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    • 5. 发明申请
    • STRUCTURE OF TMR AND FABRICATION METHOD OF INTEGRATED 3-AXIS MAGNETIC FIELD SENSOR AND SENSING CIRCUIT
    • 集成三轴磁场传感器和感应电路的TMR和制造方法的结构
    • US20120068698A1
    • 2012-03-22
    • US13097083
    • 2011-04-29
    • Young-Shying ChenCheng-Tyng Yen
    • Young-Shying ChenCheng-Tyng Yen
    • G01R33/02H01L43/12H01L29/82
    • G01R33/098H01L27/22
    • A structure of TMR includes two magnetic tunneling junction (MTJ) devices with the same pattern and same magnetic film stack on a same conducting bottom electrode and a parallel connection of conducting top electrode. Each MTJ device includes a pinned layer on the bottom electrode, having a pinned magnetization; a non-magnetic tunneling on the pinned layer; and a free layer on the tunneling layer, having a free magnetization. These two MTJ devices have a collinear of easy-axis and their pinned magnetizations all are parallel to a same pinned direction which has an angle of 45 degree to easy-axis; their free magnetizations initially are parallel to the easy-axis but directions are mutual anti-parallel by applying a current generated ampere field. The magnetic field sensing direction is perpendicular to the easy-axis on the substrate.
    • TMR的结构包括在相同的导电底部电极上具有相同图案和相同磁性膜堆叠的两个磁性隧道结(MTJ)器件和导电顶部电极的并联连接。 每个MTJ装置包括在底部电极上的固定层,具有钉扎​​磁化; 钉扎层上的非磁性隧道; 和隧道层上的自由层,具有自由磁化强度。 这两个MTJ装置具有易轴共线,并且它们的钉扎磁化全部平行于与易轴成45度角的相同销钉方向; 它们的自由磁化最初平行于易轴,但通过施加电流产生的安培场,方向是相互反平行的。 磁场感应方向垂直于衬底上的易轴。