会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 1. 发明授权
    • Apparatus including a specimen tilt mechanism for measuring
electromagnetic field distribution in the specimen using a focused
electron beam
    • 包括用于使用聚焦电子束测量样本中的电磁场分布的样本倾斜机构的装置
    • US5572122A
    • 1996-11-05
    • US141077
    • 1993-10-26
    • Yusuke YajimaYoshio TakahashiMasakazu IchikawaShigeyuki Hosoki
    • Yusuke YajimaYoshio TakahashiMasakazu IchikawaShigeyuki Hosoki
    • G01N23/04G01R31/305G01R33/028G01R33/12G01R33/02G01R33/025
    • G01R31/305
    • An apparatus for measuring an electromagnetic field distribution using a focused electron beam can measure the electromagnetic field distribution in a specimen with high resolution and high reliability. A focused electron beam radiation system irradiates a specimen with a focused electron beam. A specimen tilt mechanism tilts a specimen by 180.degree. about a tilt axis that is perpendicular to the optical axis of the focused electron beam. An electron beam position detector measures the direction and quantity of the deflection given to the focused electron beam when it is transmitted through the specimen. Further, a processing system calculates the direction and the intensity of an electric field, and the direction and the intensity of a magnetic field separately at a point on the specimen through which the focused electron beam is transmitted, from the data on the direction and the quantity of the deflection of the focused electron beam measured by the electron beam position detector before and after the turnover of the specimen by the specimen tilt mechanism. Thus, an electric field and a magnetic field in a specimen can be separately observed independently of each other.
    • 使用聚焦电子束测量电磁场分布的装置可以以高分辨率和高可靠性测量样品中的电磁场分布。 聚焦电子束辐射系统用聚焦电子束照射样品。 样品倾斜机构围绕垂直于聚焦电子束的光轴的倾斜轴将样品倾斜180度。 电子束位置检测器测量当聚焦电子束透过样品时给予聚焦电子束的偏转的方向和数量。 此外,处理系统从方向和方向上的数据分别计算电场的方向和强度,以及分别在聚焦电子束透过的样本上的点上的磁场的方向和强度 电子束位置检测器在样品倾倒机构转换之前和之后测量的聚焦电子束的偏转量。 因此,可以彼此独立地分别观察试样中的电场和磁场。
    • 2. 发明授权
    • Transmission electron microscope and method of observing magnetic
phenomena using its apparatus
    • 透射电子显微镜及其装置观察磁现象的方法
    • US5436449A
    • 1995-07-25
    • US131741
    • 1993-10-05
    • Yoshio TakahashiYusuke Yajima
    • Yoshio TakahashiYusuke Yajima
    • H01J37/20G01R33/02H01J37/26H01J37/295
    • H01J37/268G01R33/0213H01J2237/24495H01J2237/24564H01J2237/2802
    • When observing a magnetization image on a magnetic thin film by means of a scanning transmission electron microscope, the effect of a stray magnetic field is made smaller than that of a magnetization in order to produce a clear magnetic structure of the magnetization image. To relatively reduce the effect of the stray magnetic field in comparison to that of the magnetization, the scanning transmission electron microscope is equipped with a specimen-holder driving means which can rotate the surface of a specimen 5 by more than 90 degrees with an axis parallel to the optical path of an electron beam 1 taken as a center and incline the surface of the specimen 5 around a center axis 22 perpendicular to an axis 24 rotated earlier over the surface of the specimen 5 with respect to a magnetic-recording track direction and also perpendicular to the axis parallel to the optical path of the electron beam 1. In the actual observation, however, a limit is put on the angle of rotation by which the surface of the specimen 5 is rotated with respect to the recording track direction.
    • 当通过扫描透射电子显微镜观察磁性薄膜上的磁化图像时,使杂散磁场的作用小于磁化的影响,以产生磁化图像的透明磁结构。 为了相对地减小杂散磁场与磁化磁场的影响,扫描透射电子显微镜配备有试样保持器驱动装置,其能够使试样5的表面以轴线平行旋转超过90度 以电子束1的光路作为中心,并且使试样5的表面围绕垂直于样品5的表面上相对于磁记录磁道方向转动的轴线24的中心轴线22倾斜, 也垂直于与电子束1的光路平行的轴。然而,在实际观察中,限制被检体5的表面相对于记录轨道方向旋转的旋转角度。
    • 3. 发明授权
    • Electron microscope and electron microscopy method
    • 电子显微镜和电子显微镜法
    • US5936244A
    • 1999-08-10
    • US973898
    • 1997-12-18
    • Yusuke YajimaYoshio TakahashiHiroshi SuzukiKatsuhiro Kuroda
    • Yusuke YajimaYoshio TakahashiHiroshi SuzukiKatsuhiro Kuroda
    • H01J37/26H01J37/244
    • H01J37/228H01J37/268H01J2237/2445H01J2237/2455
    • An electron microscope for observing a magnetization state of a specimen with high resolution and an electron microscopic method. The electron microscope comprises an electron beam irradiating device including a scanning coil 3 and an objective lens 4 to irradiate an electron beam 2 emitted from an electron source 1 on a desired part of a specimen 51, and a circularly polarized light detector including a quarter wave plate 8, a polarizer 9 and a photodetector 11 to detect circularly polarized light generated from the electron beam irradiated part of the specimen 51. Since the intensity of the circularly polarized light generated from the specimen irradiated with the electron beam depends on the direction of magnetization in the electron beam irradiated part and the detecting direction, the distribution of magnetization can be measured by observing a scanning image in the form of a luminance signal indicative of the intensity of the circularly polarized light while scanning the electron beam irradiated part on the surface of the specimen.
    • PCT No.PCT / JP95 / 01273 Sec。 371 1997年12月18日第 102(e)日期1997年12月18日PCT提交1995年6月26日PCT公布。 出版物WO97 / 01862 日期1997年1月16日用电子显微镜观察高分辨率的试样的磁化状态的电子显微镜。 电子显微镜包括电子束照射装置,其包括扫描线圈3和物镜4,以将从电子源1发射的电子束2照射在样本51的期望部分上,以及包括四分之一波的圆偏振光检测器 板8,偏振器9和光电检测器11,用于检测从样本51的电子束照射部分产生的圆偏振光。由于用电子束照射的样本产生的圆偏振光的强度取决于磁化方向 在电子束照射部分和检测方向上,可以通过观察表示圆偏振光的强度的亮度信号的形式的扫描图像,同时扫描表面上的电子束照射部分来测量磁化分布 标本。