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    • 2. 发明授权
    • Radiation-sensitive resin composition
    • 辐射敏感树脂组合物
    • US6120972A
    • 2000-09-19
    • US136051
    • 1998-08-18
    • Shin-ichiro IwanagaEiichi KobayashiTakayoshi TanabeKazuo Kawaguchi
    • Shin-ichiro IwanagaEiichi KobayashiTakayoshi TanabeKazuo Kawaguchi
    • G03F7/004G03F7/039
    • G03F7/0045G03F7/039
    • A radiation-sensitive resin composition comprising (A) a copolymer which comprises (a) a repeating unit (I) formed by cleavage of a carbon--carbon double bond of a monomer having one polymerizable carbon--carbon double bond and (b) a repeating unit (II) formed by cleavage of a carbon--carbon double bond of a monomer having two or more polymerizable carbon--carbon double bonds and at least one divalent group decomposed by an acid of the following formulas (1) or (2), ##STR1## wherein R.sup.1, R.sup.2, R.sup.3 and R.sup.4 are an alkyl group having 1-5 carbon atoms or an aryl group having 6-14 carbon atoms individually, said monomer having a structure in which each carbon--carbon double bond combines via said divalent group, and (B) a photoacid generator. The radiation-sensitive resin composition exhibits excellent sensitivity and resolution, fewer effect from the swing curves, excellent pattern profile, and superior heat resistance, high sensitivity to ultraviolet rays, far ultraviolet rays, X-rays, and various types of radiation such as charged particle rays, and is useful as a chemically amplified positive tone resist used in the manufacture of integrated circuit devices.
    • 一种辐射敏感性树脂组合物,其包含(A)共聚物,其包含(a)通过裂解具有一个可聚合碳 - 碳双键的单体的碳 - 碳双键形成的重复单元(I)和(b)重复 通过裂解具有两个或多个可聚合碳 - 碳双键的单体的碳 - 碳双键形成的单元(II)和由下式(1)或(2)的酸分解的至少一个二价基团,其中 R1,R2,R3和R4分别是具有1-5个碳原子的烷基或具有6-14个碳原子的芳基,所述单体具有其中每个碳 - 碳双键通过所述二价基团结合的结构和( B)光致酸发生器。 辐射敏感性树脂组合物表现出优异的灵敏度和分辨率,较少的挥发曲线影响,优异的图案轮廓和优异的耐热性,对紫外线,远紫外线,X射线以及各种类型的辐射如带电的高灵敏度 粒子射线,并且可用作用于制造集成电路器件的化学放大正色调抗蚀剂。
    • 5. 发明授权
    • Radiation sensitive resin composition
    • 辐射敏感树脂组合物
    • US6136500A
    • 2000-10-24
    • US135855
    • 1998-08-18
    • Eiichi KobayashiMakoto ShimizuTakayoshi TanabeShin-ichiro Iwanaga
    • Eiichi KobayashiMakoto ShimizuTakayoshi TanabeShin-ichiro Iwanaga
    • G03F7/004G03F7/038G03F7/039
    • G03F7/004Y10S430/115Y10S430/122
    • Positive as well as negative radiation sensitive resin compositions that, in addition to being capable of providing excellent resolution and pattern profile, are particularly excellent in avoiding the problems of "nano-edge roughness" or "coating surface roughness". The positive type radiation sensitive resin composition comprises (A) (a) an acid-decomposable group-containing resin, or (b) an alkali-soluble resin and an alkali dissolution controller, and (B) a photoacid generator comprising "a compound that upon exposure to radiation generates a carboxylic acid having a boiling point of 150.degree. C. or higher", and "a compound that upon exposure to radiation generates an acid other than a carboxylic acid". The negative type radiation sensitive resin composition comprises (C) an alkali-soluble resin, (D) a cross-linking agent, and the component (B) as described above.
    • 除了能够提供优异的分辨率和图案轮廓之外,正面和负面的辐射敏感性树脂组合物在避免“纳米边缘粗糙度”或“涂层表面粗糙度”的问题方面特别优异。 正型辐射敏感性树脂组合物包含(A)(a)含酸可分解基团的树脂,或(b)碱溶性树脂和碱溶解控制剂,和(B)光酸产生剂,其包含“ 暴露于辐射后会产生沸点为150℃以上的羧酸“,”暴露于辐射后的化合物会产生羧酸以外的酸“。 负型辐射敏感性树脂组合物包含(C)碱溶性树脂,(D)交联剂和如上所述的组分(B)。
    • 7. 发明授权
    • Backlight device and liquid crystal display
    • 背光装置和液晶显示器
    • US07553060B2
    • 2009-06-30
    • US11573591
    • 2005-06-22
    • Takayoshi Tanabe
    • Takayoshi Tanabe
    • F21V7/04
    • G02B6/0068G02B6/0021G02B6/0028G02B6/0046
    • A backlight apparatus of a sidelight type includes a light guide plate having an incident face on a lateral face and a light source unit having a plurality of substrates. The plurality of the substrates are respectively disposed on the incident face side of the light guide plate such that each of substrate faces of the substrates is parallel with a light exit face of the light guide plate, and the substrates are adjacent to one another in a thickness direction of the light guide plate. A plurality of light emitting devices that emit light along the substrate faces are mounted in columns on each of the substrate faces of the plurality of the substrates such that emitting directions of the light emitting devices are directed to the incident face.
    • 背光源的背光装置包括具有在侧面上的入射面的导光板和具有多个基板的光源单元。 多个基板分别设置在导光板的入射面侧,使得基板的每个基板面与导光板的光出射面平行,并且基板彼此相邻地邻接 导光板的厚度方向。 沿着衬底面发射光的多个发光器件以多个衬底的每个衬底面上的列安装成使得发光器件的发射方向指向入射面。