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    • 8. 发明申请
    • Piezoelectric RF MEMS device and method of fabricating the same
    • 压电RF MEMS器件及其制造方法
    • US20070120445A1
    • 2007-05-31
    • US11594813
    • 2006-11-09
    • Jong-seok KimIn-sang SongSang-hun LeeSang-wook KwonChang-seung LeeYoung-tack HoungChe-heung Kim
    • Jong-seok KimIn-sang SongSang-hun LeeSang-wook KwonChang-seung LeeYoung-tack HoungChe-heung Kim
    • H01L41/053
    • H01H57/00H01L41/094H01L41/314H01L41/33
    • A piezoelectric RF micro electro mechanical system (MEMS) device and a method of fabricating the same are provided, in which the RF MEMS device is driven upward at a low voltage based on a piezoelectric effect. The piezoelectric RF MEMS device includes an upper substrate provided with an RF output signal line, a piezoelectric actuator positioned below the RF output signal line, and a lower substrate provided with a cavity so that one end of the piezoelectric actuator is fixed to the lower substrate and its other end is movably spaced apart from the upper and lower substrates, wherein the piezoelectric actuator is provided with an RF input signal line thereon, and a contact pad is provided to connect the RF output signal line with the RF input signal line when the piezoelectric actuator is driven upward. A method of fabricating a piezoelectric RF MEMS device includes providing an upper substrate including an RF output signal line, providing a lower substrate including a piezoelectric actuator having an RF input signal line corresponding to the RF output signal line, and assembling the upper substrate and the lower substrate.
    • 提供了一种压电RF微机电系统(MEMS)器件及其制造方法,其中基于压电效应,RF MEMS器件以低电压向上驱动。 压电RF MEMS器件包括:设置有RF输出信号线的上基板,位于RF输出信号线下方的压电致动器;以及设置有空腔的下基板,使得压电致动器的一端固定到下基板 并且其另一端与上基板和下基板可移动地间隔开,其中压电致动器在其上设置有RF输入信号线,并且提供接触焊盘以将RF输出信号线与RF输入信号线连接, 压电致动器被向上驱动。 制造压电RF MEMS器件的方法包括提供包括RF输出信号线的上基板,提供包括具有对应于RF输出信号线的RF输入信号线的压电致动器的下基板,以及组装上基板和 下基板。
    • 10. 发明授权
    • Piezoelectric RF MEMS device and method of fabricating the same
    • 压电RF MEMS器件及其制造方法
    • US07545081B2
    • 2009-06-09
    • US11594813
    • 2006-11-09
    • Jong-seok KimIn-sang SongSang-hun LeeSang-wook KwonChang-seung LeeYoung-tack HoungChe-heung Kim
    • Jong-seok KimIn-sang SongSang-hun LeeSang-wook KwonChang-seung LeeYoung-tack HoungChe-heung Kim
    • H01L41/08
    • H01H57/00H01L41/094H01L41/314H01L41/33
    • A piezoelectric RF micro electro mechanical system (MEMS) device and a method of fabricating the same are provided, in which the RF MEMS device is driven upward at a low voltage based on a piezoelectric effect. The piezoelectric RF MEMS device includes an upper substrate provided with an RF output signal line, a piezoelectric actuator positioned below the RF output signal line, and a lower substrate provided with a cavity so that one end of the piezoelectric actuator is fixed to the lower substrate and its other end is movably spaced apart from the upper and lower substrates, wherein the piezoelectric actuator is provided with an RF input signal line thereon, and a contact pad is provided to connect the RF output signal line with the RF input signal line when the piezoelectric actuator is driven upward. A method of fabricating a piezoelectric RF MEMS device includes providing an upper substrate including an RF output signal line, providing a lower substrate including a piezoelectric actuator having an RF input signal line corresponding to the RF output signal line, and assembling the upper substrate and the lower substrate.
    • 提供了一种压电RF微机电系统(MEMS)器件及其制造方法,其中基于压电效应,RF MEMS器件以低电压向上驱动。 压电RF MEMS器件包括:设置有RF输出信号线的上基板,位于RF输出信号线下方的压电致动器;以及设置有空腔的下基板,使得压电致动器的一端固定到下基板 并且其另一端与上基板和下基板可移动地间隔开,其中压电致动器在其上设置有RF输入信号线,并且提供接触焊盘以将RF输出信号线与RF输入信号线连接, 压电致动器被向上驱动。 制造压电RF MEMS器件的方法包括提供包括RF输出信号线的上基板,提供包括具有对应于RF输出信号线的RF输入信号线的压电致动器的下基板,以及组装上基板和 下基板。