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    • 10. 发明授权
    • Method of manufacturing micro flux gate sensor
    • 微通量门传感器的制造方法
    • US07389576B2
    • 2008-06-24
    • US11403904
    • 2006-04-14
    • Kyoung-won NaJingli Yuan
    • Kyoung-won NaJingli Yuan
    • G01R3/00
    • G01R33/05Y10T29/49002Y10T29/49004Y10T29/49007Y10T29/4902Y10T29/4906Y10T29/49071Y10T29/49073
    • A method of manufacturing a micro flux gate sensor that has a good electrical connection and can be easily manufactured includes operations of forming a metal pattern, forming a first insulation layer to cover the metal pattern and forming viaholes to expose a certain portion of the metal pattern, applying an electrical signal through the metal pattern and plating the viaholes with a metal material to form a connection portion, forming a magnetic core on an upper portion of the first insulation layer, forming a second insulation layer to cover the magnetic core and forming an upper coil portion electrically connected to the connection portion to form the excitation coil and the magnetic field detecting coil, forming a third insulation layer to cover the upper coil portion, and removing a certain portion of the metal pattern to leave only the lower coil portion of the metal pattern.
    • 制造具有良好的电连接并且可以容易地制造的微通量门传感器的方法包括形成金属图案的操作,形成第一绝缘层以覆盖金属图案并形成通孔以露出金属图案的某一部分 通过所述金属图案施加电信号并用金属材料电镀所述通孔以形成连接部分,在所述第一绝缘层的上部形成磁芯,形成第二绝缘层以覆盖所述磁芯并形成 上部线圈部分电连接到连接部分以形成激励线圈和磁场检测线圈,形成第三绝缘层以覆盖上部线圈部分,以及去除金属图案的某一部分以仅留下下部线圈部分 金属图案。