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1. 发明授权

US08079135B1 Method for providing a perpendicular magnetic recording (PMR) transducer 有权
标题翻译：提供垂直磁记录（PMR）传感器的方法
公开(公告)号：US08079135B1
公开(公告)日：2011-12-20
申请号：US11955667
申请日：2007-12-13
申请人： Yong Shen , Liubo Hong , Guanghong Luo , Honglin Zhu , Lei Wang , Yingjian Chen
发明人： Yong Shen , Liubo Hong , Guanghong Luo , Honglin Zhu , Lei Wang , Yingjian Chen
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for providing a perpendicular magnetic recording (PMR) transducer is described. The PMR transducer provided includes a PMR pole and yoke structure coupled with the PMR pole. The method includes providing a hard mask and an intermediate layer. A first portion of the hard mask resides on the PMR pole. A second portion of the hard mask resides on another structure. The intermediate layer surrounds at least the PMR pole. The method also includes performing a planarization on at least the intermediate layer, removing the first portion of the hard mask on the PMR pole without completely removing the second portion of the hard mask on the other structure. The method further includes removing a remaining portion of the hard mask on the other structure, providing a write gap on the PMR pole, and providing a shield on the write gap.
摘要翻译：描述了一种用于提供垂直磁记录（PMR）换能器的方法。提供的PMR传感器包括与PMR极耦合的PMR极和轭结构。该方法包括提供硬掩模和中间层。硬掩模的第一部分位于PMR杆上。硬掩模的第二部分位于另一结构上。中间层至少包围PMR极。该方法还包括在至少中间层上执行平面化，在PMR极上去除硬掩模的第一部分，而不必在另一个结构上完全去除硬掩模的第二部分。该方法还包括移除另一结构上的硬掩模的剩余部分，在PMR极上提供写入间隙，并在写入间隙上提供屏蔽。

2. 发明授权

US08146236B1 Method for providing a perpendicular magnetic recording (PMR) transducer 有权
标题翻译：提供垂直磁记录（PMR）传感器的方法
公开(公告)号：US08146236B1
公开(公告)日：2012-04-03
申请号：US12057692
申请日：2008-03-28
申请人： Guanghong Luo , Liubo Hong , Honglin Zhu , Yun-Fei Li , Yingjian Chen
发明人： Guanghong Luo , Liubo Hong , Honglin Zhu , Yun-Fei Li , Yingjian Chen
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method and system for providing a perpendicular magnetic recording (PMR) transducer from pole layer(s) are disclosed. First and second planarization stop layers are provided on the pole layer(s). A mask is provided on the second planarization stop layer. A first portion of the mask resides on a portion of the pole layer(s) used to form the PMR pole. The PMR pole is defined after the mask is provided. An intermediate layer surrounding at least the PMR pole is provided. A first planarization is performed on at least the intermediate layer. A portion of the second planarization stop layer is removed during the first planarization. A remaining portion of the second planarization stop layer is removed. A second planarization is performed. A portion of the first planarization stop layer remains after the second planarization. A write gap and shield are provided on the PMR pole and write gap, respectively.
摘要翻译：公开了一种用于从极层提供垂直磁记录（PMR）换能器的方法和系统。第一和第二平坦化停止层设置在极层上。在第二平坦化停止层上设置掩模。掩模的第一部分位于用于形成PMR极的极层的一部分上。在提供面罩之后定义PMR极。提供至少围绕PMR极的中间层。至少在中间层上执行第一平面化。在第一平坦化期间，去除第二平坦化停止层的一部分。去除第二平坦化停止层的剩余部分。执行第二平面化。在第二平面化之后，第一平坦化停止层的一部分保留。分别在PMR极和写间隙上提供写间隙和屏蔽。

3. 发明授权

US08797680B1 Perpendicular magnetic recording head having reduced shield notching 有权
标题翻译：垂直磁记录头具有减少的屏蔽开槽
公开(公告)号：US08797680B1
公开(公告)日：2014-08-05
申请号：US13417930
申请日：2012-03-12
申请人： Guanghong Luo , Liubo Hong , Honglin Zhu , Yun-Fei Li , Yingjian Chen
发明人： Guanghong Luo , Liubo Hong , Honglin Zhu , Yun-Fei Li , Yingjian Chen
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A perpendicular magnetic recording (PMR) transducer is provided. The PRM transducer includes a PMR pole having a top, a bottom, and at least one sidewall, the bottom having a bottom width, the top having a top width bigger than the bottom width. The PRM transducer further includes an intermediate layer adjacent to the at least one sidewall, a write gap on the PMR pole, the write gap including a first layer on the PMR pole, the first layer including a planarization stop layer, and a shield on the write gap.
摘要翻译：提供垂直磁记录（PMR）传感器。 PRM传感器包括具有顶部，底部和至少一个侧壁的PMR极，底部具有底部宽度，顶部具有大于底部宽度的顶部宽度。 PRM换能器还包括与至少一个侧壁相邻的中间层，PMR极上的写入间隙，写入间隙包括PMR极上的第一层，第一层包括平坦化停止层，以及屏蔽写差距。

4. 发明授权

US08404128B1 Method and system for providing a perpendicular magnetic recording head 有权
标题翻译：用于提供垂直磁记录头的方法和系统
公开(公告)号：US08404128B1
公开(公告)日：2013-03-26
申请号：US12391095
申请日：2009-02-23
申请人： Hong Zhang , Ge Yi , Lei Wang , Dujiang Wan , Guanghong Luo , Xiaohai Xiang
发明人： Hong Zhang , Ge Yi , Lei Wang , Dujiang Wan , Guanghong Luo , Xiaohai Xiang
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3163 , Y10T29/4902 , Y10T29/49021 , Y10T29/49032 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method and system for providing a magnetic recording transducer having a pole are disclosed. The pole has side(s), a bottom, and a top wider than the bottom. The method and system include providing at least one side gap layer that covers the side(s) and the top of the pole. At least one sacrificial layer is provided on the side gap layer(s). The sacrificial layer(s) are wet etchable and cover the side gap layer(s). The magnetic recording transducer is planarized after the sacrificial layer(s) are provided. Thus, a portion of the side gap and sacrificial layer(s) is removed. A remaining portion of the sacrificial layer(s) is thus left. The method and system also include wet etching the sacrificial layer(s) to remove the remaining portion of the sacrificial layer(s). A wrap around shield is provided after the remaining portion of the sacrificial layer(s) is removed.
摘要翻译：公开了一种用于提供具有极点的磁记录换能器的方法和系统。电极具有侧面，底部和顶部比底部更宽。该方法和系统包括提供覆盖极的侧面和顶部的至少一个侧面间隙层。在侧间隙层上提供至少一个牺牲层。牺牲层是可湿蚀刻的并且覆盖侧间隙层。在提供牺牲层之后，磁记录传感器被平坦化。因此，侧面间隙和牺牲层的一部分被去除。因此留下牺牲层的剩余部分。该方法和系统还包括湿蚀刻牺牲层以去除牺牲层的剩余部分。在除去牺牲层的剩余部分之后提供环绕护罩。

5. 发明授权

US08191237B1 Method for providing a structure in a magnetic transducer 有权
标题翻译：在磁换能器中提供结构的方法
公开(公告)号：US08191237B1
公开(公告)日：2012-06-05
申请号：US12470385
申请日：2009-05-21
申请人： Guanghong Luo , Ge Yi , Dujiang Wan , Lei Wang , Xiaohai Xiang , Ming Jiang
发明人： Guanghong Luo , Ge Yi , Dujiang Wan , Lei Wang , Xiaohai Xiang , Ming Jiang
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/315 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for providing a structure in a magnetic transducer is described. The method includes performing a first planarization that exposes a top surface of the magnetic transducer. This first planarization also terminates before a portion of a first planarization buffer layer is removed. The method also includes providing a second planarization buffer layer after the first planarization is performed. The second planarization buffer layer is above the first planarization buffer layer. The method also includes performing a second planarization. This second planarization does not completely remove the second planarization buffer layer. The method also includes performing a third planarization terminating after the first planarization buffer layer is exposed and before the first planarization buffer layer is completely removed.
摘要翻译：描述了一种用于在磁换能器中提供结构的方法。该方法包括执行暴露磁换能器的顶表面的第一平面化。该第一平面化还在第一平坦化缓冲层的一部分被去除之前终止。该方法还包括在执行第一平面化之后提供第二平坦化缓冲层。第二平坦化缓冲层在第一平坦化缓冲层之上。该方法还包括执行第二平面化。该第二平面化不能完全去除第二平坦化缓冲层。该方法还包括在第一平坦化缓冲层暴露之后并且在第一平坦化缓冲层被完全去除之前执行终止的第三平坦化。

6. 发明授权

US08607438B1 Method for fabricating a read sensor for a read transducer 失效
标题翻译：读取传感器的读取传感器的制造方法
公开(公告)号：US08607438B1
公开(公告)日：2013-12-17
申请号：US13309357
申请日：2011-12-01
申请人： Wei Gao , Guanxiong Li , Ming Mao , Chih-Ching Hu , Guanghong Luo , Miao Wang , Zhihong Zhang , Anup G. Roy
发明人： Wei Gao , Guanxiong Li , Ming Mao , Chih-Ching Hu , Guanghong Luo , Miao Wang , Zhihong Zhang , Anup G. Roy
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3903 , G01R33/093 , G11B5/3163
摘要： A read sensor for a transducer is fabricated. The transducer has a field region and a sensor region corresponding to the sensor. A sensor stack is deposited. A hybrid mask including hard and field masks is provided. The hard mask includes a sensor portion covering the sensor region and a field portion covering the field region. The field mask covers the field portion of the hard mask. The field mask exposes the sensor portion of the hard mask and part of the sensor stack between the sensor and field regions. The sensor is defined from the sensor stack in a track width direction. Hard bias layer(s) are deposited. Part of the hard bias layer(s) resides on the field mask. Part of the hard bias layer(s) adjoining the sensor region is sealed. The field mask is lifted off. The transducer is planarized.
摘要翻译：制造用于换能器的读取传感器。传感器具有对应于传感器的场区域和传感器区域。传感器堆叠被沉积。提供了包括硬掩模和磁场掩模的混合掩模。硬掩模包括覆盖传感器区域的传感器部分和覆盖场区域的场部分。场掩模覆盖硬掩模的场部分。场掩模将传感器和场区域之间的硬掩模的传感器部分和传感器堆叠的一部分暴露。传感器从传感器堆叠在轨道宽度方向上定义。硬偏置层被沉积。硬偏置层的一部分位于场掩模上。邻近传感器区域的一部分硬偏压层被密封。场地面罩被提起。传感器平坦化。

7. 发明授权

US08563146B1 Method and system for providing a magnetic recording pole having a dual sidewall angle 有权
标题翻译：用于提供具有双重侧壁角的磁记录极的方法和系统
公开(公告)号：US08563146B1
公开(公告)日：2013-10-22
申请号：US13169710
申请日：2011-06-27
申请人： Jinqiu Zhang , Ying Hong , Hai Sun , Hongping Yuan , Guanghong Luo , Xiaoyu Yang , Hongmei Han , Lingyun Miao
发明人： Jinqiu Zhang , Ying Hong , Hai Sun , Hongping Yuan , Guanghong Luo , Xiaoyu Yang , Hongmei Han , Lingyun Miao
IPC分类号： G11B5/33
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163
摘要： A method for fabricating a magnetic transducer having an air-bearing surface (ABS). An underlayer having a first and second regions and a bevel connecting these regions is provided. The first region is thicker and closer to the ABS than the second region. An intermediate layer conformal with the underlayer is provided. A hard mask layer having a top surface perpendicular to the ABS is formed on the intermediate layer. Part of the hard mask and intermediate layers are removed to provide a trench. The trench has a bottom surface and sidewalls having a first angle between the bottom surface and the intermediate layer and a second angle corresponding to the hard mask layer. A pole is provided in the trench. The pole has a pole tip, a yoke distal, and a bottom bevel. At least the yoke includes sidewalls having sidewall angles corresponding to the first and second angles.
摘要翻译：一种制造具有空气轴承表面（ABS）的磁换能器的方法。提供具有第一和第二区域的底层以及连接这些区域的斜面。第一区域比第二区域更厚且更接近ABS。提供与底层共形的中间层。在中间层上形成具有垂直于ABS的顶表面的硬掩模层。除去硬掩模和中间层的一部分以提供沟槽。沟槽具有底表面和在底表面和中间层之间具有第一角度的侧壁和对应于硬掩模层的第二角度。在沟槽中设置一个极点。杆具有极尖，轭远端和底斜面。至少轭包括具有对应于第一和第二角度的侧壁角的侧壁。

8. 发明授权

US08846534B1 Process for CMP with large feature size variation 有权
标题翻译：具有大特征尺寸变化的CMP的工艺
公开(公告)号：US08846534B1
公开(公告)日：2014-09-30
申请号：US13269453
申请日：2011-10-07
申请人： Yunfei Li , Ge Yi , Dujiang Wan , Guanghong Luo , Lijie Zhao , Yanfeng Chen , Lily Yao , Ming Jiang
发明人： Yunfei Li , Ge Yi , Dujiang Wan , Guanghong Luo , Lijie Zhao , Yanfeng Chen , Lily Yao , Ming Jiang
IPC分类号： H01L21/302
CPC分类号： G11B5/3163
摘要： Embodiments of the present invention relate to reducing the size variation on a wafer fabrication. In some embodiments, at least a portion the backfill material over features larger than a threshold size is etched or milled to provide backfill protrusions over those features. The backfill protrusions are configured to reduce the size variation across the fabrication. Embodiments of the invention may be used in fabrication of many types of devices, such as tapered wave guides (TWG), near-field transducers (NFT), MEMS devices, EAMR optical devices, optical structures, bio-optical devices, micro-fluidic devices, and magnetic writers.
摘要翻译：本发明的实施例涉及减小晶片制造的尺寸变化。在一些实施例中，至少一部分覆盖材料超过阈值尺寸的特征被蚀刻或研磨以在这些特征上提供回填突起。回填突起构造成减小制造过程中的尺寸变化。本发明的实施例可用于制造诸如锥形波导（TWG），近场换能器（NFT），MEMS装置，EAMR光学装置，光学结构，生物光学装置，微流体设备和磁性作者。

9. 发明授权

US08790524B1 Method and system for providing a magnetic recording transducer using a line hard mask and a wet-etchable mask 有权
标题翻译：用于使用线硬掩模和湿蚀刻掩模提供磁记录换能器的方法和系统
公开(公告)号：US08790524B1
公开(公告)日：2014-07-29
申请号：US12880484
申请日：2010-09-13
申请人： Guanghong Luo , Danning Yang , Ming Jiang
发明人： Guanghong Luo , Danning Yang , Ming Jiang
IPC分类号： G11B5/127 , G11B5/31 , G11B5/11
CPC分类号： G11B5/3116 , G11B5/112 , G11B5/3163 , G11B5/3903 , G11B5/3932
摘要： A method and system for fabricating a magnetic transducer is described. The transducer has device and field regions, and a magnetoresistive stack. Hard mask layer and wet-etchable layers are provided on the magnetoresistive stack and hard mask layer, respectively. A hard mask and a wet-etchable mask are formed from the hard mask and the wet-etchable layers, respectively. The hard and wet-etchable masks each includes a sensor portion and a line frame. The sensor portion covers part of the magnetoresistive stack corresponding to a magnetoresistive structure. The line frame covers a part of the magnetoresistive stack in the device region. The magnetoresistive structure is defined in a track width direction. Hard bias material(s) are then provided. Part of the hard bias material(s) is adjacent to the magnetoresistive structure in the track width direction. The wet-etchable sensor portion and line frame, and hard bias material(s) thereon, are removed.
摘要翻译：描述了用于制造磁换能器的方法和系统。传感器具有器件和场区域以及磁阻堆叠。硬掩模层和湿蚀刻层分别设置在磁阻堆叠和硬掩模层上。分别由硬掩模和湿蚀刻层形成硬掩模和湿蚀刻掩模。硬和湿可蚀刻掩模各自包括传感器部分和线框架。传感器部分覆盖对应于磁阻结构的磁阻堆叠的一部分。线框架覆盖设备区域中的磁阻堆叠的一部分。磁阻结构被定义在磁道宽度方向上。然后提供硬偏置材料。硬偏置材料的一部分在磁道宽度方向上与磁阻结构相邻。湿式可蚀刻传感器部分和线框架以及其上的硬偏移材料被去除。

10. 发明授权

US08578594B2 Process for fabricating a magnetic pole and shields 有权
标题翻译：制造磁极和屏蔽的工艺
公开(公告)号：US08578594B2
公开(公告)日：2013-11-12
申请号：US13154191
申请日：2011-06-06
申请人： Ming Jiang , Ronghui Zhou , Guanghong Luo , Masahiro Osugi , Danning Yang
发明人： Ming Jiang , Ronghui Zhou , Guanghong Luo , Masahiro Osugi , Danning Yang
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3163
摘要： A process for fabricating a magnetic recording transducer for use in a data storage system comprises providing a substrate, an underlayer and a first nonmagnetic intermediate layer deposited to a first thickness on and in contact with the underlayer, performing a first scanning polishing on a first section of the first intermediate layer to planarize the first section of the first intermediate layer to a second thickness, providing a main pole in the planarized first section of the first intermediate layer, providing a first pattern of photoresist on and in contact with the first section of the first intermediate layer, the pattern comprising an aperture to define a side shield trench, performing a wet etch to remove at least a portion of the first intermediate layer thereby exposing at least one of the plurality of main pole sides, and depositing side shield material in the side shield trench.
摘要翻译：一种用于制造用于数据存储系统的磁记录传感器的方法包括提供在底层上沉积到第一厚度并与底层接触的基底，底层和第一非磁性中间层，在第一部分上进行第一扫描抛光将所述第一中间层的第一部分平坦化为第二厚度，在所述第一中间层的平坦化的第一部分中提供主极，在所述第一中间层的所述第一部分的第一部分上提供第一图案，第一中间层，图案包括用于限定侧屏蔽沟槽的孔，执行湿蚀刻以去除第一中间层的至少一部分，从而暴露多个主极侧中的至少一个，以及沉积侧屏蔽材料在侧盾沟。

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