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1. 发明授权

US07545081B2 Piezoelectric RF MEMS device and method of fabricating the same 失效
标题翻译：压电RF MEMS器件及其制造方法
公开(公告)号：US07545081B2
公开(公告)日：2009-06-09
申请号：US11594813
申请日：2006-11-09
申请人： Jong-seok Kim , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Chang-seung Lee , Young-tack Houng , Che-heung Kim
发明人： Jong-seok Kim , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Chang-seung Lee , Young-tack Houng , Che-heung Kim
IPC分类号： H01L41/08
CPC分类号： H01H57/00 , H01L41/094 , H01L41/314 , H01L41/33
摘要： A piezoelectric RF micro electro mechanical system (MEMS) device and a method of fabricating the same are provided, in which the RF MEMS device is driven upward at a low voltage based on a piezoelectric effect. The piezoelectric RF MEMS device includes an upper substrate provided with an RF output signal line, a piezoelectric actuator positioned below the RF output signal line, and a lower substrate provided with a cavity so that one end of the piezoelectric actuator is fixed to the lower substrate and its other end is movably spaced apart from the upper and lower substrates, wherein the piezoelectric actuator is provided with an RF input signal line thereon, and a contact pad is provided to connect the RF output signal line with the RF input signal line when the piezoelectric actuator is driven upward. A method of fabricating a piezoelectric RF MEMS device includes providing an upper substrate including an RF output signal line, providing a lower substrate including a piezoelectric actuator having an RF input signal line corresponding to the RF output signal line, and assembling the upper substrate and the lower substrate.
摘要翻译：提供了一种压电RF微机电系统（MEMS）器件及其制造方法，其中基于压电效应，RF MEMS器件以低电压向上驱动。压电RF MEMS器件包括：设置有RF输出信号线的上基板，位于RF输出信号线下方的压电致动器;以及设置有空腔的下基板，使得压电致动器的一端固定到下基板并且其另一端与上基板和下基板可移动地间隔开，其中压电致动器在其上设置有RF输入信号线，并且提供接触焊盘以将RF输出信号线与RF输入信号线连接，压电致动器被向上驱动。制造压电RF MEMS器件的方法包括提供包括RF输出信号线的上基板，提供包括具有对应于RF输出信号线的RF输入信号线的压电致动器的下基板，以及组装上基板和下基板。

2. 发明申请

US20070120445A1 Piezoelectric RF MEMS device and method of fabricating the same 失效
标题翻译：压电RF MEMS器件及其制造方法
公开(公告)号：US20070120445A1
公开(公告)日：2007-05-31
申请号：US11594813
申请日：2006-11-09
申请人： Jong-seok Kim , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Chang-seung Lee , Young-tack Houng , Che-heung Kim
发明人： Jong-seok Kim , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Chang-seung Lee , Young-tack Houng , Che-heung Kim
IPC分类号： H01L41/053
CPC分类号： H01H57/00 , H01L41/094 , H01L41/314 , H01L41/33
摘要： A piezoelectric RF micro electro mechanical system (MEMS) device and a method of fabricating the same are provided, in which the RF MEMS device is driven upward at a low voltage based on a piezoelectric effect. The piezoelectric RF MEMS device includes an upper substrate provided with an RF output signal line, a piezoelectric actuator positioned below the RF output signal line, and a lower substrate provided with a cavity so that one end of the piezoelectric actuator is fixed to the lower substrate and its other end is movably spaced apart from the upper and lower substrates, wherein the piezoelectric actuator is provided with an RF input signal line thereon, and a contact pad is provided to connect the RF output signal line with the RF input signal line when the piezoelectric actuator is driven upward. A method of fabricating a piezoelectric RF MEMS device includes providing an upper substrate including an RF output signal line, providing a lower substrate including a piezoelectric actuator having an RF input signal line corresponding to the RF output signal line, and assembling the upper substrate and the lower substrate.
摘要翻译：提供了一种压电RF微机电系统（MEMS）器件及其制造方法，其中基于压电效应，RF MEMS器件以低电压向上驱动。压电RF MEMS器件包括：设置有RF输出信号线的上基板，位于RF输出信号线下方的压电致动器;以及设置有空腔的下基板，使得压电致动器的一端固定到下基板并且其另一端与上基板和下基板可移动地间隔开，其中压电致动器在其上设置有RF输入信号线，并且提供接触焊盘以将RF输出信号线与RF输入信号线连接，压电致动器被向上驱动。制造压电RF MEMS器件的方法包括提供包括RF输出信号线的上基板，提供包括具有对应于RF输出信号线的RF输入信号线的压电致动器的下基板，以及组装上基板和下基板。

3. 发明授权

US07728703B2 RF MEMS switch and method for fabricating the same 失效
标题翻译： RF MEMS开关及其制造方法
公开(公告)号：US07728703B2
公开(公告)日：2010-06-01
申请号：US11396573
申请日：2006-04-04
申请人： Jong-seok Kim , Sang-wook Kwon , Dong-kyun Kim , Che-heung Kim , Sang-hun Lee , Young-tack Houng , Chang-seung Lee , In-sang Song
发明人： Jong-seok Kim , Sang-wook Kwon , Dong-kyun Kim , Che-heung Kim , Sang-hun Lee , Young-tack Houng , Chang-seung Lee , In-sang Song
IPC分类号： H01P1/10 , H01H11/04 , H01H9/00 , H01H57/00
CPC分类号： H01P1/127 , H01H59/0009 , H01H2057/006 , Y10T29/49002 , Y10T29/49016 , Y10T29/4913 , Y10T29/49144 , Y10T29/49155
摘要： An RF MEMS switch and a method for fabricating the same are disclosed, in which the RF MEMS device is down driven at a low voltage using a piezoelectric effect. The RF MEMS switch includes a substrate provided with RF signal lines and a cavity, a cantilever positioned on the cavity, having one end fixed to the substrate, and a contact pad connecting the RF signal lines with the cantilever in contact with the RF signal lines when the cantilever is down driven.
摘要翻译：公开了一种RF MEMS开关及其制造方法，其中使用压电效应将RF MEMS器件以低电压下降驱动。 RF MEMS开关包括设置有RF信号线和空腔的基板，位于空腔上的悬臂，其一端固定到基板，以及将RF信号线与与RF信号线接触的悬臂连接的接触垫当悬臂下降驱动时。

4. 发明申请

US20070115081A1 RF MEMS switch and method for fabricating the same 失效
标题翻译： RF MEMS开关及其制造方法
公开(公告)号：US20070115081A1
公开(公告)日：2007-05-24
申请号：US11396573
申请日：2006-04-04
申请人： Jong-seok Kim , Sang-wook Kwon , Dong-kyun Kim , Che-heung Kim , Sang-hun Lee , Young-tack Houng , Chang-seung Lee , In-sang Song
发明人： Jong-seok Kim , Sang-wook Kwon , Dong-kyun Kim , Che-heung Kim , Sang-hun Lee , Young-tack Houng , Chang-seung Lee , In-sang Song
IPC分类号： H01P1/10
CPC分类号： H01P1/127 , H01H59/0009 , H01H2057/006 , Y10T29/49002 , Y10T29/49016 , Y10T29/4913 , Y10T29/49144 , Y10T29/49155
摘要： An RF MEMS switch and a method for fabricating the same are disclosed, in which the RF MEMS device is down driven at a low voltage using a piezoelectric effect. The RF MEMS switch includes a substrate provided with RF signal lines and a cavity, a cantilever positioned on the cavity, having one end fixed to the substrate, and a contact pad connecting the RF signal lines with the cantilever in contact with the RF signal lines when the cantilever is down driven.
摘要翻译：公开了一种RF MEMS开关及其制造方法，其中使用压电效应将RF MEMS器件以低电压下降驱动。 RF MEMS开关包括设置有RF信号线和空腔的基板，位于空腔上的悬臂，其一端固定到基板，以及将RF信号线与与RF信号线接触的悬臂连接的接触垫当悬臂下降驱动时。

5. 发明申请

US20070195464A1 Downward type MEMS switch and method for fabricating the same 有权
标题翻译：向下型MEMS开关及其制造方法
公开(公告)号：US20070195464A1
公开(公告)日：2007-08-23
申请号：US11581435
申请日：2006-10-17
申请人： Sang-wook Kwon , Jong-seok Kim , In-sang Song , Sang-hun Lee , Dong-kyun Kim , Jung-han Choi , Young-tack Houng , Che-heung Kim
发明人： Sang-wook Kwon , Jong-seok Kim , In-sang Song , Sang-hun Lee , Dong-kyun Kim , Jung-han Choi , Young-tack Houng , Che-heung Kim
IPC分类号： G11B5/48
CPC分类号： H01H1/0036 , H01H2057/006 , H01P1/127
摘要： A downward type micro electro mechanical system (EMS) switch and a method of fabricating the same is provided. The downward type MEMS switch includes first and second cavities formed in a substrate, first and second actuators formed on upper portions of the first and second cavities, first and second fixing lines formed on an upper surface of the substrate and not overlapped with the first and second cavities, and a contact pad which is spaced apart at a predetermined distance from surfaces of the first fixing line and the second fixing line but which can be contacted with the first fixing line and the second fixing line when the first actuator and the second actuator are driven. The contact pad, which is actuated downward by piezoelectricity, is fabricated as it shares a layer with a RF signal line, after the RF signal line is fabricated.
摘要翻译：提供了向下型的微机电系统（EMS）开关及其制造方法。向下型MEMS开关包括形成在基板中的第一和第二空腔，形成在第一和第二空腔的上部的第一和第二致动器，形成在基板的上表面上的第一和第二固定线，第二空腔和接触垫，其间距第一固定线和第二固定线的表面隔开预定距离，但是当第一致动器和第二致动器能够与第一固定线和第二固定线接触时被驱动。在RF信号线被制造之后，通过压电性向下致动的接触垫被制造成与RF信号线共享一层。

6. 发明授权

US08018308B2 Downward type MEMS switch and method for fabricating the same 有权
标题翻译：向下型MEMS开关及其制造方法
公开(公告)号：US08018308B2
公开(公告)日：2011-09-13
申请号：US11581435
申请日：2006-10-17
申请人： Sang-wook Kwon , Jong-seok Kim , In-sang Song , Sang-hun Lee , Dong-kyun Kim , Jung-han Choi , Young-tack Houng , Che-heung Kim
发明人： Sang-wook Kwon , Jong-seok Kim , In-sang Song , Sang-hun Lee , Dong-kyun Kim , Jung-han Choi , Young-tack Houng , Che-heung Kim
IPC分类号： H01H51/22
CPC分类号： H01H1/0036 , H01H2057/006 , H01P1/127
摘要： A downward type micro electro mechanical system (EMS) switch and a method of fabricating the same is provided. The downward type MEMS switch includes first and second cavities formed in a substrate, first and second actuators formed on upper portions of the first and second cavities, first and second fixing lines formed on an upper surface of the substrate and not overlapped with the first and second cavities, and a contact pad which is spaced apart at a predetermined distance from surfaces of the first fixing line and the second fixing line but which can be contacted with the first fixing line and the second fixing line when the first actuator and the second actuator are driven. The contact pad, which is actuated downward by piezoelectricity, is fabricated as it shares a layer with a RF signal line, after the RF signal line is fabricated.
摘要翻译：提供了向下型的微机电系统（EMS）开关及其制造方法。向下型MEMS开关包括形成在基板中的第一和第二空腔，形成在第一和第二空腔的上部的第一和第二致动器，形成在基板的上表面上的第一和第二固定线，第二空腔和接触垫，其间距第一固定线和第二固定线的表面隔开预定距离，但是当第一致动器和第二致动器能够与第一固定线和第二固定线接触时被驱动。在RF信号线被制造之后，通过压电性向下致动的接触垫被制造成与RF信号线共享一层。

7. 发明授权

US07759591B2 Pneumatic MEMS switch and method of fabricating the same 有权
标题翻译：气动MEMS开关及其制造方法
公开(公告)号：US07759591B2
公开(公告)日：2010-07-20
申请号：US11513036
申请日：2006-08-31
申请人： Che-heung Kim , Hyung Choi , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Dong-kyun Kim , Young-tack Hong , Jong-seok Kim , Chang-seung Lee
发明人： Che-heung Kim , Hyung Choi , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Dong-kyun Kim , Young-tack Hong , Jong-seok Kim , Chang-seung Lee
IPC分类号： H01H57/00
CPC分类号： H01H59/0009 , H01H35/346 , H01H2221/02
摘要： A pneumatic micro electro mechanical system switch includes a substrate, a pneumatic actuating unit disposed on the substrate; the pneumatic actuating unit having a plurality of variable air cavities communicating such that when one of the plurality of variable air cavities is compressed, the rest are expanded; a signal line having a plurality of switching lines, each of which passes through a corresponding one of the plurality of variable air cavities and has switching ends disposed in a spaced-apart relation with each other in the corresponding one of the plurality of variable air cavities; a movable switching unit to connect the first and the second switching ends of each of the plurality of switching lines if one of the plurality of variable air cavities is compressed; and a driving unit to drive the pneumatic actuating unit so as to selectively compress the plurality of variable air cavities.
摘要翻译：气动微机电系统开关包括基板，设置在基板上的气动执行单元; 所述气动致动单元具有多个可变空气腔，所述多个可变空气腔连通，使得当所述多个可变空气腔中的一个被压缩时，其余部分被膨胀; 信号线具有多个切换线，每个切换线通过多个可变空气腔中的相应一个，并且具有相互间隔开的多个可变空气腔中相应的一个中的彼此间隔开的切换端 ; 如果多个可变空气腔中的一个被压缩，则可移动切换单元连接多个切换线中的每一个的第一和第二切换端; 以及驱动单元以驱动气动致动单元，以选择性地压缩多个可变空气腔。

8. 发明授权

US07545246B2 Piezoelectric MEMS switch and method of fabricating the same 有权
标题翻译：压电MEMS开关及其制造方法
公开(公告)号：US07545246B2
公开(公告)日：2009-06-09
申请号：US11515717
申请日：2006-09-06
申请人： Jong-seok Kim , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Chang-seung Lee , Young-tack Hong , Che-heung Kim
发明人： Jong-seok Kim , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Chang-seung Lee , Young-tack Hong , Che-heung Kim
IPC分类号： H01H51/22
CPC分类号： H01H57/00 , H01H2057/006 , Y10T403/7026
摘要： A piezoelectric Micro Electro Mechanical System (MEMS) switch includes a substrate, first and second fixed signal lines symmetrically formed in a spaced-apart relation to each other on the substrate to have a predetermined gap therebetween, a piezoelectric actuator disposed in alignment with the first and the second fixed signal lines in the predetermined gap, and having a first end supported on the substrate to allow the piezoelectric actuator to be movable up and down, and a movable signal line having a first end connected to one of the first and the second fixed signal lines, and a second end configured to be in contact with, or separate from the other of the first and second fixed signal lines, the movable signal line at least one side thereof being connected to an upper surface of the piezoelectric actuator.
摘要翻译：一种压电微电子机械系统（MEMS）开关包括基板，第一和第二固定信号线，其在基板上以彼此间隔开的关系对称地形成，以在其间具有预定的间隙;压电致动器，其布置成与第一并且所述第二固定信号线处于所述预定间隙中，并且具有支撑在所述基板上的第一端，以允许所述压电致动器能够上下移动;以及可移动信号线，其具有连接到所述第一和第二固定信号线，以及构造成与第一和第二固定信号线中的另一个接触或分离的第二端，可移动信号线的至少一侧连接到压电致动器的上表面。

9. 发明申请

US20070231065A1 Piezoelectric MEMS switch and method of fabricating the same 有权
标题翻译：压电MEMS开关及其制造方法
公开(公告)号：US20070231065A1
公开(公告)日：2007-10-04
申请号：US11515717
申请日：2006-09-06
申请人： Jong-seok Kim , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Chang-seung Lee , Young-tack Hong , Che-heung Kim
发明人： Jong-seok Kim , In-sang Song , Sang-hun Lee , Sang-wook Kwon , Chang-seung Lee , Young-tack Hong , Che-heung Kim
IPC分类号： B25G3/28
CPC分类号： H01H57/00 , H01H2057/006 , Y10T403/7026
摘要： A piezoelectric Micro Electro Mechanical System (MEMS) switch includes a substrate, first and second fixed signal lines symmetrically formed in a spaced-apart relation to each other on the substrate to have a predetermined gap therebetween, a piezoelectric actuator disposed in alignment with the first and the second fixed signal lines in the predetermined gap, and having a first end supported on the substrate to allow the piezoelectric actuator to be movable up and down, and a movable signal line having a first end connected to one of the first and the second fixed signal lines, and a second end configured to be in contact with, or separate from the other of the first and second fixed signal lines, the movable signal line at least one side thereof being connected to an upper surface of the piezoelectric actuator.
摘要翻译：一种压电微电子机械系统（MEMS）开关包括基板，第一和第二固定信号线，其在基板上以彼此间隔开的关系对称地形成，以在其间具有预定的间隙;压电致动器，其布置成与第一并且所述第二固定信号线处于所述预定间隙中，并且具有支撑在所述基板上的第一端，以允许所述压电致动器能够上下移动;以及可移动信号线，其具有连接到所述第一和第二固定信号线，以及构造成与第一和第二固定信号线中的另一个接触或分离的第二端，可移动信号线的至少一侧连接到压电致动器的上表面。

10. 发明授权

US07446634B2 MEMS switch and manufacturing method thereof 有权
标题翻译： MEMS开关及其制造方法
公开(公告)号：US07446634B2
公开(公告)日：2008-11-04
申请号：US11429364
申请日：2006-05-08
申请人： Hee-moon Jeong , Sang-wook Kwon , Che-heung Kim , Jong-seok Kim , Jun-o Kim , Young-tack Hong , In-sang Song , Sang-hun Lee
发明人： Hee-moon Jeong , Sang-wook Kwon , Che-heung Kim , Jong-seok Kim , Jun-o Kim , Young-tack Hong , In-sang Song , Sang-hun Lee
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H2059/0054
摘要： A MEMS switch including a substrate at least one fixed electrode formed on top of the substrate and at least one restoring electrode formed on top of the substrate and formed at a lateral surface of the fixed electrode. At least one signal line is formed on top of the substrate and has a switching contact part. A movable electrode is distantly connected from the top of the substrate at a predetermined space via an elastic connector on the substrate and at least one contact member formed on a bottom surface of the movable electrode or on a bottom surface of the elastic connector for attachment to or detachment from the switching contact part. At least one pivot boss is formed on either the bottom surface of the movable electrode or on the top of the substrate.
摘要翻译：一种MEMS开关，其包括形成在所述基板的顶部上的至少一个固定电极的基板和形成在所述基板的顶部上并形成在所述固定电极的侧表面上的至少一个恢复电极。至少一个信号线形成在基板的顶部上并且具有开关接触部分。可移动电极通过基板上的弹性连接器在预定空间处从基板的顶部远离连接，以及形成在可动电极的底表面上或弹性连接器的底表面上的至少一个接触件，用于附接到或从开关接触部分拆卸。至少一个枢转凸起形成在可动电极的底表面上或衬底的顶部上。

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