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    • 6. 发明申请
    • Heat processing apparatus, method of automatically tuning control constants, and storage medium
    • 热处理装置,自动调节控制常数的方法和存储介质
    • US20080255683A1
    • 2008-10-16
    • US12081211
    • 2008-04-11
    • Goro TakahashiHisashi InoueShoichi KandaWenling Wang
    • Goro TakahashiHisashi InoueShoichi KandaWenling Wang
    • G05B13/04H05B1/02G05D23/00
    • G05D23/1935H01L21/67109H01L21/67248
    • A heat processing apparatus comprises: a reaction vessel; a heating unit disposed in the reaction vessel and configured to heat the processing region; a temperature detection part configured to detect a temperature of the processing region; and a control part configured to control the heating unit by a PID control. The control part includes: a rule table that is prepared such that predicted change amounts of a temperature property item when a temperature of the processing region is increased up to a target value, and change ratios of PID constants are correspondingly related to each other; a performance unit configured to repeatedly perform: a step of obtaining a temperature profile based on a temperature detected value of the temperature detection part and calculating a difference between an actually measured value and a target value of the temperature property item based on the temperature profile; and a step of, when the difference is over an allowable range and larger than a prescribed value, referring to the rule table and changing the PID constants to reset new PID constants by a change ratio corresponding to an predicted change amount of the temperature property item relative to the difference; until the difference can fall within the allowable range. The control part also includes an updating unit configured to update, when there is a difference between an actually measured change amount of the temperature property item with reference to the rule table and an predicted change amount of the temperature property item that has been predicted in the preceding cycle, the corresponding relationship between the PID constants and the predicted change amounts of the temperature property item described in the rule table, based on the actually measured change amount.
    • 一种热处理装置,包括:反应容器; 加热单元,设置在所述反应容器中并构造成加热所述处理区域; 温度检测部,被配置为检测所述处理区域的温度; 以及配置为通过PID控制来控制加热单元的控制部。 所述控制部包括:准备所述规则表,使得当所述处理区域的温度升高到目标值时温度特性项目的预测变化量以及PID常数的变化率相应地相关; 执行单元,被配置为重复执行以下步骤:基于所述温度检测部的温度检测值获得温度分布,并且基于所述温度分布计算所述温度特性项的实际测量值与所述目标值之间的差; 以及当所述差超过允许范围并且大于规定值时,参考规则表并改变PID常数以将新的PID常数重置为与温度特性项目的预测变化量相对应的变化率 相对于差异; 直到差值可以落在容许范围内。 控制部还包括更新单元,其被配置为当温度特性项目的实际测量的变化量相对于规则表之间存在差异,并且在所述温度特性项目中预测的温度特性项目的预测变化量之间存在差异时, 在上述循环中,基于实际测量的变化量,PID常数与规则表中描述的温度特性项目的预测变化量之间的对应关系。