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1. 发明申请

US20110115466A1 CURRENT DETECTION PRINTED BOARD, VOLTAGE DETECTION PRINTED BOARD, CURRENT/VOLTAGE DETECTION PRINTED BOARD, CURRENT/VOLTAGE DETECTOR, CURRENT DETECTOR AND VOLTAGE DETECTOR 有权
标题翻译：电流检测印刷板，电压检测印刷板，电流/电压检测印刷板，电流/电压检测器，电流检测器和电压检测器
公开(公告)号：US20110115466A1
公开(公告)日：2011-05-19
申请号：US13014288
申请日：2011-01-26
申请人： Yoshifumi IBUKI , Shuji OMAE , Hideo ITO
发明人： Yoshifumi IBUKI , Shuji OMAE , Hideo ITO
IPC分类号： G01R19/00
CPC分类号： G01R15/18 , G01R15/142 , G01R15/181
摘要： A current detection printed board includes: a board having a penetration hole that penetrates the board; and at least one wire that is formed in a coiled shape having both ends by penetrating the board along the periphery of the penetration hole and alternately connecting a front surface layer and a rear surface layer of the board, wherein, when a conductor, in which an AC current flows, is disposed to pass through the inside of the penetration hole, a current flowing in the wire is output through electromagnetic induction.
摘要翻译：电流检测印刷电路板包括：具有穿透板的穿孔的板; 以及形成为线状的至少一根线，其两端通过沿着贯通孔的周缘穿过基板，并且交替地连接板的前表面层和后表面层，其中，当导体中交流电流流过，穿过穿透孔的内部，流过电线的电流通过电磁感应输出。

2. 发明申请

US20100259247A1 CURRENT DETECTION PRINTED BOARD, VOLTAGE DETECTION PRINTED BOARD, CURRENT/VOLTAGE DETECTION PRINTED BOARD, CURRENT/VOLTAGE DETECTOR, CURRENT DETECTOR AND VOLTAGE DETECTOR 审中-公开
标题翻译：电流检测印刷板，电压检测印刷板，电流/电压检测印刷板，电流/电压检测器，电流检测器和电压检测器
公开(公告)号：US20100259247A1
公开(公告)日：2010-10-14
申请号：US12822384
申请日：2010-06-24
申请人： Yoshifumi IBUKI , Shuji OMAE , Hideo ITO
发明人： Yoshifumi IBUKI , Shuji OMAE , Hideo ITO
IPC分类号： G01R15/18
CPC分类号： G01R15/18 , G01R15/142 , G01R15/181
摘要： A current detection printed board includes: a board having a penetration hole that penetrates the board; and at least one wire that is formed in a coiled shape having both ends by penetrating the board along the periphery of the penetration hole and alternately connecting a front surface layer and a rear surface layer of the board, wherein, when a conductor, in which an AC current flows, is disposed to pass through the inside of the penetration hole, a current flowing in the wire is output through electromagnetic induction.
摘要翻译：电流检测印刷电路板包括：具有穿透板的穿孔的板; 以及形成为线状的至少一根线，其两端通过沿着贯通孔的周缘穿过基板，并且交替地连接板的前表面层和后表面层，其中，当导体中交流电流流过，穿过穿透孔的内部，流过电线的电流通过电磁感应输出。

3. 发明申请

US20070285089A1 CURRENT DETECTION PRINTED BOARD, VOLTAGE DETECTION PRINTED BOARD, CURRENT/VOLTAGE DETECTION PRINTED BOARD, CURRENT/VOLTAGE DETECTOR, CURRENT DETECTOR AND VOLTAGE DETECTOR 审中-公开
标题翻译：电流检测印刷板，电压检测印刷板，电流/电压检测印刷板，电流/电压检测器，电流检测器和电压检测器
公开(公告)号：US20070285089A1
公开(公告)日：2007-12-13
申请号：US11687973
申请日：2007-03-19
申请人： Yoshifumi IBUKI , Shuji OMAE , Hideo ITO
发明人： Yoshifumi IBUKI , Shuji OMAE , Hideo ITO
IPC分类号： G01R33/00
CPC分类号： G01R15/18 , G01R15/142 , G01R15/181
摘要： A current detection printed board includes: a board having a penetration hole that penetrates the board; and at least one wire that is formed in a coiled shape having both ends by penetrating the board along the periphery of the penetration hole and alternately connecting a front surface layer and a rear surface layer of the board, wherein, when a conductor, in which an AC current flows, is disposed to pass through the inside of the penetration hole, a current flowing in the wire is output through electromagnetic induction.
摘要翻译：电流检测印刷电路板包括：具有穿透板的穿孔的板; 以及形成为线状的至少一根线，其两端通过沿着贯通孔的周缘穿过基板，并且交替地连接板的前表面层和后表面层，其中，当导体中交流电流流过，穿过穿透孔的内部，流过电线的电流通过电磁感应输出。

4. 发明申请

US20110285412A1 CURRENT DETECTION PRINTED BOARD, VOLTAGE DETECTION PRINTED BOARD, AND CURRENT/VOLTAGE DETECTOR USING SAME, AND CURRENT DETECTOR AND VOLTAGE DETECTOR 有权
标题翻译：电流检测印刷电路板，电压检测印刷电路板和使用相同的电流/电压检测器，以及电流检测器和电压检测器
公开(公告)号：US20110285412A1
公开(公告)日：2011-11-24
申请号：US13196325
申请日：2011-08-02
申请人： Yoshifumi IBUKI , Shigeki AMADATSU , Tomohiko KITANO , Shuji OMAE
发明人： Yoshifumi IBUKI , Shigeki AMADATSU , Tomohiko KITANO , Shuji OMAE
IPC分类号： G01R27/26
CPC分类号： G01R15/181 , G01R15/142 , G01R15/16
摘要： A current detection printed board includes: a board having a penetration hole that penetrates the board; and at least one wire that is formed in a coiled shape having both ends by penetrating the board along the periphery of the penetration hole and alternately connecting a front surface layer and a rear surface layer of the board, wherein, when a conductor, in which an AC current flows, is disposed to pass through the inside of the penetration hole, a current flowing in the wire is output through electromagnetic induction.
摘要翻译：电流检测印刷电路板包括：具有穿透板的穿孔的板; 以及形成为线状的至少一根线，其两端通过沿着贯通孔的周缘穿过基板，并且交替地连接板的前表面层和后表面层，其中，当导体中交流电流流过，穿过穿透孔的内部，流过电线的电流通过电磁感应输出。

5. 发明申请

US20070194797A1 CURRENT DETECTION PRINTED BOARD, VOLTAGE DETECTION PRINTED BOARD, AND CURRENT/VOLTAGE DETECTOR USING SAME, AND CURRENT DETECTOR AND VOLTAGE DETECTOR 有权
标题翻译：电流检测印刷电路板，电压检测印刷电路板和使用相同的电流/电压检测器，以及电流检测器和电压检测器
公开(公告)号：US20070194797A1
公开(公告)日：2007-08-23
申请号：US11627703
申请日：2007-01-26
申请人： Yoshifumi IBUKI , Shigeki AMADATSU , Tomohiko KITANO , Shuji OMAE
发明人： Yoshifumi IBUKI , Shigeki AMADATSU , Tomohiko KITANO , Shuji OMAE
IPC分类号： G01R27/00
CPC分类号： G01R15/181 , G01R15/142 , G01R15/16
摘要： A current detection printed board includes: a board having a penetration hole that penetrates the board; and at least one wire that is formed in a coiled shape having both ends by penetrating the board along the periphery of the penetration hole and alternately connecting a front surface layer and a rear surface layer of the board, wherein, when a conductor, in which an AC current flows, is disposed to pass through the inside of the penetration hole, a current flowing in the wire is output through electromagnetic induction.
摘要翻译：电流检测印刷电路板包括：具有穿透板的穿孔的板; 以及形成为线状的至少一根线，其两端通过沿着贯通孔的周缘穿过基板，并且交替地连接板的前表面层和后表面层，其中，当导体中交流电流流过，穿过穿透孔的内部，流过电线的电流通过电磁感应输出。

6. 发明申请

US20100176904A1 CURRENT DETECTION PRINTED BOARD, VOLTAGE DETECTION PRINTED BOARD, AND CURRENT/VOLTAGE DETECTOR USING SAME, AND CURRENT DETECTOR AND VOLTAGE DETECTOR 审中-公开
标题翻译：电流检测印刷电路板，电压检测印刷电路板和使用相同的电流/电压检测器，以及电流检测器和电压检测器
公开(公告)号：US20100176904A1
公开(公告)日：2010-07-15
申请号：US12732773
申请日：2010-03-26
申请人： Yoshifumi IBUKI , Shigeki Amadatsu , Tomohiko Kitano , Shuji Omae
发明人： Yoshifumi IBUKI , Shigeki Amadatsu , Tomohiko Kitano , Shuji Omae
IPC分类号： H01F38/30
CPC分类号： G01R15/181 , G01R15/142 , G01R15/16
摘要： A current detection printed board includes: a board having a penetration hole that penetrates the board; and at least one wire that is formed in a coiled shape having both ends by penetrating the board along the periphery of the penetration hole and alternately connecting a front surface layer and a rear surface layer of the board, wherein, when a conductor, in which an AC current flows, is disposed to pass through the inside of the penetration hole, a current flowing in the wire is output through electromagnetic induction.
摘要翻译：电流检测印刷电路板包括：具有穿透板的穿孔的板; 以及形成为线状的至少一根线，其两端通过沿着贯通孔的周缘穿过基板，并且交替地连接板的前表面层和后表面层，其中，当导体中交流电流流过，穿过穿透孔的内部，流过电线的电流通过电磁感应输出。

7. 发明申请

US20110234201A1 HIGH-FREQUENCY MEASURING DEVICE AND HIGH-FREQUENCY MEASURING DEVICE CALIBRATION METHOD 有权
标题翻译：高频测量装置和高频测量装置校准方法
公开(公告)号：US20110234201A1
公开(公告)日：2011-09-29
申请号：US13048104
申请日：2011-03-15
申请人： Ryohei TANAKA , Yoshifumi IBUKI
发明人： Ryohei TANAKA , Yoshifumi IBUKI
IPC分类号： G01R23/02
CPC分类号： H01J37/32183 , H01J37/32935
摘要： A method is provided for calibrating a high-frequency, measuring device so as to accurately measure high-frequency parameters within a chamber. A calibration parameter is calculated from impedance of a first set of three reference loads measured by a high-frequency measuring device and the true values of those impedances. A calibration parameter is calculated from an S parameter measured between a connection point where the high-frequency measuring device is connected and the inside of the chamber of a plasma processing device. An impedance within the chamber is calculated from a voltage signal and a current signal calibrated using the above calibration parameters. A second set of three reference loads, which include the impedance calculated in Step 5 and encompass a range narrower than that encompassed by the first set of three reference loads, is determined. Another calibration parameter is calculated from impedances of the second set of three reference loads measured by the high-frequency measuring device and the true values of those impedances, and a detected voltage signal and a detected current signal are calibrated using the above calibration parameters.
摘要翻译：提供了一种用于校准高频测量装置以便精确地测量腔室内的高频参数的方法。从由高频测量装置测量的第一组三个参考载荷的阻抗和这些阻抗的真实值的阻抗来计算校准参数。根据在连接高频测量装置的连接点与等离子体处理装置的室内之间测量的S参数来计算校准参数。从电压信号和使用上述校准参数校准的电流信号计算室内的阻抗。第二组三个参考载荷，其包括在步骤5中计算的阻抗并且包含比由第一组三个参考载荷所包围的阻抗窄的范围。通过由高频测量装置测量的第二组三个参考载荷的阻抗和这些阻抗的真实值的阻抗计算另一个校准参数，并且使用上述校准参数校准检测到的电压信号和检测到的电流信号。

8. 发明申请

US20090058398A1 CURRENT/VOLTAGE DETECTION PRINTED BOARD AND CURRENT/VOLTAGE DETECTOR 有权
标题翻译：电流/电压检测印刷电路板和电流/电压检测器
公开(公告)号：US20090058398A1
公开(公告)日：2009-03-05
申请号：US12201295
申请日：2008-08-29
申请人： Yoshifumi IBUKI
发明人： Yoshifumi IBUKI
IPC分类号： G01R1/20
CPC分类号： G01R15/181
摘要： A printed board, includes: a first shield portion, configured to reduce an influence of an electric field in combination with a casing accommodating the printed board, at least a part of the first shield portion being formed with a plurality of through holes; and a second shield portion, configured to reduce the influence of the electric field in combination with the casing, at least a part of the second shield portion being formed with a plurality of through holes, wherein the second shield portion is arranged alongside of the first shield portion.
摘要翻译：一种印刷电路板，包括：第一屏蔽部分，被配置为减少与容纳印刷电路板的外壳组合的电场的影响，所述第一屏蔽部分的至少一部分形成有多个通孔; 以及第二屏蔽部，被配置为减少与所述壳体组合的电场的影响，所述第二屏蔽部分的至少一部分形成有多个通孔，其中所述第二屏蔽部分沿着所述第一屏蔽部分屏蔽部分。

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