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1. 发明授权

US5963815A Method for forming a surface-roughened conductive film on a semiconductor wafer 失效
标题翻译：在半导体晶片上形成表面粗糙化的导电膜的方法
公开(公告)号：US5963815A
公开(公告)日：1999-10-05
申请号：US009966
申请日：1998-01-21
申请人： Yoshihiko Okamoto , Tadashi Yoshida , Hiroshi Ohnishi , Kenichi Hanaoka , Shigeki Nakajima , Junichi Tsuchimoto
发明人： Yoshihiko Okamoto , Tadashi Yoshida , Hiroshi Ohnishi , Kenichi Hanaoka , Shigeki Nakajima , Junichi Tsuchimoto
IPC分类号： H01L27/04 , H01L21/02 , H01L21/205 , H01L21/822 , H01L21/8242 , H01L27/108 , H01L21/20
CPC分类号： H01L28/84
摘要： An amorphous silicon conductive film on a semiconductor wafer is treated with hydrofluoric acid to remove a natural oxide film therefrom, and then a very thin oxide film is formed on the semiconductor wafer. Thereafter, a silane gas is used to form a nucleating film, followed by annealing to cause the surface of the conductive film be roughened. The very thin oxide film is formed in a thickness of 0.5 angstroms to 20 angstroms. The very thin oxide film is alternatively formed either by treatment with an aqueous hydrofluoric acid solution or by flushing treatment. Thus, a roughened surface having a satisfactory roughness is uniformly formed on the surface of a conductive film on a semiconductor wafer.
摘要翻译：用氢氟酸处理半导体晶片上的非晶硅导电膜以从其中除去天然氧化物膜，然后在半导体晶片上形成非常薄的氧化膜。然后，使用硅烷气体形成成膜膜，进行退火，使导电膜的表面变得粗糙。非常薄的氧化膜形成为厚度为0.5埃至20埃。可以通过用氢氟酸水溶液处理或通过冲洗处理来形成非常薄的氧化膜。因此，在半导体晶片上的导电膜的表面均匀地形成具有令人满意的粗糙度的粗糙面。

2. 发明授权

US5125509A Container for precision parts 失效
标题翻译：集装箱用于精密零件
公开(公告)号：US5125509A
公开(公告)日：1992-06-30
申请号：US722399
申请日：1991-06-20
申请人： Kazuhiro Takei , Yukio Yamada , Kenichi Hanaoka , Toshitsugu Yajima
发明人： Kazuhiro Takei , Yukio Yamada , Kenichi Hanaoka , Toshitsugu Yajima
IPC分类号： B65D21/02 , B65D21/00 , H01L21/673
CPC分类号： H01L21/67356
摘要： A container of substantially rectangular cross section is formed of synthetic resin and comprises a container body and a lid member to be detachably mounted to the container body. The container body is provided with longitudinal and lateral side walls and a bottom wall and is capable of being molded as a single piece and thereafter foldable into a container. A locking device for locking the container body and the lid member is located on an outer surface of a side wall of the container body and on a corresponding inner surface of a side wall of the lid. The locking member comprises projections extending outwardly from outer surfaces of the lateral side walls of the container body and corresponding recesses extending inwardly from inner surfaces of the lateral side walls of the lid member. A pair of the longitudinal side walls of the lid member are provided with projected portions formed on upper edges thereof and with recessed portions formed on lower edges thereof, wherein each recessed portion formed so as to have an inner shape corresponding to an outer shape of each projected portion. Projecting pieces are formed on the inner surfaces of the lateral side walls of the container body for abutting against and supportably fixing the contents, which have an outer perimeter surface area smaller than a surface area of the bottom wall of the container body.
摘要翻译：大致矩形截面的容器由合成树脂形成，并且包括容器主体和可拆卸地安装到容器主体上的盖构件。容器主体设置有纵向和侧向侧壁和底壁，并且能够被模制成单件，然后可折叠成容器。用于锁定容器主体和盖构件的锁定装置位于容器主体的侧壁的外表面上并且位于盖的侧壁的相应内表面上。锁定构件包括从容器主体的侧壁的外表面向外延伸的凸起和从盖构件的侧壁的内表面向内延伸的对应的凹部。盖构件的一对纵向侧壁设置有形成在其上边缘上的突出部分和形成在其下边缘上的凹部，其中每个凹部形成为具有与每个的外部形状对应的内部形状投影部分。在容器主体的侧壁的内表面上形成有突出部件，用于抵靠并可支撑地固定外周表面面积小于容器主体底壁表面积的内容物。

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