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    • 6. 发明授权
    • Method for manufacturing semiconductor device
    • 制造半导体器件的方法
    • US5998284A
    • 1999-12-07
    • US803753
    • 1997-02-21
    • Kenichi Azuma
    • Kenichi Azuma
    • H01L21/28H01L21/265H01L21/285H01L21/324H01L21/336H01L21/8238H01L27/092H01L29/78H01L21/425
    • H01L29/665H01L21/2652H01L21/28518H01L21/324H01L21/823814H01L21/823835
    • In a semiconductor device manufacturing method, when an impurity is implanted into a region for forming an impurity diffused layer in a silicon substrate, or into a polysilicon layer formed on the silicon substrate, the injection of the impurity is carried out through a protective film, such as a TiN film, which contains no oxygen and which is selectively removable from silicon. Thereafter, an annealing for activating the impurity thus implanted is applied so that an impurity diffused layer is formed, and the protective film is removed. Subsequently, a refractory metal film is adhesively provided on the silicon surface of the region where the impurity diffused layer is formed, and reaction between the silicon and the refractory metal film is caused by an annealing so that a refractory metal silicide film is formed. With this arrangement, it is possible to produce a semiconductor device which has a refractory metal silicide film having a low resistance.
    • 在半导体器件制造方法中,当在硅衬底中形成杂质扩散层的区域或者在硅衬底上形成的多晶硅层中注入杂质时,通过保护膜进行杂质的注入, 例如不含氧的可从硅选择性地除去的TiN膜。 此后,施加用于激活这样注入的杂质的退火,使得形成杂质扩散层,并且去除保护膜。 随后,在形成杂质扩散层的区域的硅表面上粘附难熔金属膜,并且通过退火引起硅和难熔金属膜之间的反应,从而形成难熔金属硅化物膜。 利用这种布置,可以制造具有低电阻的难熔金属硅化物膜的半导体器件。
    • 7. 发明授权
    • Conveyor truck
    • 输送车
    • US4529052A
    • 1985-07-16
    • US643930
    • 1984-08-24
    • Hiroshi ImaiKeiji TakeuchiKenichi AzumaHironori Ozaki
    • Hiroshi ImaiKeiji TakeuchiKenichi AzumaHironori Ozaki
    • B62D9/00B62D61/10G05D1/02
    • B62D61/10B62D9/00G05D1/0212G05D2201/0216
    • A conveyor truck including a truck body and a plurality of rotary members rotatably mounted on the truck body in a plane parallel to the floor. A pair of drive wheels, rotatable by aligned rotary shafts lying in a plane parallel to the floor, are mounted on each rotary member. The rotation of each drive wheel can be independently controlled. Supports are mounted on the respective rotary members and are arranged generally perpendicular to the rotary shafts of the drive wheels. The supports support the drive wheels so as to rotate about the center axes of the respective rotary members and parallel to the floor, whereby the conveyor truck can smoothly move in any direction without reorientation of the truck body.
    • 一种输送车,其包括卡车主体和多个旋转构件,所述多个旋转构件在与所述地板平行的平面中可转动地安装在所述卡车主体上。 一对驱动轮,通过位于与地板平行的平面中的对准的旋转轴旋转,安装在每个旋转构件上。 每个驱动轮的旋转可独立控制。 支撑件安装在相应的旋转构件上并且大致垂直于驱动轮的旋转轴布置。 支撑件支撑驱动轮以围绕相应的旋转构件的中心轴线并且平行于地板旋转,由此,输送车可以在任何方向上平稳地移动,而不需要重新定位卡车车身。