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    • 2. 发明授权
    • Semiconductor light receiving element
    • 半导体光接收元件
    • US06734515B1
    • 2004-05-11
    • US09787502
    • 2001-03-16
    • Kazuyuki TadatomoHiroaki OkagawaYouichiro OhuchiMasahiro KotoKazumasa HiramatsuYutaka HamamuraSumito Shimizu
    • Kazuyuki TadatomoHiroaki OkagawaYouichiro OhuchiMasahiro KotoKazumasa HiramatsuYutaka HamamuraSumito Shimizu
    • H01L2714
    • H01L31/0304H01L31/022408H01L31/1035H01L31/108Y02E10/544
    • A semiconductor light receiving element having a light receiving layer (1) formed from a GaN group semiconductor, and an electrode (2) formed on one surface of the light receiving layer as a light receiving surface (1a) in such a way that the light (L) can enter the light receiving layer is provided. When the light receiving element is of a Schottky barrier type, the aforementioned electrode (2) contains at least a Schottky electrode, which is formed in such a way that, on the light receiving surface (1a), the total length of the boundary lines between areas covered with the Schottky electrode and exposed areas is longer than the length of the outer periphery of the light receiving surface (1a). In addition, when the light receiving element is of a photoconductive type, the aforementioned light receiving layer (1) is a first conductivity type i layer, and the aforementioned electrode (2) is an ohmic electrode of one polarity, and an ohmic electrode of the other polarity is formed directly or via a first conductivity type and low resistance GaN group semiconductor layer on the other surface of the light receiving layer (1).
    • 具有由GaN族半导体形成的受光层(1)的半导体光接收元件和形成在光接收层的一个表面上的光接收表面(1a)的电极(2),使得光 (L)可以进入光接收层。 当受光元件为肖特基势垒型时,上述电极(2)至少含有肖特基电极,其形成为在受光面(1a)上形成的边界线的总长度 在被肖特基电极覆盖的区域和暴露区域之间的距离比受光面(1a)的外周长度长。 此外,当光接收元件是光电导型时,上述光接收层(1)是第一导电型i层,上述电极(2)是一极性欧姆电极,欧姆电极 另一极性直接或经由光接收层(1)的另一个表面上的第一导电类型和低电阻GaN族半导体层形成。