other aspects include a disc having eccentric formations including PIM and one or more of bit patterns and servo information formed on a disc surface, the eccentricity of the formations is determined based on an expected difference between the radius of the spindle hole of the disc and the radius of the spindle on which the disc will be placed during assembly, with the PIM used to determine the angular alignment of the disc with the spindle.
摘要翻译：过程包括将光盘与模板在一个位置对齐，使得来自模板的图案以相对方向被传送到光盘。相对方向规定，当具有转印图案的光盘最终组装成硬盘驱动器时，盘的主轴孔的内径可以抵靠盘驱动主轴的外径，并且包含数据的图案碟盘将与盘片驱动主轴的中心同心对齐。当包含数据的图案与盘驱动器心轴同心对准时，衬底本身被允许为非同心的。其它方面还包括具有包括PIM和形成在盘表面上的位图形和伺服信息中的一种或多种的偏心构造的盘，基于盘的主轴孔的半径和在组装过程中将放置光盘的主轴的半径，PIM用于确定光盘与主轴的角度对齐。

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