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1. 发明授权

US5519686A Encoder for controlling measurements in the range of a few angstroms 失效
标题翻译：用于控制几埃范围内测量的编码器
公开(公告)号：US5519686A
公开(公告)日：1996-05-21
申请号：US438079
申请日：1995-05-08
申请人： Yoshihiro Yanagisawa , Yuko Morikawa , Hiroshi Matsuda , Haruki Kawada , Kunihiro Sakai , Hisaaki Kawade , Ken Eguchi , Eigo Kawakami , Toshimitsu Kawasa , Minoru Yoshii , Kenji Saitoh , Akihiko Yamano , Hiroyasu Nose
发明人： Yoshihiro Yanagisawa , Yuko Morikawa , Hiroshi Matsuda , Haruki Kawada , Kunihiro Sakai , Hisaaki Kawade , Ken Eguchi , Eigo Kawakami , Toshimitsu Kawasa , Minoru Yoshii , Kenji Saitoh , Akihiko Yamano , Hiroyasu Nose
IPC分类号： G01B7/00 , G01D5/244 , G01D5/245 , G01Q10/00 , G01Q20/04 , G01Q60/00 , G01Q60/10 , G01Q70/06 , G11B9/00 , G11B7/00
CPC分类号： G01D5/244 , G01B7/003 , G01D5/2451 , G11B9/1418 , G11B9/1427 , G11B9/1481 , B82Y10/00 , G01Q10/06 , G01Q60/16 , G01Q80/00 , G11B9/1472 , Y10S977/851 , Y10S977/861 , Y10S977/947
摘要： An encoder includes an electrically conductive reference scale having surface steps formed at predetermined positions; an electrically conductive probe having a tip disposed opposed to the reference scale; wherein the reference scale and the probe are relatively movable in a direction different from the opposing direction of the tip of the probe and the reference scale; a portion for applying an electrical voltage to between the reference scale and the probe; a portion for detecting a change in a tunnel current between the reference scale and the probe, to between which the electric voltage is applied by the voltage applying portion at the time of the relative movement between the scale and the probe, the detecting portion detecting the change in the tunnel current when the probe passes a position opposed to a surface step of the reference scale; and portion for detecting the amount of the relative movement between the scale and probe, on the basis of the detection by the change detecting portion.
摘要翻译：编码器包括具有形成在预定位置处的表面台阶的导电参考标尺; 导电探针，其具有与参考标尺相对设置的尖端; 其中所述参考标尺和所述探针在与所述探针的尖端和所述参考标尺的相反方向不同的方向上相对移动; 用于将电压施加到参考标尺和探针之间的部分; 用于检测参考标尺和探针之间的隧道电流变化的部分，在标尺和探头之间的相对移动时由电压施加部施加电压，检测部分检测当探针经过与参考刻度的表面台阶相对的位置时隧道电流的变化; 以及用于根据变化检测部分的检测来检测标尺和探针之间的相对移动量的部分。

2. 发明授权

US5721721A Two scanning probes information recording/reproducing system with one probe to detect atomic reference location on a recording medium 失效
标题翻译：两个扫描探针信息记录/再现系统，具有一个探针，用于检测记录介质上的原子参考位置
公开(公告)号：US5721721A
公开(公告)日：1998-02-24
申请号：US589473
申请日：1996-01-22
申请人： Yoshihiro Yanagisawa , Yuko Morikawa , Hiroshi Matsuda , Haruki Kawada , Kunihiro Sakai , Hisaaki Kawade , Ken Eguchi , Eigo Kawakami , Toshimitsu Kawase , Minoru Yoshii , Kenji Saitoh , Akihiko Yamano , Hiroyasu Nose
发明人： Yoshihiro Yanagisawa , Yuko Morikawa , Hiroshi Matsuda , Haruki Kawada , Kunihiro Sakai , Hisaaki Kawade , Ken Eguchi , Eigo Kawakami , Toshimitsu Kawase , Minoru Yoshii , Kenji Saitoh , Akihiko Yamano , Hiroyasu Nose
IPC分类号： G01B7/00 , G01D5/244 , G01D5/245 , G01Q10/00 , G01Q20/04 , G01Q60/00 , G01Q60/10 , G01Q70/06 , G11B9/00 , G11B7/00
CPC分类号： G01D5/244 , G01B7/003 , G01D5/2451 , G11B9/1418 , G11B9/1427 , G11B9/1481 , B82Y10/00 , G01Q10/06 , G01Q60/16 , G01Q80/00 , G11B9/1472 , Y10S977/851 , Y10S977/861 , Y10S977/947
摘要： An encoder includes an electrically conductive reference scale having surface steps formed at predetermined positions; an electrically conductive probe having a tip disposed opposed to the reference scale; wherein the reference scale and the probe are relatively movable in a direction different from the opposing direction of the tip of the probe and the reference scale; a portion for applying an electrical voltage to between the reference scale and the probe; a portion for detecting a change in a tunnel current between the reference scale and the probe, to between which the electric voltage is applied by the voltage applying portion at the time of the relative movement between the scale and the probe, the detecting portion detecting the change in the tunnel current when the probe passes a position opposed to a surface step of the reference scale; and portion for detecting the amount of the relative movement between the scale and probe, on the basis of the detection by the change detecting portion.
摘要翻译：编码器包括具有形成在预定位置处的表面台阶的导电参考标尺; 导电探针，其具有与参考标尺相对设置的尖端; 其中所述参考标尺和所述探针在与所述探针的尖端和所述参考标尺的相反方向不同的方向上相对移动; 用于将电压施加到参考标尺和探针之间的部分; 用于检测参考标尺和探针之间的隧道电流变化的部分，在标尺和探头之间的相对移动时由电压施加部施加电压，检测部分检测当探针经过与参考刻度的表面台阶相对的位置时隧道电流的变化; 以及用于根据变化检测部分的检测来检测标尺和探针之间的相对移动量的部分。

3. 发明授权

US5482002A Microprobe, preparation thereof and electronic device by use of said microprobe 失效
公开(公告)号：US5482002A
公开(公告)日：1996-01-09
申请号：US87537
申请日：1993-07-08
申请人： Hisaaki Kawade , Haruki Kawada , Kunihiro Sakai , Hiroshi Matsuda , Yuko Morikawa , Yoshihiro Yanagisawa , Tetsuya Kaneko , Toshimitsu Kawase , Hideya Kumomi , Hiroyasu Nose , Eigo Kawakami
发明人： Hisaaki Kawade , Haruki Kawada , Kunihiro Sakai , Hiroshi Matsuda , Yuko Morikawa , Yoshihiro Yanagisawa , Tetsuya Kaneko , Toshimitsu Kawase , Hideya Kumomi , Hiroyasu Nose , Eigo Kawakami
IPC分类号： C30B25/04 , G01N27/00 , G01Q30/04 , G01Q60/00 , G01Q70/08 , G11B9/00
CPC分类号： G01Q70/10 , B82Y35/00 , G01Q60/16 , B82Y10/00 , G01Q80/00 , Y10S117/913 , Y10S977/70 , Y10S977/861 , Y10S977/947 , Y10S977/949
摘要： A microprobe is provided which comprises a single crystal provided on a part of one main surface of a substrate or a part of a thin film formed on one main surface of the substrate. The microprobe may have a single crystal having an apex portion surrounded by facets having a specific plane direction and comprising a specific crystal face. The method for preparing the microprobe and an electronic device employing the microprobe also provided which is useful for recording and reproducing.

4. 发明授权

US5994698A Microprobe, preparation thereof and electronic device by use of said microprobe 失效
标题翻译：微探针，其制备和使用所述微探针的电子装置
公开(公告)号：US5994698A
公开(公告)日：1999-11-30
申请号：US240216
申请日：1994-05-09
申请人： Hisaaki Kawade , Haruki Kawada , Kunihiro Sakai , Hiroshi Matsuda , Yuko Morikawa , Yoshihiro Yanagisawa , Tetsuya Kaneko , Toshimitsu Kawase , Hideya Kumomi , Hiroyasu Nose , Eigo Kawakami
发明人： Hisaaki Kawade , Haruki Kawada , Kunihiro Sakai , Hiroshi Matsuda , Yuko Morikawa , Yoshihiro Yanagisawa , Tetsuya Kaneko , Toshimitsu Kawase , Hideya Kumomi , Hiroyasu Nose , Eigo Kawakami
IPC分类号： G01Q70/14 , G01Q60/16 , G01Q70/10 , G01Q80/00 , H01J37/28
CPC分类号： G01Q60/16 , B82Y35/00 , G01Q70/10 , B82Y10/00 , G01Q80/00 , Y10S977/874
摘要： A microprobe is provided which comprises a single crystal provided on a part of one main surface of a substrate or a part of a thin film formed on one main surface of the substrate. The microprobe may have a single crystal having an apex portion surrounded by facets having a specific plane direction and comprising a specific crystal face. The method for preparing the microprobe and an electronic device employing the microprobe also provided which is useful for recording and reproducing.
摘要翻译：提供了一种微探针，其包括设置在基板的一个主表面的一部分上的单晶或形成在基板的一个主表面上的薄膜的一部分。微探针可以具有单晶，其具有由具有特定平面方向的面所包围的顶点部分，并且包括特定的晶面。还提供了用于制备微探针的方法和采用该微探针的电子装置，其用于记录和再现。

5. 发明授权

US5072116A Microprobe preparation thereof and electronic device by use of said microprobe 失效
标题翻译：麦芽糖的制备及其电子装置
公开(公告)号：US5072116A
公开(公告)日：1991-12-10
申请号：US610314
申请日：1990-11-09
申请人： Hisaaki Kawade , Haruki Kawada , Kunihiro Sakai , Hiroshi Matsuda , Yuko Morikawa , Yoshihiro Yanagisawa , Tetsuya Kaneko , Toshimitsu Kawase , Hideya Kumomi , Hiroyasu Nose , Eigo Kawakami
发明人： Hisaaki Kawade , Haruki Kawada , Kunihiro Sakai , Hiroshi Matsuda , Yuko Morikawa , Yoshihiro Yanagisawa , Tetsuya Kaneko , Toshimitsu Kawase , Hideya Kumomi , Hiroyasu Nose , Eigo Kawakami
IPC分类号： G01N27/00 , G01Q60/16 , G01Q70/10 , G01Q70/14 , G01Q80/00 , G11B9/00 , H01J37/26 , H01J37/28
CPC分类号： G01Q60/16 , B82Y35/00 , G01Q70/10 , B82Y10/00 , G01Q80/00 , Y10S977/878 , Y10S977/879
摘要： A microprobe is constituted by a single crystal having an apex portion surrounded by facets having specific place directions and having specific crystal faces. The microprobe is provided on a part of a main surface of a substrate or a part of a thin film formed on the main surface. In one embodiment the microprobe is provided with a source electrode, a gate electrode, a drain electrode and a thin resistance, so as to form an MOS transistor for amplifying the microprobe.

6. 发明授权

US5255258A Microprobe, preparation thereof and electronic device by use of said microprobe 失效
标题翻译：微探针，其制备和使用所述微探针的电子装置
公开(公告)号：US5255258A
公开(公告)日：1993-10-19
申请号：US643209
申请日：1991-01-18
申请人： Hisaaki Kawade , Haruki Kawada , Kunihiro Sakai , Hiroshi Matsuda , Yuko Morikawa , Yoshihiro Yanagisawa , Tetsuya Kaneko , Toshimitsu Kawase , Hideya Kumomi , Hiroyasu Nose , Eigo Kawakami
发明人： Hisaaki Kawade , Haruki Kawada , Kunihiro Sakai , Hiroshi Matsuda , Yuko Morikawa , Yoshihiro Yanagisawa , Tetsuya Kaneko , Toshimitsu Kawase , Hideya Kumomi , Hiroyasu Nose , Eigo Kawakami
IPC分类号： C30B25/04 , G01N27/00 , G01Q30/04 , G01Q60/00 , G01Q70/08 , G11B9/00
CPC分类号： G01Q70/10 , B82Y35/00 , G01Q60/16 , B82Y10/00 , G01Q80/00 , Y10S117/913 , Y10S977/70 , Y10S977/861 , Y10S977/947 , Y10S977/949
摘要： A microprobe is provided which comprises a single crystal provided on a part of one main surface of a substrate or a part of a thin film formed on one main surface of the substrate. The microprobe may have a single crystal having an apex portion surrounded by facets having a specific plane direction and comprising a specific crystal face. The method for preparing the microprobe and an electronic device employing the microprobe also provided which is useful for recording and reproducing.
摘要翻译：提供了一种微探针，其包括设置在基板的一个主表面的一部分上的单晶或形成在基板的一个主表面上的薄膜的一部分。微探针可以具有单晶，其具有由具有特定平面方向的面所包围的顶点部分，并且包括特定的晶面。还提供了用于制备微探针的方法和采用该微探针的电子装置，其用于记录和再现。

7. 发明授权

US4788596A Image stabilizing device 失效
标题翻译：影像稳定装置
公开(公告)号：US4788596A
公开(公告)日：1988-11-29
申请号：US855732
申请日：1986-04-25
申请人： Eigo Kawakami , Yukichi Niwa , Mitsutoshi Ohwada , Yasuo Ogino , Minoru Yoshii , Shigeyuki Suda
发明人： Eigo Kawakami , Yukichi Niwa , Mitsutoshi Ohwada , Yasuo Ogino , Minoru Yoshii , Shigeyuki Suda
IPC分类号： H04N5/232 , H04N5/228
CPC分类号： H04N5/23254 , H04N5/23212 , H04N5/23248 , H04N5/23287
摘要： A characteristic point such as an image contrast of a target image in an image screen of an object produced by an image sensor is counted, a correlation between counts at two points in time is determined. A drive means for preventing vibration of an imaging lens is controlled in accordance with the correlation signal and imaging information such as in-focus or out-of-focus information.
摘要翻译：计算特征点，例如由图像传感器产生的对象的图像画面中的目标图像的图像对比度，确定两个时间点的计数之间的相关性。根据相关信号和诸如焦点内或焦点外信息的成像信息来控制用于防止成像镜头的振动的驱动装置。

8. 发明授权

US4780739A Anti-vibration imaging device 失效
标题翻译：防震成像装置
公开(公告)号：US4780739A
公开(公告)日：1988-10-25
申请号：US900997
申请日：1986-08-27
申请人： Eigo Kawakami , Yukichi Niwa , Yasuo Ogino , Minoru Yoshii , Shigeyuki Suda , Mitsutoshi Ohwada
发明人： Eigo Kawakami , Yukichi Niwa , Yasuo Ogino , Minoru Yoshii , Shigeyuki Suda , Mitsutoshi Ohwada
IPC分类号： G02B27/64 , H04N5/232 , G03B7/08
CPC分类号： H04N5/23254 , G02B27/646 , H04N5/23248 , H04N5/23287 , G03B2217/005
摘要： An imaging device has detection means for detecting an image vibration of the imaging device and drive means for driving at least one of a photoelectric conversion device for converting a light of an object transmitted through a lens system of the imaging device to an electrical signal and the imaging device itself in a direction to cancel the vibration. For a high frequency image vibration, the vibration is compensated by using a piezoelectric device.
摘要翻译：一种成像装置具有用于检测成像装置的图像振动的检测装置和用于驱动用于将通过成像装置的透镜系统传输的物体的光转换成电信号的光电转换装置中的至少一个的驱动装置，成像装置本身在消除振动的方向上。对于高频图像振动，通过使用压电装置来补偿振动。

9. 发明授权

US5276725A Exposure system 失效
标题翻译：曝光系统
公开(公告)号：US5276725A
公开(公告)日：1994-01-04
申请号：US996508
申请日：1992-12-14
申请人： Eigo Kawakami , Minoru Yoshii , Shunichi Uzawa
发明人： Eigo Kawakami , Minoru Yoshii , Shunichi Uzawa
IPC分类号： G03F7/20 , G21K5/00
CPC分类号： G03F7/702
摘要： An exposure apparatus usable with a mask having a pattern and a wafer having a radiation-sensitive surface layer, for transferring with a radiation energy beam the pattern of the mask to the wafer, is disclosed. The apparatus includes a mask supporting member for supporting the mask; a wafer supporting member for supporting the wafer; a reflective member having a reflection surface and an indication pattern, the reflective member being supported by one of the mask supporting member and the wafer supporting member; an arrangement for projecting a beam, which is thinner than the radiation energy beam and which advances along or about the axis of the radiation energy beam, upon the reflective member; a device for observing a positional relationship between the indication pattern and a spot formed by projection of the thinner beam upon the reflective member; and a device for correcting a relationship between the indication pattern and the spot, on the basis of the observation.
摘要翻译：公开了一种可用于具有图案的掩模和具有辐射敏感表面层的晶片的曝光装置，用于将辐射能量束将掩模的图案转印到晶片。该装置包括用于支撑面罩的面罩支撑构件; 用于支撑晶片的晶片支撑构件; 反射构件，其具有反射面和指示图案，所述反射构件由所述面罩支撑构件和所述晶片支撑构件中的一个支撑; 用于投射比辐射能量束更薄并且沿辐射能量束的轴线或围绕辐射能量束的轴线前进的光束的反射构件的布置; 用于观察指示图案与通过将较薄光束投射在反射构件上形成的光斑之间的位置关系的装置; 以及用于基于观察来校正指示图案与斑点之间的关系的装置。

10. 发明授权

US08393885B2 Processing apparatus 有权
标题翻译：处理装置
公开(公告)号：US08393885B2
公开(公告)日：2013-03-12
申请号：US12120710
申请日：2008-05-15
申请人： Kazuyuki Kasumi , Hirohisa Ota , Eigo Kawakami , Takashi Nakamura , Toshinobu Tokita
发明人： Kazuyuki Kasumi , Hirohisa Ota , Eigo Kawakami , Takashi Nakamura , Toshinobu Tokita
IPC分类号： B29C59/00 , B29C59/02 , H01L21/302
CPC分类号： B29C43/021 , B29C43/003 , B29C43/04 , B29C43/14 , B29C2043/025 , B29C2043/142 , B29C2043/3438 , B29C2043/3634 , B29L2011/0016 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： A processing apparatus for transferring a relief pattern on a mold to a resist on a substrate through a compression of the mold against the resist, includes a supplier for supplying the resist between the substrate and the mold, and a recovery unit for recovering the resist.
摘要翻译：一种处理装置，用于通过将模具压靠在抗蚀剂上将模具上的凸版图案转印到基板上的抗蚀剂上，包括用于在基板和模具之间供应抗蚀剂的供应商和用于回收抗蚀剂的回收单元。

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