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1. 发明申请

US20070120445A1 Piezoelectric RF MEMS device and method of fabricating the same 失效
标题翻译：压电RF MEMS器件及其制造方法
公开(公告)号：US20070120445A1
公开(公告)日：2007-05-31
申请号：US11594813
申请日：2006-11-09
申请人： Jong-seok Kim , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Chang-seung Lee , Young-tack Houng , Che-heung Kim
发明人： Jong-seok Kim , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Chang-seung Lee , Young-tack Houng , Che-heung Kim
IPC分类号： H01L41/053
CPC分类号： H01H57/00 , H01L41/094 , H01L41/314 , H01L41/33
摘要： A piezoelectric RF micro electro mechanical system (MEMS) device and a method of fabricating the same are provided, in which the RF MEMS device is driven upward at a low voltage based on a piezoelectric effect. The piezoelectric RF MEMS device includes an upper substrate provided with an RF output signal line, a piezoelectric actuator positioned below the RF output signal line, and a lower substrate provided with a cavity so that one end of the piezoelectric actuator is fixed to the lower substrate and its other end is movably spaced apart from the upper and lower substrates, wherein the piezoelectric actuator is provided with an RF input signal line thereon, and a contact pad is provided to connect the RF output signal line with the RF input signal line when the piezoelectric actuator is driven upward. A method of fabricating a piezoelectric RF MEMS device includes providing an upper substrate including an RF output signal line, providing a lower substrate including a piezoelectric actuator having an RF input signal line corresponding to the RF output signal line, and assembling the upper substrate and the lower substrate.
摘要翻译：提供了一种压电RF微机电系统（MEMS）器件及其制造方法，其中基于压电效应，RF MEMS器件以低电压向上驱动。压电RF MEMS器件包括：设置有RF输出信号线的上基板，位于RF输出信号线下方的压电致动器;以及设置有空腔的下基板，使得压电致动器的一端固定到下基板并且其另一端与上基板和下基板可移动地间隔开，其中压电致动器在其上设置有RF输入信号线，并且提供接触焊盘以将RF输出信号线与RF输入信号线连接，压电致动器被向上驱动。制造压电RF MEMS器件的方法包括提供包括RF输出信号线的上基板，提供包括具有对应于RF输出信号线的RF输入信号线的压电致动器的下基板，以及组装上基板和下基板。

2. 发明授权

US07545081B2 Piezoelectric RF MEMS device and method of fabricating the same 失效
标题翻译：压电RF MEMS器件及其制造方法
公开(公告)号：US07545081B2
公开(公告)日：2009-06-09
申请号：US11594813
申请日：2006-11-09
申请人： Jong-seok Kim , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Chang-seung Lee , Young-tack Houng , Che-heung Kim
发明人： Jong-seok Kim , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Chang-seung Lee , Young-tack Houng , Che-heung Kim
IPC分类号： H01L41/08
CPC分类号： H01H57/00 , H01L41/094 , H01L41/314 , H01L41/33
摘要： A piezoelectric RF micro electro mechanical system (MEMS) device and a method of fabricating the same are provided, in which the RF MEMS device is driven upward at a low voltage based on a piezoelectric effect. The piezoelectric RF MEMS device includes an upper substrate provided with an RF output signal line, a piezoelectric actuator positioned below the RF output signal line, and a lower substrate provided with a cavity so that one end of the piezoelectric actuator is fixed to the lower substrate and its other end is movably spaced apart from the upper and lower substrates, wherein the piezoelectric actuator is provided with an RF input signal line thereon, and a contact pad is provided to connect the RF output signal line with the RF input signal line when the piezoelectric actuator is driven upward. A method of fabricating a piezoelectric RF MEMS device includes providing an upper substrate including an RF output signal line, providing a lower substrate including a piezoelectric actuator having an RF input signal line corresponding to the RF output signal line, and assembling the upper substrate and the lower substrate.
摘要翻译：提供了一种压电RF微机电系统（MEMS）器件及其制造方法，其中基于压电效应，RF MEMS器件以低电压向上驱动。压电RF MEMS器件包括：设置有RF输出信号线的上基板，位于RF输出信号线下方的压电致动器;以及设置有空腔的下基板，使得压电致动器的一端固定到下基板并且其另一端与上基板和下基板可移动地间隔开，其中压电致动器在其上设置有RF输入信号线，并且提供接触焊盘以将RF输出信号线与RF输入信号线连接，压电致动器被向上驱动。制造压电RF MEMS器件的方法包括提供包括RF输出信号线的上基板，提供包括具有对应于RF输出信号线的RF输入信号线的压电致动器的下基板，以及组装上基板和下基板。

3. 发明授权

US07728703B2 RF MEMS switch and method for fabricating the same 失效
标题翻译： RF MEMS开关及其制造方法
公开(公告)号：US07728703B2
公开(公告)日：2010-06-01
申请号：US11396573
申请日：2006-04-04
申请人： Jong-seok Kim , Sang-wook Kwon , Dong-kyun Kim , Che-heung Kim , Sang-hun Lee , Young-tack Houng , Chang-seung Lee , In-sang Song
发明人： Jong-seok Kim , Sang-wook Kwon , Dong-kyun Kim , Che-heung Kim , Sang-hun Lee , Young-tack Houng , Chang-seung Lee , In-sang Song
IPC分类号： H01P1/10 , H01H11/04 , H01H9/00 , H01H57/00
CPC分类号： H01P1/127 , H01H59/0009 , H01H2057/006 , Y10T29/49002 , Y10T29/49016 , Y10T29/4913 , Y10T29/49144 , Y10T29/49155
摘要： An RF MEMS switch and a method for fabricating the same are disclosed, in which the RF MEMS device is down driven at a low voltage using a piezoelectric effect. The RF MEMS switch includes a substrate provided with RF signal lines and a cavity, a cantilever positioned on the cavity, having one end fixed to the substrate, and a contact pad connecting the RF signal lines with the cantilever in contact with the RF signal lines when the cantilever is down driven.
摘要翻译：公开了一种RF MEMS开关及其制造方法，其中使用压电效应将RF MEMS器件以低电压下降驱动。 RF MEMS开关包括设置有RF信号线和空腔的基板，位于空腔上的悬臂，其一端固定到基板，以及将RF信号线与与RF信号线接触的悬臂连接的接触垫当悬臂下降驱动时。

4. 发明申请

US20070115081A1 RF MEMS switch and method for fabricating the same 失效
标题翻译： RF MEMS开关及其制造方法
公开(公告)号：US20070115081A1
公开(公告)日：2007-05-24
申请号：US11396573
申请日：2006-04-04
申请人： Jong-seok Kim , Sang-wook Kwon , Dong-kyun Kim , Che-heung Kim , Sang-hun Lee , Young-tack Houng , Chang-seung Lee , In-sang Song
发明人： Jong-seok Kim , Sang-wook Kwon , Dong-kyun Kim , Che-heung Kim , Sang-hun Lee , Young-tack Houng , Chang-seung Lee , In-sang Song
IPC分类号： H01P1/10
CPC分类号： H01P1/127 , H01H59/0009 , H01H2057/006 , Y10T29/49002 , Y10T29/49016 , Y10T29/4913 , Y10T29/49144 , Y10T29/49155
摘要： An RF MEMS switch and a method for fabricating the same are disclosed, in which the RF MEMS device is down driven at a low voltage using a piezoelectric effect. The RF MEMS switch includes a substrate provided with RF signal lines and a cavity, a cantilever positioned on the cavity, having one end fixed to the substrate, and a contact pad connecting the RF signal lines with the cantilever in contact with the RF signal lines when the cantilever is down driven.
摘要翻译：公开了一种RF MEMS开关及其制造方法，其中使用压电效应将RF MEMS器件以低电压下降驱动。 RF MEMS开关包括设置有RF信号线和空腔的基板，位于空腔上的悬臂，其一端固定到基板，以及将RF信号线与与RF信号线接触的悬臂连接的接触垫当悬臂下降驱动时。

5. 发明申请

US20070195464A1 Downward type MEMS switch and method for fabricating the same 有权
标题翻译：向下型MEMS开关及其制造方法
公开(公告)号：US20070195464A1
公开(公告)日：2007-08-23
申请号：US11581435
申请日：2006-10-17
申请人： Sang-wook Kwon , Jong-seok Kim , In-sang Song , Sang-hun Lee , Dong-kyun Kim , Jung-han Choi , Young-tack Houng , Che-heung Kim
发明人： Sang-wook Kwon , Jong-seok Kim , In-sang Song , Sang-hun Lee , Dong-kyun Kim , Jung-han Choi , Young-tack Houng , Che-heung Kim
IPC分类号： G11B5/48
CPC分类号： H01H1/0036 , H01H2057/006 , H01P1/127
摘要： A downward type micro electro mechanical system (EMS) switch and a method of fabricating the same is provided. The downward type MEMS switch includes first and second cavities formed in a substrate, first and second actuators formed on upper portions of the first and second cavities, first and second fixing lines formed on an upper surface of the substrate and not overlapped with the first and second cavities, and a contact pad which is spaced apart at a predetermined distance from surfaces of the first fixing line and the second fixing line but which can be contacted with the first fixing line and the second fixing line when the first actuator and the second actuator are driven. The contact pad, which is actuated downward by piezoelectricity, is fabricated as it shares a layer with a RF signal line, after the RF signal line is fabricated.
摘要翻译：提供了向下型的微机电系统（EMS）开关及其制造方法。向下型MEMS开关包括形成在基板中的第一和第二空腔，形成在第一和第二空腔的上部的第一和第二致动器，形成在基板的上表面上的第一和第二固定线，第二空腔和接触垫，其间距第一固定线和第二固定线的表面隔开预定距离，但是当第一致动器和第二致动器能够与第一固定线和第二固定线接触时被驱动。在RF信号线被制造之后，通过压电性向下致动的接触垫被制造成与RF信号线共享一层。

6. 发明授权

US08018308B2 Downward type MEMS switch and method for fabricating the same 有权
标题翻译：向下型MEMS开关及其制造方法
公开(公告)号：US08018308B2
公开(公告)日：2011-09-13
申请号：US11581435
申请日：2006-10-17
申请人： Sang-wook Kwon , Jong-seok Kim , In-sang Song , Sang-hun Lee , Dong-kyun Kim , Jung-han Choi , Young-tack Houng , Che-heung Kim
发明人： Sang-wook Kwon , Jong-seok Kim , In-sang Song , Sang-hun Lee , Dong-kyun Kim , Jung-han Choi , Young-tack Houng , Che-heung Kim
IPC分类号： H01H51/22
CPC分类号： H01H1/0036 , H01H2057/006 , H01P1/127
摘要： A downward type micro electro mechanical system (EMS) switch and a method of fabricating the same is provided. The downward type MEMS switch includes first and second cavities formed in a substrate, first and second actuators formed on upper portions of the first and second cavities, first and second fixing lines formed on an upper surface of the substrate and not overlapped with the first and second cavities, and a contact pad which is spaced apart at a predetermined distance from surfaces of the first fixing line and the second fixing line but which can be contacted with the first fixing line and the second fixing line when the first actuator and the second actuator are driven. The contact pad, which is actuated downward by piezoelectricity, is fabricated as it shares a layer with a RF signal line, after the RF signal line is fabricated.
摘要翻译：提供了向下型的微机电系统（EMS）开关及其制造方法。向下型MEMS开关包括形成在基板中的第一和第二空腔，形成在第一和第二空腔的上部的第一和第二致动器，形成在基板的上表面上的第一和第二固定线，第二空腔和接触垫，其间距第一固定线和第二固定线的表面隔开预定距离，但是当第一致动器和第二致动器能够与第一固定线和第二固定线接触时被驱动。在RF信号线被制造之后，通过压电性向下致动的接触垫被制造成与RF信号线共享一层。

7. 发明授权

US07532143B2 Device for detecting voltage and analog-to-digital converter (ADC) using the same 失效
标题翻译：用于检测电压的装置和使用其的模数转换器（ADC）
公开(公告)号：US07532143B2
公开(公告)日：2009-05-12
申请号：US11979490
申请日：2007-11-05
申请人： In-sang Song , Sang-wook Kwon , Jung-eun Lee , Young-tack Houng
发明人： In-sang Song , Sang-wook Kwon , Jung-eun Lee , Young-tack Houng
IPC分类号： H03M1/12
CPC分类号： G01R19/16576 , G01D1/18 , G01R5/28 , H03M1/361
摘要： A voltage detecting device and an analog-to-digital converter (ADC) using the same are provided. The voltage detecting device determines whether input voltage is higher than threshold voltage based on contact of a strip and a membrane. Therefore, high resolution and high speed operation is possible, but with consuming lower power, and an element capable of performing the function of resistor and comparator is provided. Furthermore, a more effective ADC may be provided using the above.
摘要翻译：提供了使用其的电压检测装置和模数转换器（ADC）。电压检测装置基于条带和膜的接触来确定输入电压是否高于阈值电压。因此，高分辨率和高速度操作是可能的，但是消耗较低的功率，并且提供了能够执行电阻器和比较器的功能的元件。此外，可以使用上述提供更有效的ADC。

8. 发明申请

US20090096651A1 ANALOG-TO-DIGITAL (AD) CONVERTER USING RESONANCE FREQUENCY SHIFTING AND VOLTAGE DETECTING DEVICE THEREOF 有权
标题翻译：使用谐振频率转换和电压检测装置的模拟数字（AD）转换器
公开(公告)号：US20090096651A1
公开(公告)日：2009-04-16
申请号：US12048499
申请日：2008-03-14
申请人： Young-tack Houng , Sang-wook Kwon , In-Sang Song , Seung Seob Lee , Kangwon Lee , Seok Woo Lee , Phillip Lee
发明人： Young-tack Houng , Sang-wook Kwon , In-Sang Song , Seung Seob Lee , Kangwon Lee , Seok Woo Lee , Phillip Lee
IPC分类号： H03M1/12
CPC分类号： H03M1/002 , H03M1/361 , H03M1/60
摘要： An analog-to-digital (AD) converter and a voltage detecting device thereof are provided. The AD converter includes at least one voltage detecting device which outputs a signal of a frequency determined based on a magnitude of an input voltage using a resonance frequency of a resonator. The AD converter determines a digital output value depending on the output signal from the voltage detecting device. Therefore, the AD converter can achieve a high resolution and a high speed with far less power consumption.
摘要翻译：提供了一种模拟数字（AD）转换器及其电压检测装置。 AD转换器包括至少一个电压检测装置，其使用谐振器的谐振频率输出基于输入电压的幅度确定的频率的信号。 AD转换器根据来自电压检测装置的输出信号确定数字输出值。因此，AD转换器可以实现高分辨率和高速度，远远更少的功耗。

9. 发明申请

US20080309528A1 Device for detecting voltage and analog-to-digital converter (ADC) using the same 失效
标题翻译：用于检测电压的装置和使用其的模数转换器（ADC）
公开(公告)号：US20080309528A1
公开(公告)日：2008-12-18
申请号：US11979490
申请日：2007-11-05
申请人： In-sang Song , Sang-wook Kwon , Jung-eun Lee , Young-tack Houng
发明人： In-sang Song , Sang-wook Kwon , Jung-eun Lee , Young-tack Houng
IPC分类号： G01R19/155 , H03M1/10
CPC分类号： G01R19/16576 , G01D1/18 , G01R5/28 , H03M1/361
摘要： A voltage detecting device and an analog-to-digital converter (ADC) using the same are provided. The voltage detecting device determines whether input voltage is higher than threshold voltage based on contact of a strip and a membrane. Therefore, high resolution and high speed operation is possible, but with consuming lower power, and an element capable of performing the function of resistor and comparator is provided. Furthermore, a more effective ADC may be provided using the above.
摘要翻译：提供了使用其的电压检测装置和模数转换器（ADC）。电压检测装置基于条带和膜的接触来确定输入电压是否高于阈值电压。因此，高分辨率和高速度操作是可能的，但是消耗较低的功率，并且提供了能够执行电阻器和比较器的功能的元件。此外，可以使用上述提供更有效的ADC。

10. 发明申请

US20060180409A1 Spring structure and micro-structure employing the same 审中-公开
标题翻译：弹簧结构和微结构采用相同
公开(公告)号：US20060180409A1
公开(公告)日：2006-08-17
申请号：US11315118
申请日：2005-12-23
申请人： Soon-cheol Kweon , Hyung-jae Shin , Sang-hun Lee , Min-seog Choi , Che-heung Kim , Young-tack Houng
发明人： Soon-cheol Kweon , Hyung-jae Shin , Sang-hun Lee , Min-seog Choi , Che-heung Kim , Young-tack Houng
IPC分类号： F16D55/02
CPC分类号： H01H59/0009 , H01H2059/0054
摘要： A spring structure for supporting a floating member and a micro-structure having the same. The spring structure includes: at least one support post unit fixed to a substrate; and at least one spring unit having a first spring connected to the support post unit and extending in a predetermined direction from the support post unit, a second spring member connected to a floating member and extending in the same direction as the first spring unit from the floating member, and a connection member arranged normal to the first and second spring members and interconnecting the tip ends of the first and second spring members. Because the first spring member and the second spring member are arranged to be expanded or contracted along with the floating member when the temperature changes, the first and second spring members are not subject to stress caused due to the difference in thermal expansion coefficient.
摘要翻译：用于支撑浮动元件的弹簧结构和具有该浮动元件的微结构。弹簧结构包括：固定到基板的至少一个支撑柱单元; 以及至少一个弹簧单元，其具有连接到所述支撑柱单元并且沿着预定方向从所述支撑柱单元延伸的第一弹簧;第二弹簧构件，其连接到浮动构件并沿与所述第一弹簧单元相同的方向从所述第一弹簧单元延伸; 浮动构件和与第一和第二弹簧构件正交布置并且互连第一和第二弹簧构件的末端的连接构件。由于第一弹簧构件和第二弹簧构件布置成随着温度变化而与浮动构件一起膨胀或收缩，所以第一和第二弹簧构件不会由于热膨胀系数的差异而产生应力。

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