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    • 1. 发明授权
    • Stacked electro-mechanical energy conversion element and method of manufacturing the same
    • 堆叠式机电能转换元件及其制造方法
    • US06933657B2
    • 2005-08-23
    • US10102730
    • 2002-03-22
    • Yutaka MaruyamaNobuyuki KojimaTooru Ezaki
    • Yutaka MaruyamaNobuyuki KojimaTooru Ezaki
    • H01L41/083H01L41/09H01L41/047
    • H01L41/0472H01L41/0474H01L41/0835H01L41/273H01L41/337H02N2/106
    • A stacked electro-mechanical energy conversion element includes a plurality of layers having a circular shape each of which is formed of a material having an electro-mechanical energy conversion function and has a through-hole in the center thereof, a plurality of electrode portions formed at least on one surface of the layers and separated from each other by a plurality of first non-electrode portions, a plurality of wiring conductors which penetrate the plurality of layers and electrically connect electrode portions of the different layers, and a plurality of second non-electrode portions formed in the periphery of the wiring conductors so as to prevent the wiring conductors from being rendered conductive to the electrode portions, wherein the wiring conductors are formed at least on or in the vicinity of an edge of an outer diameter of each layer, and the electrode portions are formed over the edge of the outer diameter except for portions at which the second non-electrode portions are formed.
    • 堆叠的机电能量转换元件包括多个具有圆形形状的层,每个层由具有机电能转换功能的材料形成,并且在其中心具有通孔,形成多个电极部分 至少在所述层的一个表面上并且通过多个第一非电极部彼此分离,穿过所述多个层并且电连接所述不同层的电极部分的多个布线导体和多个第二非电极部分, - 电极部分,其形成在布线导体的周围,以防止布线导体对电极部分导电,其中布线导体至少形成在每个层的外径边缘的至少一侧或附近 并且电极部分形成在除了第二非电极部分的部分之外的外径的边缘上 形成。