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    • 3. 发明授权
    • Thin film transistor substrate, manufacturing method thereof, liquid
crystal display panel and liquid crystal display equipment
    • 薄膜晶体管基板,其制造方法,液晶显示面板和液晶显示设备
    • US5889573A
    • 1999-03-30
    • US928719
    • 1997-09-12
    • Hideaki YamamotoHaruo MatsumaruYasuo TanakaKen TsutsuiToshihisa TsukadaKazuo ShirahashiAkira SasanoYuka Matsukawa
    • Hideaki YamamotoHaruo MatsumaruYasuo TanakaKen TsutsuiToshihisa TsukadaKazuo ShirahashiAkira SasanoYuka Matsukawa
    • G02F1/1343G02F1/1345G02F1/136G02F1/1362G02F1/1368G09F9/30G09G3/36H01L21/3205H01L21/336H01L27/12H01L29/49H01L29/78H01L29/786H01L29/04
    • G02F1/136286G02F1/1345G02F1/136213H01L29/4908H01L2924/0002
    • The present invention concerns an active-matrix addressed TFT substrate using a thin film transistor, a manufacturing method and an anodic oxidation method thereof, a liquid crystal display panel using the TFT substrate and a liquid crystal display equipment using the liquid crystal display panel and, more in particular, it relates to a structure and a manufacturing method which enables to improve the characteristics thereof.In the present invention, Cr or Ta is used for gate terminals, aluminum or a metal mainly composed of aluminum is used for gate bus-lines extended therefrom, gate electrodes and thin film capacitances (additional capacitance, storage capacitance) and an anodic oxidized film composed of the metal and free from defect is used for at least one of gate insulators, dielectric films of the thin film capacitances and interlayer insulation films for the intersections between the bus-lines. In a more preferred structure, the anodic oxidized film is used for all of the gate insulators, the dielectric films for the thin film capacitances and the interlayer insulation films for the intersections between the bus-lines.The present invention also relates to a method of selectively forming an anodic oxidized film on an aluminum pattern. That is, in a case of forming a selective oxidation mask to a desired region on the aluminum pattern with a positive type photoresist, in the present invention, an angle (.theta.) formed between the selective oxidation mask and the aluminum pattern is made as: .theta..gtoreq.110-20T (T: film thickness of the positive type photoresist).
    • 本发明涉及使用薄膜晶体管的有源矩阵寻址TFT基板,其制造方法和阳极氧化方法,使用TFT基板的液晶显示面板和使用该液晶显示面板的液晶显示设备, 更具体地,涉及能够改善其特性的结构和制造方法。 在本发明中,Cr或Ta用于栅极端子,铝或主要由铝组成的金属用于从其延伸的栅极总线,栅电极和薄膜电容(附加电容,存储电容)和阳极氧化膜 由金属构成并且没有缺陷用于栅极绝缘体,薄膜电容的介电膜和用于总线之间的交叉点的层间绝缘膜中的至少一个。 在更优选的结构中,阳极氧化膜用于所有栅极绝缘体,用于薄膜电容的介电膜和用于总线之间的交叉点的层间绝缘膜。 本发明还涉及在铝图案上选择性地形成阳极氧化膜的方法。 也就是说,在使用正型光致抗蚀剂在铝图案上的期望区域上形成选择性氧化掩模的情况下,在本发明中,在选择性氧化掩模和铝图案之间形成的角度(θ)为: θ= 110-20T(T:正型光致抗蚀剂的膜厚度)。
    • 7. 发明授权
    • Color solid-state imager
    • 彩色固态成像仪
    • US4500915A
    • 1985-02-19
    • US423446
    • 1982-09-24
    • Norio KoikeToshihisa TsukadaToru BajiAkira Sasano
    • Norio KoikeToshihisa TsukadaToru BajiAkira Sasano
    • H01L29/762H01L21/339H01L27/148H04N9/07
    • H01L27/14843H01L27/14868H04N3/1575
    • The present invention consists in providing a CCD type color solid-state imager in which color signals respectively separated in time can be derived from picture elements for respective colors arrayed in the shape of a matrix and which permits interlacing without degrading a resolution and without causing image lag. Concretely, pairs of CCD shift registers which are electrically insulated and separated and which run in the vertical direction are arrayed in the horizontal direction, signal charges stored in adjacent picture elements are sent into the individual opposing CCD registers through transfer gates arrayed in a checkerboard pattern, and signal charges transferred in time sequence are distributed to a plurality of CCD shift registers which run in the horizontal direction, whereby a CCD type color solid-state imager having a high resolution and exhibiting no image lag is obtained.
    • 本发明的目的在于提供一种CCD型彩色固态成像器,其中分别在时间上分离出的色信号可以从以矩阵形排列的各种颜色的图像元素中导出,并且允许隔行扫描而不降低分辨率并且不引起图像 落后。 具体地说,电绝缘和分离并沿垂直方向延伸的CCD对移位寄存器沿水平方向排列,存储在相邻像素中的信号电荷通过排列在棋盘图案中的传输门发送到各个相对的CCD寄存器 ,并且以时间顺序传送的信号电荷被分配到在水平方向上运行的多个CCD移位寄存器,由此获得具有高分辨率且不显示图像滞后的CCD型彩色固态成像器。