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1. 发明申请

US20080109755A1 Scanning electron microscope with measurement function 审中-公开
标题翻译：扫描电子显微镜具有测量功能
公开(公告)号：US20080109755A1
公开(公告)日：2008-05-08
申请号：US11953777
申请日：2007-12-10
申请人： Yuuki Ojima , Katsuhiro Sasada , Kazuhiro Ueda , Tsuyoshi Morimoto
发明人： Yuuki Ojima , Katsuhiro Sasada , Kazuhiro Ueda , Tsuyoshi Morimoto
IPC分类号： G06F3/048
CPC分类号： H01J37/265 , G01N23/2251 , H01J37/28 , H01J2237/221 , H01J2237/2816 , H01J2237/2817
摘要： A scanning electron microscope which efficiently makes measurements for plural measurement items at a time and allows easy entry, confirmation and revision of auto measurement parameters. Parameters for creation of a line profile from an image captured by the scanning electron microscope are entered as auto measurement parameters (AMP) to be used as common conditions for all measurement items. Also, plural combinations of edge detection methods and measurement calculation methods are entered as auto measurement parameters to make measurements for plural items.
摘要翻译：一种扫描电子显微镜，可以一次有效地进行多个测量项目的测量，并可以方便地进入，确认和修改自动测量参数。从扫描电子显微镜拍摄的图像中创建线轮廓的参数作为自动测量参数（AMP）输入，用作所有测量项目的常用条件。此外，边缘检测方法和测量计算方法的多个组合被输入作为自动测量参数以对多个项进行测量。

2. 发明申请

US20060219917A1 Scanning electron microscope with measurement function 审中-公开
公开(公告)号：US20060219917A1
公开(公告)日：2006-10-05
申请号：US11398522
申请日：2006-04-06
申请人： Yuuki Ojima , Katsuhiro Sasada , Kazuhiro Ueda , Tsuyoshi Morimoto
发明人： Yuuki Ojima , Katsuhiro Sasada , Kazuhiro Ueda , Tsuyoshi Morimoto
IPC分类号： G21K7/00 , G01N23/00
CPC分类号： H01J37/265 , G01N23/2251 , H01J37/28 , H01J2237/221 , H01J2237/2816 , H01J2237/2817
摘要： A scanning electron microscope which efficiently makes measurements for plural measurement items at a time and allows easy entry, confirmation and revision of auto measurement parameters. Parameters for creation of a line profile from an image captured by the scanning electron microscope are entered as auto measurement parameters (AMP) to be used as common conditions for all measurement items. Also, plural combinations of edge detection methods and measurement calculation methods are entered as auto measurement parameters to make measurements for plural items.

3. 发明授权

US07053371B2 Scanning electron microscope with measurement function 有权
标题翻译：扫描电子显微镜具有测量功能
公开(公告)号：US07053371B2
公开(公告)日：2006-05-30
申请号：US10779848
申请日：2004-02-18
申请人： Yuuki Ojima , Katsuhiro Sasada , Kazuhiro Ueda , Tsuyoshi Morimoto
发明人： Yuuki Ojima , Katsuhiro Sasada , Kazuhiro Ueda , Tsuyoshi Morimoto
IPC分类号： G03F7/20 , G03F7/40
CPC分类号： H01J37/265 , G01N23/2251 , H01J37/28 , H01J2237/221 , H01J2237/2816 , H01J2237/2817
摘要： A scanning electron microscope which efficiently makes measurements for plural measurement items at a time and allows easy entry, confirmation and revision of auto measurement parameters. Parameters for creation of a line profile from an image captured by the scanning electron microscope are entered as auto measurement parameters (AMP) to be used as common conditions for all measurement items. Also, plural combinations of edge detection methods and measurement calculation methods are entered as auto measurement parameters to make measurements for plural items.
摘要翻译：一种扫描电子显微镜，可以一次有效地进行多个测量项目的测量，并可以方便地进入，确认和修改自动测量参数。从扫描电子显微镜拍摄的图像中创建线轮廓的参数作为自动测量参数（AMP）输入，用作所有测量项目的常用条件。此外，边缘检测方法和测量计算方法的多个组合被输入作为自动测量参数以对多个项进行测量。

4. 发明授权

US08188427B2 Scanning electron microscope alignment method and scanning electron microscope 有权
标题翻译：扫描电子显微镜对准方法和扫描电子显微镜
公开(公告)号：US08188427B2
公开(公告)日：2012-05-29
申请号：US12182704
申请日：2008-07-30
申请人： Junichi Kakuta , Kazuhiro Ueda , Tatsuya Maeda , Hiroyuki Saito , Katsuhiro Sasada
发明人： Junichi Kakuta , Kazuhiro Ueda , Tatsuya Maeda , Hiroyuki Saito , Katsuhiro Sasada
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： G01N23/225 , H01J37/1471 , H01J37/153 , H01J37/28 , H01J2237/1501 , H01J2237/1532
摘要： A method and apparatus for alignment and astigmatism correction for a scanning electron microscope can prevent an alignment or correction error attributable to the conditions of a particular specimen. First, a difference is determined between optimal values acquired from an automatic axis alignment result on a standard sample, and those obtained from each of a plurality automatic axis alignment results on a observation target sample. An optimal value is then adjusted using the standard sample, by use of the difference thus obtained. Correspondingly, an optimal stigmator value (astigmatism correction signal) is acquired by using the standard sample, and storing the optimal stigmator value as a default value. The optimal stigmator value and the default value depending on the height of an observation target sample pattern are added, and an astigmatism correction is performed on the basis of the resultant stigmator value.
摘要翻译：用于扫描电子显微镜的对准和像散校正的方法和装置可以防止由特定样品的条件引起的对准或校正误差。首先，在从标准样品的自动轴对准结果获得的最佳值与从观察对象样本的多个自动轴对准结果中得到的最佳值之间确定差异。然后使用标准样品通过使用由此获得的差异来调整最佳值。相应地，通过使用标准样品获取最佳标称值（像散校正信号），并将最佳标定值存储为默认值。添加根据观察目标样本图案的高度的最佳标称值和默认值，并根据得到的标示符值进行像散校正。

5. 发明申请

US20090032693A1 Scanning Electron Microscope Alignment Method and Scanning Electron Microscope 有权
标题翻译：扫描电子显微镜对准方法和扫描电子显微镜
公开(公告)号：US20090032693A1
公开(公告)日：2009-02-05
申请号：US12182704
申请日：2008-07-30
申请人： Junichi Kakuta , Kazuhiro Ueda , Tatsuya Maeda , Hiroyuki Saito , Katsuhiro Sasada
发明人： Junichi Kakuta , Kazuhiro Ueda , Tatsuya Maeda , Hiroyuki Saito , Katsuhiro Sasada
IPC分类号： G01D18/00 , G01N23/00
CPC分类号： G01N23/225 , H01J37/1471 , H01J37/153 , H01J37/28 , H01J2237/1501 , H01J2237/1532
摘要： The present invention aims to provide an axis alignment method, astigmatism correction method and SEM for implementing these methods, which can prevent an alignment or correction error attributable to conditions of a specimen. A first aspect is to obtain the difference between the optimal values acquired from an automatic axis alignment result on a standard sample and from each of automatic axis alignment results on a observation target sample, and to correct an optimal value adjusted using the standard sample by use of the difference thus obtained. A second aspect is to acquire an optimal stigmator value (astigmatism correction signal) by using the standard sample, to store the optimal stigmator value as a default value, to add the optimal stigmator value and the default value depending on the height of an observation target sample pattern, and to perform an astigmatism correction on the basis of the resultant stigmator value.
摘要翻译：本发明旨在提供一种用于实现这些方法的轴对准方法，像散校正方法和SEM，其可以防止由于样品的条件引起的对准或校正误差。第一方面是获得从标准样品的自动轴对准结果获取的最佳值与观察目标样品上的自动轴对准结果中的每一种之间的差异，并且通过使用校正使用标准样品调整的最佳值的差异。第二方面是通过使用标准样本来获取最佳标称值（像散校正信号），以将最佳标称值作为默认值来存储，以根据观察目标的高度添加最优标示符值和默认值样本图案，并且基于得到的标记值进行散光校正。

6. 发明授权

US09297840B2 Power detection circuit 有权
标题翻译：电源检测电路
公开(公告)号：US09297840B2
公开(公告)日：2016-03-29
申请号：US13612516
申请日：2012-09-12
申请人： Kazuhiro Ueda
发明人： Kazuhiro Ueda
IPC分类号： G01R35/00 , G01R21/00 , H03D1/10 , G01R21/01 , G01R21/12
CPC分类号： G01R21/00 , G01R21/01 , G01R21/12 , H03D1/10
摘要： There is provided a power detection circuit capable of appropriately adjusting detection voltage characteristics by using simple configuration. The power detection circuit includes a first resistor having current applied thereto to adjust a detection voltage value of input power, an element having an applied voltage and a load characteristic changed according to the input power, and a second resistor connected to the element and having current applied thereto when resistance of the element becomes relatively low, to adjust the detection voltage value of the input power. Detection voltage characteristics may be appropriately adjusted using a simple configuration.
摘要翻译：提供了能够通过简单的配置适当地调整检测电压特性的功率检测电路。功率检测电路包括：第一电阻器，其施加有电流以调节输入功率的检测电压值;具有施加电压和根据输入功率改变的负载特性的元件;以及连接到元件并具有电流的第二电阻器当元件的电阻相对较低时施加到其上，以调整输入功率的检测电压值。可以使用简单的配置适当地调整检测电压特性。

7. 发明申请

US20140144717A1 CONSTRUCTION MACHINE 有权
标题翻译：建筑机械
公开(公告)号：US20140144717A1
公开(公告)日：2014-05-29
申请号：US14233322
申请日：2012-07-11
申请人： Hajime Nakashima , Masaru Numasawa , Kazuhiro Ueda , Zenzo Yamaguchi , Yasumasa Kimura
发明人： Hajime Nakashima , Masaru Numasawa , Kazuhiro Ueda , Zenzo Yamaguchi , Yasumasa Kimura
IPC分类号： E02F9/08
CPC分类号： E02F9/0866 , B60K11/06 , B60K13/04 , B60Y2200/412 , F01N3/05 , F01N13/082 , F01N2470/02 , F01N2470/04 , F01N2590/08 , Y02T10/20
摘要： A construction machine includes: a lower propelling body; and an upper slewing body which is slewably mounted on the lower propelling body. The upper slewing body includes: an engine room provided with an intake opening and a discharge opening; a duct provided in the engine room so as to communicate with the discharge opening and an exhaust gas pipe which guides exhaust gas discharged from the engine into the duct. The discharge opening and an outlet of the duct are open downward from the engine room. A portion on a distal end side of the exhaust gas pipe is inserted into the duct. The duct and the exhaust gas pipe are configured to cause the exhaust gas to be mixed with cooled air in the duct and cause the mixture of the exhaust gas and the cooled air to be discharged downward from the discharge opening.
摘要翻译：一种施工机械包括：下推进体; 以及可旋转地安装在下推进体上的上回转体。上部回转体包括：设有进气口和排出口的发动机室; 设置在发动机室中以与排出口连通的管道和将从发动机排出的废气引导到管道中的排气管。排气口和管道出口从发动机室向下敞开。排气管的前端侧的一部分插入管道内。管道和排气管被配置为使废气与管道中的冷却空气混合，并使排气和冷却空气的混合物从排出口向下排放。

8. 发明授权

US07928376B2 Element mapping unit, scanning transmission electron microscope, and element mapping method 有权
标题翻译：元素映射单元，扫描透射电子显微镜和元素映射方法
公开(公告)号：US07928376B2
公开(公告)日：2011-04-19
申请号：US11232964
申请日：2005-09-23
申请人： Kazutoshi Kaji , Kazuhiro Ueda , Koji Kimoto , Takashi Aoyama , Shunroku Taya , Shigeto Isakozawa
发明人： Kazutoshi Kaji , Kazuhiro Ueda , Koji Kimoto , Takashi Aoyama , Shunroku Taya , Shigeto Isakozawa
IPC分类号： H01J47/00
CPC分类号： H01J37/256
摘要： There is provided an element mapping unit, scanning transmission electron microscope, and element mapping method that enable to acquire an element mapping image very easily. On the scanning transmission electron microscope, the electron beam transmitted through an object to be analyzed enters into the element mapping unit. The electron beam is analyzed of its energy into spectrum by an electron spectrometer and an electron energy loss spectrum is acquired. Because the acceleration voltage data for each element and window data for 2-window method, 3-window method or contrast tuning method are already stored in a database and accordingly the spectrum measurement is carried out immediately even when an element to be analyzed is changed to another, the operator can confirm a two-dimensional element distribution map immediately. Besides, because every electron beam that enters into an energy filter passes through the object point, aberration strain in the electron spectrometer can be minimized and higher energy stability can be achieved. As a result, drift of the electron energy loss spectrum acquired by analyzing the electron beam into spectrum can be minimized and element distribution with higher accuracy can be acquired.
摘要翻译：提供了能够非常容易地获取元素映射图像的元素映射单元，扫描透射电子显微镜和元件映射方法。在扫描透射电子显微镜上，通过待分析物体传输的电子束进入元件映射单元。电子束通过电子光谱仪将其能量分析成光谱，并获得电子能量损失光谱。因为用于2窗口方法，3窗口方法或对比度调整方法的每个元素和窗口数据的加速电压数据已经存储在数据库中，因此即使当要分析的元素被改变为另一方面，操作者可以立即确认二维元素分布图。此外，由于进入能量过滤器的每个电子束通过物点，所以可以使电子光谱仪中的像差应变最小化并且可以实现更高的能量稳定性。结果，可以将通过将电子束分析成光谱而获得的电子能量损耗光谱的漂移最小化，并且可以获得具有更高精度的元素分布。

9. 发明授权

US07875251B2 Ozone-decomposing agent 失效
标题翻译：臭氧分解剂
公开(公告)号：US07875251B2
公开(公告)日：2011-01-25
申请号：US11914120
申请日：2006-04-25
申请人： Kazuhiro Ueda
发明人： Kazuhiro Ueda
IPC分类号： B01D53/66
CPC分类号： B01D53/8675 , B01D2255/20738 , B01J23/002 , B01J23/005 , B01J23/74 , B01J23/80 , B01J23/8892 , B01J37/03 , B01J2523/00 , B01J2523/17 , B01J2523/27 , B01J2523/72 , B01J2523/842 , B01J2523/845 , B01J2523/847 , Y02A50/2347
摘要： An ozone-decomposing agent including a first iron compound and a second iron compound is provided. The second iron compound may have a spinel type structure. The first iron compound of the ozone-decomposing agent may include an oxide selected from Fe2O3, FeO(OH) or Fe(OH)3. The second iron compound of the ozone-decomposing agent may include an oxide selected from MnFe2O4, ZnFe2O4, NiFe2O4, CuFe2O4 or CoFe2O4.
摘要翻译：提供了包含第一铁化合物和第二铁化合物的臭氧分解剂。第二铁化合物可以具有尖晶石型结构。臭氧分解剂的第一种铁化合物可以包括选自Fe 2 O 3，FeO（OH）或Fe（OH）3的氧化物。臭氧分解剂的第二铁化合物可以包括选自MnFe 2 O 4，ZnFe 2 O 4，NiFe 2 O 4，CuFe 2 O 4或CoFe 2 O 4的氧化物。

10. 发明授权

US07134518B2 Construction machine 有权
标题翻译：施工机械
公开(公告)号：US07134518B2
公开(公告)日：2006-11-14
申请号：US10768099
申请日：2004-02-02
申请人： Seigo Arai , Takashi Tsukiana , Koichi Yamashita , Kazuhiro Ueda , Hiroaki Iwamitsu
发明人： Seigo Arai , Takashi Tsukiana , Koichi Yamashita , Kazuhiro Ueda , Hiroaki Iwamitsu
IPC分类号： B60K11/06
CPC分类号： F01P11/10 , B60K11/04 , F01P3/18 , F01P2003/182 , F01P2060/02 , F01P2060/04
摘要： In a construction machine comprising an engine, hydraulic device, and heat exchanger for cooling the engine and the hydraulic device, which are all disposed in an upper rotating body of the construction machine, there is formed a maintenance passage along which maintenance portions of the engine and the hydraulic device are disposed so as to cross the upper rotating body. Exhaust air from cooling fans for sending air to the heat exchanger is discharged to the exterior of the machine body through the passage. Thus, the passage is utilized as an exhaust air passage for the heat exchanger, whereby it is possible to provide a construction machine improved in cooling efficiency for the heat exchanger.
摘要翻译：在包括用于冷却发动机和液压装置的发动机，液压装置和热交换器的工程机械中，所有发动机和液压装置都设置在施工机械的上部旋转体中，形成有维护通道，发动机的维护部分沿着该维护通道并且液压装置设置成与上部旋转体交叉。用于将空气送至热交换器的冷却风扇的排气通过通道排放到机体的外部。因此，该通道用作热交换器的排气通道，由此可以提供一种改进热交换器的冷却效率的施工机械。

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