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    • 9. 发明申请
    • Self displacement sensing cantilever and scanning probe microscope
    • 自动位移检测悬臂和扫描探针显微镜
    • US20100132075A1
    • 2010-05-27
    • US12592428
    • 2009-11-24
    • Masato IyokiNaoya Watanabe
    • Masato IyokiNaoya Watanabe
    • G01Q20/02G01Q20/00
    • G01Q20/04G01Q30/025G01Q70/14
    • Provided is a self displacement sensing cantilever, including: a cantilever (4) that has a probe (2) at its tip and has a distal end portion (3) at its distal end; a displacement detecting portion (5) that is provided to the cantilever (4), for detecting a displacement of the cantilever (4); an electrode portion (6) that is connected to the displacement detecting portion (5) and is communicated with the distal end portion (3); and an insulation film (7) that is formed over at least one of the electrode portion (6) and the displacement detecting portion (5) of the cantilever (4), in which the insulation film (7) is applied a coating of an arbitrary functional material (8). As a result, measurement with a scanning probe microscope may be performed at the same time as projecting light.
    • 本发明提供一种自移位检测悬臂,包括:悬臂(4),其顶端具有探针(2),并在其远端具有远端部分(3); 位移检测部(5),其设置在所述悬臂(4)上,用于检测所述悬臂(4)的位移; 与所述位移检测部(5)连接并与所述前端部(3)连通的电极部(6)。 以及形成在所述悬臂(4)的所述电极部(6)和所述位移检测部(5)中的至少一个上的绝缘膜(7),其中所述绝缘膜(7)被涂覆在所述悬臂 任意功能材料(8)。 结果,可以在与投射光同时进行扫描探针显微镜的测量。
    • 10. 发明授权
    • Scanning probe microscope and scanning method
    • 扫描探针显微镜和扫描方法
    • US07456400B2
    • 2008-11-25
    • US11235458
    • 2005-09-26
    • Masatsugu ShigenoYoshiharu ShirakawabeAmiko NiheiOsamu MatsuzawaNaoya WatanabeAkira Inoue
    • Masatsugu ShigenoYoshiharu ShirakawabeAmiko NiheiOsamu MatsuzawaNaoya WatanabeAkira Inoue
    • G12B21/00
    • G01Q60/32G01Q10/06Y10S977/849Y10S977/851Y10S977/852Y10S977/86Y10S977/872
    • A scanning probe microscope has a probe needle and a control section that controls relative scanning movement between the probe needle and a surface of a sample in at least one direction parallel to the sample surface and controls relative movement between the probe needle and the sample surface in a direction perpendicular to the sample surface. A vibration source vibrates the probe needle at a vibrating frequency relative to the sample surface. An approach/separation drive section causes the probe needle to relatively approach to and separate from the sample surface at a predetermined distance while the probe needle is vibrated at the vibrating frequency relative to the sample surface by the vibration source. A detection section detects a rate of change in a vibration state of the probe needle in accordance with a distance between the probe needle and the sample surface. An observation section gathers observation data from the sample surface when the rate of change in the vibration state of the probe needle detected by the detection section has exceeded a preselected threshold value.
    • 扫描探针显微镜具有探针和控制部,其控制探针和样品表面之间的平行于样品表面的至少一个方向上的相对扫描运动,并且控制探针与样品表面之间的相对运动 垂直于样品表面的方向。 振动源以相对于样品表面的振动频率振动探针。 接近/分离驱动部分使得探针相对于样品表面以预定距离相对接近和分离,同时探针以振动源相对于样品表面的振动频率振动。 检测部根据探针与样本面的距离来检测探针的振动状态的变化率。 当由检测部检测到的探针的振动状态的变化率超过预选阈值时,观察部分从样本表面收集观察数据。