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1. 发明授权

US07489145B2 Plasma processing system 有权
标题翻译：等离子体处理系统
公开(公告)号：US07489145B2
公开(公告)日：2009-02-10
申请号：US11636389
申请日：2006-12-08
申请人： Hiroshi Matoba , Ryohei Tanaka , Shuji Omae , Shigeki Amadatsu
发明人： Hiroshi Matoba , Ryohei Tanaka , Shuji Omae , Shigeki Amadatsu
IPC分类号： G01R27/08
CPC分类号： H05H1/46 , H01J37/321 , H01J37/32174 , H01J37/32935
摘要： A high-frequency measurement unit includes a signal detector for detecting a high-frequency signal, and a calibration coefficient storage for storing calibration coefficients Cmin and Cmax used to calibrate a value Amin detected at the lowest limit frequency fmin and a value Amax detected at the uppermost limit frequency fmax to a proper measurement value Asmin and to a proper measurement value Asmax, respectively. The high-frequency measurement unit further includes a frequency detection unit for detecting a frequency fm of the high-frequency signal, a calibration coefficient calculation unit for calculating a calibration coefficient Cm for the frequency fm, and a calibration unit for calibrating the value Am detected by the signal detector to a proper measurement value Asm by using the calibration coefficient Cm calculated by the calibration coefficient calculation unit.
摘要翻译：高频测量单元包括用于检测高频信号的信号检测器和用于存储校准系数Cmin和Cmax的校准系数存储器，用于校准在最低限频率fmin处检测到的值A a和分别为适当的测量值Asmin和适当的测量值Asmax的最上限频率fmax。高频测量单元还包括用于检测高频信号的频率fm的频率检测单元，用于计算频率fm的校准系数Cm的校准系数计算单元和用于校准检测到的值Am的校准单元通过使用由校准系数计算单元计算出的校准系数Cm，通过信号检测器到适当的测量值Asm。

2. 发明授权

US06726803B2 Multi-sectional plasma generator with discharge gaps between multiple elements forming a plasma discharge cavity 失效
标题翻译：多级等离子体发生器，其具有形成等离子体放电腔的多个元件间的放电间隙
公开(公告)号：US06726803B2
公开(公告)日：2004-04-27
申请号：US09902217
申请日：2001-07-10
申请人： Kazuki Kondo , Michio Taniguchi , Shoichiro Minomo , Shigeki Amadatsu
发明人： Kazuki Kondo , Michio Taniguchi , Shoichiro Minomo , Shigeki Amadatsu
IPC分类号： C23C1600
CPC分类号： H01J37/32522 , H01J37/32082 , H01J37/32357 , H01J37/32532
摘要： A discharge tube is assembled from three sections formed of metal. A first discharge tube element and a second discharge tube element are connected with an insulator for forming a discharging gap and vacuum-sealing interposed between connecting flanges of both discharge tube elements along with an O-ring. The first discharge tube element and a third discharge tube element and a third discharge tube element are connected in a similar manner, and a discharge gap is formed between adjacent discharge tube elements. A high-frequency power supply is connected to each discharge tube element. Respective discharge tube elements are provided with cooling medium flow paths separately each other.
摘要翻译：放电管由金属形成的三个部分组装。第一放电管元件和第二放电管元件与用于形成放电间隙的绝缘体连接，并且与O形环一起插入两个放电管元件的连接法兰之间的真空密封。第一放电管元件和第三放电管元件和第三放电管元件以类似的方式连接，并且在相邻的放电管元件之间形成放电间隙。高频电源连接到每个放电管元件。相应的放电管元件具有彼此分开的冷却介质流动路径。

3. 发明授权

US06401653B1 Microwave plasma generator 失效
标题翻译：微波等离子发生器
公开(公告)号：US06401653B1
公开(公告)日：2002-06-11
申请号：US09829191
申请日：2001-04-09
申请人： Michio Taniguchi , Shoichiro Minomo , Shigeki Amadatsu , Kazuki Kondo
发明人： Michio Taniguchi , Shoichiro Minomo , Shigeki Amadatsu , Kazuki Kondo
IPC分类号： C23C1600
CPC分类号： H01J37/32192
摘要： A plasma generator according to the invention includes a rectangular waveguide into which a microwave is introduced, a coaxial tube connected in a T shape to the rectangular waveguide through their respective openings, a vacuum sealing window for blocking the openings with an insulator to thereby vacuum seal the interior of the coaxial tube against the rectangular waveguide, and an insulator arranged in the coaxial tube as linked to the vacuum sealing window, thus facilitating microwave matching.
摘要翻译：根据本发明的等离子体发生器包括其中引入微波的矩形波导，通过它们各自的开口以T形连接到矩形波导的同轴管;用绝缘体阻挡开口的真空密封窗，从而真空密封相对于矩形波导的同轴管的内部和与真空密封窗相连接的同轴管中的绝缘体，从而有助于微波匹配。

4. 发明授权

US08710824B2 Voltage detector having voltage detection printed board 有权
标题翻译：电压检测器具有电压检测印刷电路板
公开(公告)号：US08710824B2
公开(公告)日：2014-04-29
申请号：US13196325
申请日：2011-08-02
申请人： Yoshifumi Ibuki , Shigeki Amadatsu , Tomohiko Kitano , Shuji Omae
发明人： Yoshifumi Ibuki , Shigeki Amadatsu , Tomohiko Kitano , Shuji Omae
IPC分类号： G01R1/20 , G01R15/18 , G01R27/26
CPC分类号： G01R15/181 , G01R15/142 , G01R15/16
摘要： A voltage detector having a voltage detection printed board including a board having a penetration hole that penetrates the board, a first pattern wire formed at a periphery of the penetration hole, a second pattern wire formed at the periphery of the penetration hole, and a plurality of through holes that penetrate the board between the first and second pattern wires. Also provided is a conductive casing in which the voltage detection printed board is fixed, wherein, when a conductor, in which AC voltage is generated, is disposed to pass through the penetration hole, the pattern wires act with the conductor to function as electrodes of a capacitor.
摘要翻译：一种电压检测器，具有电压检测用印刷电路板，具有贯通孔的贯通孔的基板，形成在贯通孔周边的第一图案线，形成于贯通孔周边的第二图形线，以及多个穿过第一和第二图案线之间的板的通孔。还提供了一种导电壳体，其中电压检测印刷电路板是固定的，其中，当产生交流电压的导体被布置成穿过穿透孔时，图案线与导体起作用，一个电容器。

5. 发明申请

US20110285412A1 CURRENT DETECTION PRINTED BOARD, VOLTAGE DETECTION PRINTED BOARD, AND CURRENT/VOLTAGE DETECTOR USING SAME, AND CURRENT DETECTOR AND VOLTAGE DETECTOR 有权
标题翻译：电流检测印刷电路板，电压检测印刷电路板和使用相同的电流/电压检测器，以及电流检测器和电压检测器
公开(公告)号：US20110285412A1
公开(公告)日：2011-11-24
申请号：US13196325
申请日：2011-08-02
申请人： Yoshifumi IBUKI , Shigeki AMADATSU , Tomohiko KITANO , Shuji OMAE
发明人： Yoshifumi IBUKI , Shigeki AMADATSU , Tomohiko KITANO , Shuji OMAE
IPC分类号： G01R27/26
CPC分类号： G01R15/181 , G01R15/142 , G01R15/16
摘要： A current detection printed board includes: a board having a penetration hole that penetrates the board; and at least one wire that is formed in a coiled shape having both ends by penetrating the board along the periphery of the penetration hole and alternately connecting a front surface layer and a rear surface layer of the board, wherein, when a conductor, in which an AC current flows, is disposed to pass through the inside of the penetration hole, a current flowing in the wire is output through electromagnetic induction.
摘要翻译：电流检测印刷电路板包括：具有穿透板的穿孔的板; 以及形成为线状的至少一根线，其两端通过沿着贯通孔的周缘穿过基板，并且交替地连接板的前表面层和后表面层，其中，当导体中交流电流流过，穿过穿透孔的内部，流过电线的电流通过电磁感应输出。

6. 发明申请

US20070194797A1 CURRENT DETECTION PRINTED BOARD, VOLTAGE DETECTION PRINTED BOARD, AND CURRENT/VOLTAGE DETECTOR USING SAME, AND CURRENT DETECTOR AND VOLTAGE DETECTOR 有权
标题翻译：电流检测印刷电路板，电压检测印刷电路板和使用相同的电流/电压检测器，以及电流检测器和电压检测器
公开(公告)号：US20070194797A1
公开(公告)日：2007-08-23
申请号：US11627703
申请日：2007-01-26
申请人： Yoshifumi IBUKI , Shigeki AMADATSU , Tomohiko KITANO , Shuji OMAE
发明人： Yoshifumi IBUKI , Shigeki AMADATSU , Tomohiko KITANO , Shuji OMAE
IPC分类号： G01R27/00
CPC分类号： G01R15/181 , G01R15/142 , G01R15/16
摘要： A current detection printed board includes: a board having a penetration hole that penetrates the board; and at least one wire that is formed in a coiled shape having both ends by penetrating the board along the periphery of the penetration hole and alternately connecting a front surface layer and a rear surface layer of the board, wherein, when a conductor, in which an AC current flows, is disposed to pass through the inside of the penetration hole, a current flowing in the wire is output through electromagnetic induction.
摘要翻译：电流检测印刷电路板包括：具有穿透板的穿孔的板; 以及形成为线状的至少一根线，其两端通过沿着贯通孔的周缘穿过基板，并且交替地连接板的前表面层和后表面层，其中，当导体中交流电流流过，穿过穿透孔的内部，流过电线的电流通过电磁感应输出。

7. 发明申请

US20100176904A1 CURRENT DETECTION PRINTED BOARD, VOLTAGE DETECTION PRINTED BOARD, AND CURRENT/VOLTAGE DETECTOR USING SAME, AND CURRENT DETECTOR AND VOLTAGE DETECTOR 审中-公开
标题翻译：电流检测印刷电路板，电压检测印刷电路板和使用相同的电流/电压检测器，以及电流检测器和电压检测器
公开(公告)号：US20100176904A1
公开(公告)日：2010-07-15
申请号：US12732773
申请日：2010-03-26
申请人： Yoshifumi IBUKI , Shigeki Amadatsu , Tomohiko Kitano , Shuji Omae
发明人： Yoshifumi IBUKI , Shigeki Amadatsu , Tomohiko Kitano , Shuji Omae
IPC分类号： H01F38/30
CPC分类号： G01R15/181 , G01R15/142 , G01R15/16
摘要： A current detection printed board includes: a board having a penetration hole that penetrates the board; and at least one wire that is formed in a coiled shape having both ends by penetrating the board along the periphery of the penetration hole and alternately connecting a front surface layer and a rear surface layer of the board, wherein, when a conductor, in which an AC current flows, is disposed to pass through the inside of the penetration hole, a current flowing in the wire is output through electromagnetic induction.
摘要翻译：电流检测印刷电路板包括：具有穿透板的穿孔的板; 以及形成为线状的至少一根线，其两端通过沿着贯通孔的周缘穿过基板，并且交替地连接板的前表面层和后表面层，其中，当导体中交流电流流过，穿过穿透孔的内部，流过电线的电流通过电磁感应输出。

8. 发明授权

US07714594B2 Current detection printed board, voltage detection printed board, and current/voltage detector using same, and current detector and voltage detector 有权
标题翻译：电流检测印刷电路板，电压检测印刷电路板和使用其的电流/电压检测器，以及电流检测器和电压检测器
公开(公告)号：US07714594B2
公开(公告)日：2010-05-11
申请号：US11627703
申请日：2007-01-26
申请人： Yoshifumi Ibuki , Shigeki Amadatsu , Tomohiko Kitano , Shuji Omae
发明人： Yoshifumi Ibuki , Shigeki Amadatsu , Tomohiko Kitano , Shuji Omae
IPC分类号： G01R27/26 , G01R1/20
CPC分类号： G01R15/181 , G01R15/142 , G01R15/16
摘要： A current detection printed board includes: a board having a penetration hole that penetrates the board; and at least one wire that is formed in a coiled shape having both ends by penetrating the board along the periphery of the penetration hole and alternately connecting a front surface layer and a rear surface layer of the board, wherein, when a conductor, in which an AC current flows, is disposed to pass through the inside of the penetration hole, a current flowing in the wire is output through electromagnetic induction.
摘要翻译：电流检测印刷电路板包括：具有穿透板的穿孔的板; 以及形成为线状的至少一根线，其两端通过沿着贯通孔的周缘穿过基板，并且交替地连接板的前表面层和后表面层，其中，当导体中交流电流流过，穿过穿透孔的内部，流过电线的电流通过电磁感应输出。

9. 发明申请

US20070152678A1 Plasma processing system 有权
标题翻译：等离子体处理系统
公开(公告)号：US20070152678A1
公开(公告)日：2007-07-05
申请号：US11636389
申请日：2006-12-08
申请人： Hiroshi Matoba , Ryohei Tanaka , Shuji Omae , Shigeki Amadatsu
发明人： Hiroshi Matoba , Ryohei Tanaka , Shuji Omae , Shigeki Amadatsu
IPC分类号： G01R35/00
CPC分类号： H05H1/46 , H01J37/321 , H01J37/32174 , H01J37/32935
摘要： A high-frequency measurement unit includes a signal detector for detecting a high-frequency signal, and a calibration coefficient storage for storing calibration coefficients Cmin and Cmax used to calibrate a value Amin detected at the lowest limit frequency fmin and a value Amax detected at the uppermost limit frequency fmax to a proper measurement value Asmin and to a proper measurement value Asmax, respectively. The high-frequency measurement unit further includes a frequency detection unit for detecting a frequency fm of the high-frequency signal, a calibration coefficient calculation unit for calculating a calibration coefficient Cm for the frequency fm, and a calibration unit for calibrating the value Am detected by the signal detector to a proper measurement value Asm by using the calibration coefficient Cm calculated by the calibration coefficient calculation unit.
摘要翻译：高频测量单元包括用于检测高频信号的信号检测器和用于存储校准系数Cmin和Cmax的校准系数存储器，用于校准在最低限频率fmin处检测到的值A a和分别为适当的测量值Asmin和适当的测量值Asmax的最上限频率fmax。高频测量单元还包括用于检测高频信号的频率fm的频率检测单元，用于计算频率fm的校准系数Cm的校准系数计算单元和用于校准检测到的值Am的校准单元通过使用由校准系数计算单元计算出的校准系数Cm，通过信号检测器到适当的测量值Asm。

10. 发明授权

US5843236A Plasma processing apparatus for radiating microwave from rectangular waveguide through long slot to plasma chamber 失效
标题翻译：等离子体处理装置，用于从矩形波导通过长槽辐射到等离子体室
公开(公告)号：US5843236A
公开(公告)日：1998-12-01
申请号：US529282
申请日：1995-09-15
申请人： Hiroyuki Yoshiki , Kazuki Kondo , Akira Ishii , Shigeki Amadatsu , Tatsuya Saijo , Koji Itadani , Takahiro Aoyama
发明人： Hiroyuki Yoshiki , Kazuki Kondo , Akira Ishii , Shigeki Amadatsu , Tatsuya Saijo , Koji Itadani , Takahiro Aoyama
IPC分类号： H01J37/32 , C23C16/00
CPC分类号： H01J37/32229 , H01J37/32192 , H01J37/32238 , H01J37/32256 , H01J37/3266 , H01J37/3277
摘要： In a plasma processing apparatus including a plasma chamber having a narrow window, and a rectangular waveguide for coupling with the plasma chamber, the rectangular waveguide has a long slot disposed in an E-plane thereof so as to oppose the narrow window of the plasma chamber and to extend along a waveguide-axis direction of the rectangular waveguide. There is further provided at least two long slots disposed in at least one rectangular waveguide, and the longitudinal length of each long slot is set to 1/2 or more of a free-space wavelength of the microwave. Further, the long slots are disposed so as to be parallel to each other such that adjacent long slots are shifted from each other by (2n-1)/4 of the free-space wavelength of the microwave in the waveguide-axis direction of the rectangular waveguide, where n is a natural number.
摘要翻译：在包括具有窄窗口的等离子体室和与等离子体室耦合的矩形波导的等离子体处理装置中，矩形波导具有设置在其E平面中的长槽，以与等离子体室的窄窗口相对并且沿着矩形波导的波导轴方向延伸。还设置有至少两个长槽，设置在至少一个矩形波导中，并且每个长槽的纵向长度被设置为微波的自由空间波长的+ E，fra 1/2 + EE或更多。此外，长槽被布置成彼此平行，使得相邻的长槽在微波的自由空间波长的波导轴方向上相互偏移（2n-1）/ 4 矩形波导，其中n是自然数。

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