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    • 1. 发明授权
    • Method for producing a thin film magnetic head
    • 薄膜磁头的制造方法
    • US5992004A
    • 1999-11-30
    • US833405
    • 1997-04-04
    • Kiyoshi SatoYoshihiko KakiharaMasamichi SaitoToshihiro KuriyamaToshinori Watanabe
    • Kiyoshi SatoYoshihiko KakiharaMasamichi SaitoToshihiro KuriyamaToshinori Watanabe
    • G11B5/39
    • B82Y25/00B82Y10/00G11B5/3903G11B5/3932G11B2005/3996Y10T29/49044Y10T29/49046
    • A longitudinal bias layer and an electrode layer are formed on a non-magnetic material layer. The longitudinal bias layer and the electrode layer are partially removed by an etching technique so that a narrow gap defining the track width Tw is formed in the longitudinal bias layer and the electrode layer. Furthermore, a three-layer film consisting of, from bottom to top, a magnetoresistance effect layer, a non-magnetic layer, and a transverse bias layer, or otherwise a spin valve film consisting of a free magnetic layer, a non-magnetic layer, a fixed magnetic layer and a bias layer is formed on the above structure. The three-layer film or the spin valve film is then partially removed by an etching technique so that the three-layer film or the spin valve film remains only in the above-described narrow gap formed in the longitudinal bias layer and the electrode layer. The shape of the side walls of the three-layer film or the spin valve film is precisely determined by the side walls of the longitudinal bias layer and the electrode layer. The resultant three-layer film or the spin valve film exhibits excellent magnetic detection characteristics. Furthermore, the longitudinal bias layer has good magnetic coupling with the magnetoresistance effect layer.
    • 在非磁性材料层上形成纵向偏置层和电极层。 通过蚀刻技术部分地去除纵向偏置层和电极层,使得在纵向偏置层和电极层中形成限定轨道宽度Tw的窄间隙。 此外,由底部到顶部构成磁阻效应层,非磁性层和横向偏置层的三层膜,或者由自由磁性层,非磁性层 在上述结构上形成固定磁性层和偏置层。 然后通过蚀刻技术部分去除三层膜或自旋阀膜,使得三层膜或自旋阀膜仅保留在形成在纵向偏置层和电极层中的上述窄间隙中。 三层膜或自旋阀膜的侧壁的形状由纵向偏置层和电极层的侧壁精确地确定。 所得到的三层膜或自旋阀膜具有优异的磁检测特性。 此外,纵向偏置层与磁阻效应层具有良好的磁耦合。
    • 2. 发明授权
    • Thin-film magnetic head and production method thereof
    • 薄膜磁头及其制造方法
    • US5923503A
    • 1999-07-13
    • US616114
    • 1996-03-14
    • Kiyoshi SatoYoshihiko KakiharaMasamichi SaitoToshihiro KuriyamaToshinori Watanabe
    • Kiyoshi SatoYoshihiko KakiharaMasamichi SaitoToshihiro KuriyamaToshinori Watanabe
    • G11B5/39
    • B82Y25/00B82Y10/00G11B5/3903G11B5/3932G11B2005/3996Y10T29/49044Y10T29/49046
    • A longitudinal bias layer and an electrode layer are formed on a non-magnetic material layer. The longitudinal bias layer and the electrode layer are partially removed by an etching technique so that a narrow gap defining the track width Tw is formed in the longitudinal bias layer and the electrode layer. Furthermore, a three-layer film consisting of, from bottom to top, a magnetoresistance effect layer, a non-magnetic layer, and a transverse bias layer, or otherwise a spin valve film consisting of a free magnetic layer, a non-magnetic layer, a fixed magnetic layer and a bias layer is formed on the above structure. The three-layer film or the spin valve film is then partially removed by an etching technique so that the three-layer film or the spin valve film remains only in the above-described narrow gap formed in the longitudinal bias layer and the electrode layer. The shape of the side walls of the three-layer film or the spin valve film is precisely determined by the side walls of the longitudinal bias layer and the electrode layer. The resultant three-layer film or the spin valve film exhibits excellent magnetic detection characteristics. Furthermore, the longitudinal bias layer has good magnetic coupling with the magnetoresistance effect layer.
    • 在非磁性材料层上形成纵向偏置层和电极层。 通过蚀刻技术部分地去除纵向偏置层和电极层,使得在纵向偏置层和电极层中形成限定轨道宽度Tw的窄间隙。 此外,由底部到顶部构成磁阻效应层,非磁性层和横向偏置层的三层膜,或者由自由磁性层,非磁性层 在上述结构上形成固定磁性层和偏置层。 然后通过蚀刻技术部分去除三层膜或自旋阀膜,使得三层膜或自旋阀膜仅保留在形成在纵向偏置层和电极层中的上述窄间隙中。 三层膜或自旋阀膜的侧壁的形状由纵向偏置层和电极层的侧壁精确地确定。 所得到的三层膜或自旋阀膜具有优异的磁检测特性。 此外,纵向偏置层与磁阻效应层具有良好的磁耦合。
    • 4. 发明授权
    • Thin-film magnetic head and production method thereof
    • 薄膜磁头及其制造方法
    • US06307722B1
    • 2001-10-23
    • US09237547
    • 1999-01-26
    • Kiyoshi SatoYoshihiko KakiharaMasamichi SaitoToshihiro KuriyamaToshinori Watanabe
    • Kiyoshi SatoYoshihiko KakiharaMasamichi SaitoToshihiro KuriyamaToshinori Watanabe
    • G11B5127
    • B82Y25/00B82Y10/00G11B5/3903G11B5/3932G11B2005/3996Y10T29/49044Y10T29/49046
    • A longitudinal bias layer and an electrode layer are formed on a non-magnetic material layer. The longitudinal bias layer and the electrode layer are partially removed by an etching technique so that a narrow gap defining the track width Tw is formed in the longitudinal bias layer and the electrode layer. Furthermore, a three-layer film consisting of, from bottom to top, a magnetoresistance effect layer, a non-magnetic layer, and a transverse bias layer, or otherwise a spin valve film consisting of a free magnetic layer, a non-magnetic layer, a fixed magnetic layer and a bias layer is formed on the above structure. The three-layer film or the spin valve film is then partially removed by an etching technique so that the three-layer film or the spin valve film remains only in the above-described narrow gap formed in the longitudinal bias layer and the electrode layer. The shape of the side walls of the three-layer film or the spin valve film is precisely determined by the side walls of the longitudinal bias layer and the electrode layer. The resultant three-layer film or the spin valve film exhibits excellent magnetic detection characteristics. Furthermore, the longitudinal bias layer has good magnetic coupling with the magnetoresistance effect layer.
    • 在非磁性材料层上形成纵向偏置层和电极层。 通过蚀刻技术部分地去除纵向偏置层和电极层,使得在纵向偏置层和电极层中形成限定轨道宽度Tw的窄间隙。 此外,由底部到顶部构成磁阻效应层,非磁性层和横向偏置层的三层膜,或者由自由磁性层,非磁性层 在上述结构上形成固定磁性层和偏置层。 然后通过蚀刻技术部分去除三层膜或自旋阀膜,使得三层膜或自旋阀膜仅保留在形成在纵向偏置层和电极层中的上述窄间隙中。 三层膜或自旋阀膜的侧壁的形状由纵向偏置层和电极层的侧壁精确地确定。 所得到的三层膜或自旋阀膜具有优异的磁检测特性。 此外,纵向偏置层与磁阻效应层具有良好的磁耦合。
    • 5. 发明授权
    • Spin-valve magnetoresistive element with biasing layer
    • 具有偏置层的旋转阀磁阻元件
    • US5959810A
    • 1999-09-28
    • US975955
    • 1997-11-21
    • Yoshihiko KakiharaMasamichi Saito
    • Yoshihiko KakiharaMasamichi Saito
    • G11B5/33G11B5/39
    • B82Y25/00B82Y10/00G11B5/3903G11B5/3932G11B2005/3996
    • A spin-valve magnetoresistive element comprises an antiferromagnetic layer, a pinned magnetic layer, a nonmagnetic electrically conductive layer and a free magnetic layer formed in that order, and biasing layers formed on both sides of at least the free magnetic layer, the magnetization vector in the pinned magnetic layer being fixed by exchange anisotropic coupling with the antiferromagnetic layer, the biasing layers unifying the magnetization vector in the free magnetic layer in a direction perpendicular to the magnetization vector in the pinned magnetic layer, and a conductive path conducting a sensing current to the pinned magnetic layer, the nonmagnetic electrically conductive layer and the free magnetic layer. The antiferromagnetic layer extends to outer regions on both sides of the pinned magnetic layer, the nonmagnetic layer and the free magnetic layer. The biasing layers are formed on the antiferromagnetic layer. The top faces of the outer regions lie below the bottom face of the pinned magnetic layer, and the top faces of the biasing layers parallel to the deposited layers lie above the bottom face of the free magnetic layer in the sensing gap direction perpendicular to the deposited layers.
    • 自旋阀磁阻元件包括反铁磁层,钉扎磁性层,非磁性导电层和按顺序形成的自由磁性层,以及形成在至少自由磁性层两侧的偏置层,磁化矢量 被钉扎的磁性层通过与反铁磁层的交换各向异性耦合来固定,偏置层在与固定磁性层中的磁化矢量垂直的方向上将自由磁性层中的磁化矢量统一起来,并将传感电流传导到 固定磁性层,非磁性导电层和自由磁性层。 反铁磁层延伸到钉扎磁性层,非磁性层和自由磁性层两侧的外部区域。 偏置层形成在反铁磁性层上。 外部区域的顶面位于被钉扎的磁性层的底面之下,并且平行于沉积层的偏置层的顶面位于垂直于沉积层的感测间隙方向上的自由磁性层的底面的上方 层。