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1. 发明授权

US5301126A Method of processing a signal from a thermal type flow sensor 失效
标题翻译：处理来自热式流量传感器的信号的方法
公开(公告)号：US5301126A
公开(公告)日：1994-04-05
申请号：US849812
申请日：1992-03-11
申请人： Yukinobu Nishimura , Nobutake Taniguchi , Setsuhiro Shimomura , Kouji Tanimoto
发明人： Yukinobu Nishimura , Nobutake Taniguchi , Setsuhiro Shimomura , Kouji Tanimoto
IPC分类号： F02D41/18 , G01F1/696 , G06F15/20 , F02D41/30 , G01N11/04
CPC分类号： F02D41/187 , G01F1/6965
摘要： A method of processing signal for a thermal type flow sensor having a temperature dependence resistance employing platinum and the like and a holding member made of alumina for holding it so as to compensate for response delay when fluid flow is changed, in which, when the fluid flow is maintained in a stationary state, the so-called equilibrium state, by steps of setting in advance the relation between a flow related value which changes according to flow change and a first operational value showing the temperature characteristic of the holding member which changes according to flow so as to make the flow related value as a parameter, calculating the first operational value from the flow related value when flow is detected in accordance with the predetermined relation, comparing the calculated first operational value with the second operational value which is set in relation with the first operational value, correcting the second operational value so that it approximates the first operational value according to the compared result, calculating a compensating factor by a predetermined operational formula with the calculated first operational value and the corrected second operational value, and compensating the compensating factor by multiplying it by the detected flow.
摘要翻译：一种处理具有使用铂等的温度依赖性电阻的热式流量传感器的信号的方法以及由氧化铝制成的保持部件，用于保持其流体流动改变时的响应延迟，其中当流体通过预先设定根据流量变化而变化的流量相关值与显示保持部件的温度特性的第一操作值之间的关系的步骤，将流量维持在静止状态（即所谓的平衡状态）流动以使流量相关值作为参数，根据预定关系检测流量时根据流量相关值计算第一操作值，将计算的第一操作值与设置在第二操作值中的第二操作值进行比较与第一操作值的关系，校正第二操作值使其近似于第一操作根据比较结果计算补偿因子，并通过计算的第一操作值和校正的第二操作值计算补偿因子，并通过将其与检测到的流相乘来补偿补偿因子。

2. 发明授权

US5086745A Method and apparatus for processing a thermal flowrate sensor signal 失效
标题翻译：用于处理热流量传感器信号的方法和装置
公开(公告)号：US5086745A
公开(公告)日：1992-02-11
申请号：US550765
申请日：1990-07-10
申请人： Yukinobu Nishimura , Setsuhiro Shimomura , Nobutake Taniguchi , Kouji Tanimoto
发明人： Yukinobu Nishimura , Setsuhiro Shimomura , Nobutake Taniguchi , Kouji Tanimoto
IPC分类号： G01F1/68 , F02D41/18 , G01F1/692 , G01F1/696 , G01F1/698 , G01P5/12
CPC分类号： G01P5/12 , F02D41/187 , G01F1/692 , G01F1/6965
摘要： A method of processing a signal of a thermal flow-rate sensor, provides a temperature monitor for monitoring a temperature at a representative point on a substrate support member; obtains the temperature at the representative point corresponding to the flow rate by use of the temperature monitor; and corrects an output of the sensor in accordance with a value corresponding to the temperature as well as a value corresponding to the temperature at the representative point when the flow rate is in a steady state.
摘要翻译：一种处理热流量传感器的信号的方法，提供用于监测基板支撑构件上的代表点的温度的温度监视器; 通过使用温度监测器获得对应于流量的代表点的温度; 根据与温度对应的值，以及当流量处于稳定状态时与代表点处的温度相对应的值来校正传感器的输出。

3. 发明授权

US06684693B2 Heat generation type flow sensor 有权
标题翻译：发热型流量传感器
公开(公告)号：US06684693B2
公开(公告)日：2004-02-03
申请号：US09725315
申请日：2000-11-29
申请人： Kouji Tanimoto , Tomoya Yamakawa , Yuji Ariyoshi
发明人： Kouji Tanimoto , Tomoya Yamakawa , Yuji Ariyoshi
IPC分类号： G01F168
CPC分类号： G01F1/692 , G01F1/6845
摘要： A heat generation type flow sensor of an enhanced output sensitivity which is destined for use, for example, as an air flow sensor employed in an engine control system of a motor vehicle. The heat generation type flow sensor includes a silicon substrate (20), a diaphragm (10) disposed on the silicon substrate (20) and having a cavity (11a) formed in a surface thereof, a flow rate detecting element (1) provided on the diaphragm (10) and including a heat generating resistor (2) for outputting an electric signal indicative of a heating current flowing through the heat generating resistor (2), a supporting member (13) for supporting the flow rate detecting element (1) on the diaphragm (10) in such a deposition that one surface of the diaphragm (10) is exposed to a fluid for measurement while the fluid for measurement is difficult to flow into the cavity (11a) formed in the other surface of the diaphragm (10), and a control unit for performing such control that temperature of the heat generating resistor (2) is sustained higher by a predetermined temperature than that of the fluid for measurement, wherein the heat generating resistor (2) and the diaphragm (10) are so dimensioned that ratio of a width of the heat generating resistor (2) to that of the diaphragm (10) is in a range from 0.4 to 0.6 inclusive and that ratio of a length (Yh) in a longitudinal direction of the heat generating resistor (2) to that (Yd) of the diaphragm (10) is in a range from 0.4 to 0.6 inclusive.
摘要翻译：一种提高输出灵敏度的发热型流量传感器，其目的地是例如用作机动车辆的发动机控制系统中的空气流量传感器。发热型流量传感器包括硅基板（20），设置在硅基板（20）上并具有形成在其表面上的空腔（11a）的隔膜（10），设置在其上的流量检测元件所述隔膜（10）包括用于输出表示流经所述发热电阻（2）的加热电流的电信号的发热电阻（2），用于支撑所述流量检测元件（1）的支撑部件（13）在隔膜（10）上，使得隔膜（10）的一个表面暴露于用于测量的流体的沉积中，同时用于测量的流体难以流入形成在隔膜的另一个表面中的空腔（11a） 10），以及控制单元，用于进行所述发热电阻器（2）的温度比用于测量用流体的预定温度更高的温度的控制，其中所述发热电阻器（2）和所述隔膜（10）是如此尺寸所述发热电阻体（2）的宽度与所述隔膜（10）的宽度的比率在0.4〜0.6的范围内，并且所述发热电阻体（2）的长度方向的长度（Yh） 2）与隔膜（10）的（Yd）的比值在0.4〜0.6的范围内。

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