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    • 2. 发明申请
    • THIN FILM TRANSISTOR AND FABRICATION METHOD THEREOF
    • 薄膜晶体管及其制造方法
    • US20080099853A1
    • 2008-05-01
    • US11735441
    • 2007-04-14
    • Chi-Jan YangHsiy-Yu ChangYu-Chou LeeYing-Ming Wu
    • Chi-Jan YangHsiy-Yu ChangYu-Chou LeeYing-Ming Wu
    • H01L29/76H01L21/00
    • H01L29/458H01L29/4908H01L29/66765
    • A thin film transistor including a substrate, a first buffer layer, a gate, a gate insulation layer, a channel layer, a source and a drain is provided. The first buffer layer is disposed on the substrate and the first buffer is a silicide. The gate covers a portion of the first buffer layer, and the gate includes a first aluminum metal layer and a first protective layer disposed thereon. The gate insulation layer covers the gate, and the channel layer is disposed on part of the gate insulation layer. The source and the drain are disposed on the channel layer and separated form each other. Each of the source and the drain includes a second buffer layer, a second aluminum metal layer and a second protective layer. The second aluminum metal layer is disposed on the second buffer layer and the second protective layer is disposed thereon.
    • 提供了包括衬底,第一缓冲层,栅极,栅极绝缘层,沟道层,源极和漏极的薄膜晶体管。 第一缓冲层设置在基板上,第一缓冲层是硅化物。 栅极覆盖第一缓冲层的一部分,栅极包括第一铝金属层和设置在其上的第一保护层。 栅极绝缘层覆盖栅极,并且沟道层设置在栅极绝缘层的一部分上。 源极和漏极设置在沟道层上并彼此分离。 源极和漏极中的每一个包括第二缓冲层,第二铝金属层和第二保护层。 第二铝金属层设置在第二缓冲层上,第二保护层设置在其上。
    • 10. 发明申请
    • THIN FILM TRANSISTOR
    • 薄膜晶体管
    • US20070187681A1
    • 2007-08-16
    • US11740296
    • 2007-04-26
    • Chiun-Hung ChenYu-Chou Lee
    • Chiun-Hung ChenYu-Chou Lee
    • H01L29/04
    • H01L27/124H01L29/66765
    • A thin film transistor and method of fabrication a thin film transistor and a pixel structure are provided. First, a gate is formed on the substrate. Then, a gate-isolating layer is formed on the substrate to cover the gate electrode. After that, a source/drain is formed on the gate-isolating layer and exposes a portion of the gate-isolating layer above the gate electrode. Then, a channel is formed on the portion of the gate-isolating layer above the gate. The source/drain layer is formed before forming the channel to prevent the channel from over etching as forming the source/drain layer. Therefore, the yields of manufacturing thin film transistor and pixel structure can be improved.
    • 提供薄膜晶体管和制造薄膜晶体管和像素结构的方法。 首先,在基板上形成栅极。 然后,在衬底上形成栅极隔离层以覆盖栅电极。 之后,在栅极隔离层上形成源极/漏极,并将栅极隔离层的一部分暴露在栅极电极上方。 然后,在栅极上方的栅极隔离层的部分上形成沟道。 在形成沟道之前形成源极/漏极层,以防止沟道过蚀刻形成源极/漏极层。 因此,可以提高制造薄膜晶体管和像素结构的产率。